Six-degree-of-freedom micro-motion worktable

Abstract

The invention relates to a six-degree-of-freedom micro-motion worktable. The six-degree-of-freedom micro-motion worktable comprises first electromagnetic force driving modules and second electromagnetic force driving modules, wherein the first electromagnetic force driving modules are used for realizing the rotation of a micro-motion worktable along an X direction and a Y direction and around a Z axis, the second electromagnetic force driving modules are used for realizing the rotation of the micro-motion worktable along a Z direction and around an X axis and a Y axis, both the numbers of the first electromagnetic force driving modules and the second electromagnetic force driving modules are four groups, and four groups of the second electromagnetic force driving modules and four groups of the first electromagnetic force driving modules are alternately distributed. A rotor part of the micro-motion worktable is commonly formed by permanent magnets, yoke irons and permanent magnet frameworks of the first electromagnetic force driving modules and the permanent magnets and the permanent magnet skeletons of the four groups of the second electromagnetic force driving modules; and a stator part of the micro-motion worktable is commonly formed by coils and coil frameworks of four groups of the first electromagnetic force driving modules and the four groups of the second electromagnetic force driving modules as well as a pedestal of a micro-motion table. Compared with the prior art, the six-degree-of-freedom micro-motion worktable has the characteristics of more simplicity, compactness, small driving inertia of center of mass and small inertia of the rotor of the micro-motion table and the like.

Description

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AI Technical Summary

Benefits of technology

This patented microscope table can move up or down by applying an electric magnetic field instead of mechanically moving components. It achieves this through its own design that allows for three degrees of freedom (movement) without requiring any extra space around them. Its main technical effect being improved accuracy compared to traditional designs while also reducing complexity.

Problems solved by technology

This patents describes different technical problem addressed by this patented innovative product called Micromirror Technik Center® that uses ultrasonics to move tiny parts accurately within very small dimensions during fabricating processes such as photonics devices and electronic circuits. Current solutions have limitations like slow motion speeds caused by contact between moving components, which limits their effectiveness in achieving precise alignment. There is currently no known solution available yet without these issues being discussed further.

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