Preparation method of elastic hard lubricating nano composite thin-film material

A nano-composite, thin-film material technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve problems such as wear and loud noise, and achieve the effect of increasing hardness

Active Publication Date: 2016-04-20
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, from the composition of such nanocomposite films, it is known that it only has wear-resistant properties, but no lubricating behavior
This will cause the elastic hard nanocomposite film to cause serious wear to its counterpart material (especially soft matter) during use, and it is easy to emit a large noise

Method used

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  • Preparation method of elastic hard lubricating nano composite thin-film material
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  • Preparation method of elastic hard lubricating nano composite thin-film material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Deposition: Change the sputtering gas to N 2 and Ar into the chamber to control the total pressure and N 2 The partial pressures were 1.5Pa and 20%, respectively, the incident angle of the deposited ions was 90° to the substrate, the distance between the target and the substrate was 8cm, the deposition time was 60min, the initial chamber temperature was 25°C, and the power of the DC power supply was 1000W. Bias voltage and duty cycle are -200V and 60% respectively, pure titanium target is sputtered, and a series of TiN nano-films can be prepared by changing the incident angle of deposited ions (0-90°). Etching: only the etching gas N 2 Into the chamber, the total pressure is 2.5Pa, the initial chamber temperature is 40°C, the negative bias voltage and duty cycle are -900V and 80% respectively, and the etching time is 40min. Different channels can be prepared by adjusting the etching time Structure and pore size of nanoporous TiN frameworks. Carbon-containing plasma t...

Embodiment 2

[0029] As described in Example 1, the pure titanium target was replaced with a pure chromium target to prepare a series of elastic hard lubricating nanocomposite films with CrN as the skeleton.

[0030] The CrN skeleton and the nanocomposite film were observed with a field emission scanning electron microscope. The CrN skeleton is a rod-shaped porous structure with a thickness of 500nm, while the film thickness of the nanocomposite film is about 620nm. The thickness of the graphite layer is 120nm. The composite film and the substrate are well bonded, and there is no gap. The application of X-ray diffractometer shows that the elastic hard lubricating nanocomposite film has the crystal phase structure of chromium nitride and chromium carbonitride. In Raman spectroscopy, graphite peaks are clearly present in such nanocomposite films. The surface of the film was found to be relatively smooth with a roughness of less than 5nm by atomic force microscopy. Through the scratch test, ...

Embodiment 3

[0032] As described in Example 1, a series of elastic hard lubricating nanocomposite films with ZrN as the skeleton were prepared by replacing the pure titanium target with the pure zirconium target.

[0033] Using a field emission scanning electron microscope to observe the ZrN skeleton and nanocomposite film, the ZrN skeleton is a rod-shaped porous structure with a thickness of 350nm, while the film thickness of the nanocomposite film is about 450nm, so the thickness of the graphite layer is 100nm. The composite film and the substrate are well bonded, and there is no gap. The application of X-ray diffractometer shows that the elastic hard lubricating nanocomposite film has the crystal phase structure of zirconium nitride and zirconium carbonitride. In Raman spectroscopy, graphite peaks are clearly present in such nanocomposite films. The surface of the film was found to be relatively smooth with a roughness of less than 5nm by atomic force microscopy. Through the scratch t...

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Abstract

The invention discloses a preparation method of an elastic hard lubricating nano composite thin-film material. According to the method, the elastic hard lubricating nano composite thin-film material is prepared at low temperature through the combination of the technologies of magnetron sputtering deposition and plasma treatment; the thin film adopts a nitride (such as titanium nitride (TiN), chromium nitride (CrN), zirconium nitride (ZrN), and the like) porous structure as a skeleton, and nanopores are filled with soft matter graphite, so that the hard phase / soft phase composite nano thin film is formed, the surface is smooth, the bonding with a base material is firm, and high hardness and toughness and good lubricating behavior are achieved; and the porous thin film is applicable to the fields of flexible electronic materials, flat panel displays, microelectronic mechanical systems, polymer protection, glass sheets, textile fabrics, antifriction and abrasion-resistant objects, and the like.

Description

technical field [0001] The invention belongs to the technical field of thin film material preparation, and in particular relates to a method for preparing a nanocomposite thin film material with high elasticity, high hardness and lubricity at low temperature. Background technique [0002] Hard nanocomposite films embody the development trend of a new generation of films. Usually, the main purpose of synthesizing rigid nanocomposite films is to enhance their hardness. When the hardness of such a film exceeds 40 GPa, it is called an ultrahard nanocomposite film. However, increasing stiffness is not the only consideration for rigid nanocomposite films in many modern applications. Sometimes the toughness of a hard film is far more important than the extremely high hardness (>40GPa). Therefore, at present, the development of nanocomposite films with high hardness, high toughness and bendability (ie, elastic hard nanocomposite films) has attracted the attention of a large nu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/06C23C14/58
CPCC23C14/0641C23C14/35C23C14/5826C23C14/5873
Inventor 郑建云郝俊英刘维民
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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