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Manufacturing method for carbonyl fluoride

A manufacturing method and technology of carbonyl fluoride, applied in chemical instruments and methods, carbon compounds, inorganic chemistry, etc., can solve problems such as high toxicity of raw materials, explosion, and difficult reaction temperature

Active Publication Date: 2012-12-12
DAIKIN IND LTD
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  • Abstract
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Problems solved by technology

[0008] The above-mentioned methods 1 to 3 have difficulties in requiring expensive equipment such as electrolytic cells, high toxicity of raw materials used, high ignitability of raw materials and reaction mixture, and the need for a reaction temperature above 500 ° C. They are not suitable for industrial production of carbon dioxide. Acyl fluoride
[0009] Regarding the above method 4, there is a method of oxidizing tetrafluoroethylene with oxygen to obtain carbonyl fluoride, but there is a risk of explosion when tetrafluoroethylene is directly reacted with oxygen

Method used

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  • Manufacturing method for carbonyl fluoride
  • Manufacturing method for carbonyl fluoride
  • Manufacturing method for carbonyl fluoride

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Embodiment

[0046] Hereinafter, the present invention will be described in more detail by way of examples, but the present invention is not limited to these examples.

[0047] Tetrafluoroethylene gas (hereinafter also referred to as TFE gas) having a tetrafluoroethylene purity of 99 mol % and a chlorodifluoromethane content of 0.1 mol % or less (substantially 0 mol %) was used as the raw material tetrafluoroethylene gas.

[0048]As the reactor, a straight tube reactor with an inner diameter of 1.78 mm and a length of 20 m (manufactured by Toray Engineering Co., Ltd., "microreactor for high-temperature reaction") whose temperature can be adjusted by an external heater was used.

[0049] The reactor was set to a predetermined temperature in advance, and nitrogen gas was circulated from the inlet at one end of the reactor to the outlet at the other end to clean the inside of the reactor.

[0050] The TFE gas and air were mixed with a stirrer installed near the reactor inlet, introduced into ...

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Abstract

The present invention provides a manufacturing method for carbonyl fluoride. The method is a novel method for safely and effectively getting carbonyl fluoride through reacting tetrafluoroethylene with oxygen. The carbonyl fluoride is obtained by reacting tetrafluoroethylene with oxygen and heating in the presence of air, wherein the amount of air is more than eight times of tetrafluoroethylene gas in moles.

Description

technical field [0001] The present invention relates to a method for producing carbonyl fluoride, and more specifically, to a method for obtaining carbonyl fluoride by reacting tetrafluoroethylene with oxygen. Background technique [0002] Carbonyl fluoride (COF 2 ) has been used as a substitute for a gas with a high global warming coefficient, which has been used as a cleaning gas for CVD (Chemical Vapor Deposition) equipment used in the semiconductor industry, etc., and its demand is gradually expanding. [0003] As a method for producing carbonyl fluoride, the following method is known (see Patent Document 1). [0004] 1. Method using carbon monoxide or carbon dioxide as raw material [0005] 2. The method of using carbonyl chloride as a raw material [0006] 3, the method that takes trifluoromethane as raw material [0007] 4. The method of using tetrafluoroethylene as raw material [0008] The above-mentioned methods 1 to 3 have difficulties in requiring expensive ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B31/00C01B32/00
Inventor 中谷英树平井麻衣森本和贺
Owner DAIKIN IND LTD
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