Micromechanical hair flow velocity sensor based on weak coupling resonators, and running method thereof

Abstract

The invention discloses a micromechanical hair flow velocity sensor based on weak coupling resonators. Out-of-plane stereo hair is adhered at a geometric center of a middle layer micro-silicon sensor,a structure of the middle layer micro-silicon sensor is composed of a mass block base, four same weak coupling resonator groups and four same out-of-plane motorial inhibition elastic structures; foursame weak coupling resonator groups are symmetrically arranged an upper direction, a lower direction, a left direction and a right direction of the mass block base; the weak coupling resonator groupsare connected with the mass block base through input straight girders of secondary force amplification levers; four same out-of-plane motorial inhibition elastic structures are symmetrically distributed at a left upper direction, a right upper direction a right lower direction and a left lower direction of the mass block base, and the out-of-plane motorial inhibition elastic structures are connected with the mass block base through the out-of-plane motorial inhibition elastic U-shaped girders. By arranging the weak coupling resonator groups and the out-of-plane motorial inhibition elastic structures in a symmetric structure, the biaxial sensitivity of in-plane flow velocity is realized.

Description

technical field [0001] The invention belongs to the technical field of micro-electro-mechanical systems and micro-fluid measurements, and in particular relates to a micro-mechanical hair flow velocity sensor based on the mode localization effect of a weakly coupled resonator that can be used for biaxial in-plane fluid sensitivity. Background technique [0002] Micro-mechanical systems (MEMS) are micro-devices or micro-devices that use traditional semiconductor processes and materials to integrate micro-sensors, micro-actuators, micro-mechanical mechanisms, signal processing and control circuits, high-performance electronic integrated devices, interfaces, communications and power supplies. The system has the characteristics of small size, low cost, and integration. MEMS sensors are widely used in consumer electronics such as smartphones, AR / VR, wearables, smart driving, smart factories, smart logistics, smart homes, environmental monitoring, smart medical care and other IoT f...

AI Technical Summary

Problems solved by technology

However, the hair velocity sensors developed by most institutions have relatively low sensitivity and poor practicability

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