401 results about "Disiloxane" patented technology

A method and apparatus for depositing a low dielectric constant film by reaction of an organosilicon compound and an oxidizing gas at a constant RF power level from about 10W to about 200W or a pulsed RF power level from about 20W to about 500W. Dissociation of the oxidizing gas can be increased prior to mixing with the organosilicon compound, preferably within a separate microwave chamber, to assist in controlling the carbon content of the deposited film. The oxidized organosilane or organosiloxane film has good barrier properties for use as a liner or cap layer adjacent other dielectric layers. The oxidized organosilane or organosiloxane film may also be used as an etch stop and an intermetal dielectric layer for fabricating dual damascene structures. The oxidized organosilane or organosiloxane films also provide excellent adhesion between different dielectric layers. A preferred oxidized organosilane film is produced by reaction of methylsilane, CH3SiH3, dimethylsilane, (CH3)2SiH2, or 1,1,3,3-tetramethyl-disiloxane, (CH3)2-SiH-O-SiH-(CH3)2, and nitrous oxide, N2O, at a constant RF power level from about 10W to about 150W, or a pulsed RF power level from about 20W to about 250W during 10% to 30% of the duty cycle.

Disiloxane compounds of the formulaMM′Where M comprises either branched allyl hydrocarbon substituents or silanyl substituents and M′ comprises an alkylpolyalkyleneoxide substituent. The disiloxane compounds of the invention exhibit an enhanced resistance to hydrolysis outside a pH range ranging from 6 to 7.5, and are useful as surfactants.

A method for fabricating a SiCOH dielectric material comprising Si, C, O and H atoms from a single organosilicon precursor with a built-in organic porogen is provided. The single organosilicon precursor with a built-in organic porogen is selected from silane (SiH4) derivatives having the molecular formula SiRR1R2R3, disiloxane derivatives having the molecular formula R4R5R6—Si—O—Si—R7R8R9, and trisiloxane derivatives having the molecular formula R10R11R12—Si—O—Si—R13R14—O—Si—R15R16R17 where R and R1-17 may or may not be identical and are selected from H, alkyl, alkoxy, epoxy, phenyl, vinyl, allyl, alkenyl or alkynyl groups that may be linear, branched, cyclic, polycyclic and may be functionalized with oxygen, nitrogen or fluorine containing substituents. In addition to the method, the present application also provides SiCOH dielectrics made from the inventive method as well as electronic structures that contain the same.

Compositions comprising disiloxane surfactant compositions comprising a silicone composition comprising a silicone having the formula:MM′whereM=R1R2R3SiO1 / 2;M′=R4R5R6SiO1 / 2;with R1 selected from the group consisting of branched monovalent hydrocarbon radical of from 3 to 6 carbon atoms and R7, where R7 has the formula:R8R9R10SiR12with R8, R9, and R10 each independently selected from the group of monovalent hydrocarbon radicals having from 1 to 6 carbon atoms and monovalent aryl or alkaryl hydrocarbon radicals having from 6 to 13 carbon atoms and R12 is a divalent hydrocarbon radical having from 1 to 3 carbon atoms,R2 and R3 are each independently selected from the group of from 1 to 6 carbon atom monovalent hydrocarbon radicals or R1, with R4 an alkylpolyalkyleneoxide of the general formula:R13(C2H4O)a(C3H6O)b(C4H8O)cR14where R13 is a divalent linear or branched hydrocarbon radical having the structure:—CH2—CH(R15)(R16)dO—where R15 is H or methyl; R16 is a divalent alkyl radical of 1 to 6 carbons where the subscript d may be 0 or 1;R14 is selected from the group consisting of H, monovalent hydrocarbon radicals of from 1 to 6 carbon atoms and acetyl where the subscripts a; b and c are zero or positive and satisfy the following relationships:2≦a+b+c≦20 with a≧2,and R5 and R6 are each independently selected from the group of monovalent hydrocarbon radicals having from 1 to 6 carbon atoms or R4 that exhibit resistance to hydrolysis over a wide pH range.

Compositions comprising an asymmetric disiloxane surfactant composition comprising a silicone composition comprising a silicone having the formula:MM′where M or M′ comprises an alkylpolyalkyleneoxide bearing substituent selected from the group consisting of:R13(C2H4O)a(C3H6O)b(C4H8O)cR14 andR12SiR5R6(R13(C2H4O)a(C3H6O)b(C4H8O)cR14)that exhibit resistance to hydrolysis over a wide pH range.