Macro-micro driven bidimensional integrated micro positioning platform

A positioning platform, macro and micro drive technology, applied to the parts of the instrument, instruments, etc., to achieve the effect of reducing motion coupling, shortening the motion link, and high stability

Active Publication Date: 2012-07-04
UNIVERSITY OF MACAU
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of this, it is necessary to address the problems mentioned in the background technology, overcome the shortcomings of the existing two-dimensional

Method used

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  • Macro-micro driven bidimensional integrated micro positioning platform
  • Macro-micro driven bidimensional integrated micro positioning platform
  • Macro-micro driven bidimensional integrated micro positioning platform

Examples

Experimental program
Comparison scheme
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Embodiment Construction

[0030] Such as figure 1 and figure 2 As shown, the macro-micro-driven two-dimensional integrated micro-positioning platform of this embodiment includes a base 4, a flexible platform body fixed on the base 4, two voice coil motors 5 connected to the flexible platform body, and four pressure coils. An electric ceramic driver 8, two displacement sensors 10, and a controller (not shown in the figure). The flexible platform body includes a macro-moving platform guide rail 2 , a macro-moving platform 13 and a micro-moving platform located in the middle of the macro-moving platform 13 , that is, an output platform 1 .

[0031] The macro-motion platform guide rail 2 and the base 4 are fixed by 8 gaskets (not shown in the figure) evenly arranged between them, the macro-motion platform guide rail 2 includes quadrants 2 arranged in a square, each The split body 2 is composed of three composite leaf spring flexible hinges 21 arranged side by side to achieve a large range of motion and ...

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Abstract

The invention provides a macro-micro driven bidimensional integrated micro positioning platform, which is characterized by including a base, a flexible platform body, two voice coil motors, four piezoelectric ceramic actuators, two displacement sensors and a controller, wherein the flexible platform body is fixed on the base; the two voice coil motors are connected with the flexible platform body; and the controller is in signal connection with the two voice coil motors, the four piezoelectric ceramic actuators and the two displacement sensors. The macro-micro driven bidimensional integrated micro positioning platform adopts a parallel decoupling totally flexible mechanism, and has the advantages of a parallel mechanism, a flexible mechanism and a decoupling mechanism; a macro-motion platform and a micro-motion platform are integrally designed; the same piece of material can be adopted to manufacture the macro-micro driven bidimensional integrated micro positioning platform integrally, and the manufacture is simple and convenient; and the motion decoupling design is applied to the macro-motion platform and the micro-motion platform, so that the motion control is facilitated and the positioning accuracy is improved.

Description

technical field [0001] The invention relates to a precision positioning platform, in particular to a long-stroke integrated precision positioning platform that is based on a voice coil motor and a piezoelectric ceramic driver and can realize dual macro and micro drives in a two-dimensional space. It is suitable for precision positioning engineering fields such as integrated circuit packaging, micro-electromechanical system manufacturing, laser processing, biomedicine, micro-operation, and micro-assembly. Background technique [0002] At present, the demand for large-travel, high-speed, high-precision positioning systems in the fields of integrated circuit packaging, MEMS manufacturing, laser processing, micro-manipulation, and micro-assembly is increasingly urgent. Therefore, various precision positioning systems and devices have been developed. [0003] The traditional two-dimensional translational high-precision micro-positioning platform adopts a series structure, that i...

Claims

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Application Information

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IPC IPC(8): G12B5/00
Inventor 徐青松
Owner UNIVERSITY OF MACAU
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