83 results about "Rf filters" patented technology

Described herewith are an RF filter assembly for processing a coupled RF power originated from a substrate support assembly of a processing chamber, a chucking circuit for the substrate support assembly, and a method for processing the coupled RF power. The RF filter assembly includes a compensation circuit connected to an electrode of the substrate support assembly and configured to receive the coupled RF power and reduce a reflection of the coupled RF power back to the substrate support assembly; and an RF filter block configured to receive signals processed by the compensation circuit and comprising a plurality of RF filters configured to filter out predetermined frequencies of the coupled RF power. The chucking circuit includes the RF filter assembly. The method includes process and operations of the RF filter assembly.

The invention provides a radio frequency device hyper-parameter automatic optimization algorithm library. The radio frequency device hyper-parameter automatic optimization algorithm library comprises an interface module, a directional optimization algorithm module and a multi-modal optimization engine module, according to the optimization algorithm library, the automation level and the performance optimization efficiency of radio frequency device design are remarkably improved by constructing a domain knowledge graph covering six core devices including a radio frequency filter, a power amplifier, a numerical control attenuator and a low-noise amplifier and combining a customized optimization algorithm and a cross-level cooperation strategy. On the algorithm design level, aiming at the specific characteristics of the device, different hybrid optimization strategies are adopted, the global search capability of a genetic algorithm and a particle swarm optimization algorithm and the local optimization advantage of a gradient descent method are combined, and dynamic weight adjustment is matched, so that the targeted radio frequency device optimization process design is realized. According to the optimization algorithm library, through an independent calling interface for packaging the automatic design algorithm, the use difficulty of the automatic design algorithm is simplified, and the optimization process is normalized.

The present disclosure relates to an antenna apparatus, and especially comprises: a main body module in which a main board is mounted; an RF module which is fixed to the front so that an intermediate outside air layer is formed between the RF module and the main body module, and in which an RF filter unit and an antenna element unit are mounted; and an amplification unit module which is disposed so as to be exposed in the intermediate outside air layer between the main body module and the RF module, and comprises an amplification unit substrate having analog amplification elements mounted thereon, wherein heat generated from heating elements mounted on the main board is dissipated through at least any one of the front and back of the main body module, and heat generated from the amplification unit module is directly dissipated through the intermediate outside air layer, and thus the advantage of enabling maximum heat dissipation performance is provided.

Radio frequency (RF) devices are provided. An RF device includes a filter bank including a plurality of RF filters that each have a plurality of resonators. Moreover, the RF device includes a feed board that covers and is coupled to the filter bank. The resonators include in-line resonators and / or resonators that are part of a printed circuit board.

The invention discloses a filter and a radio frequency front-end module, and relates to the technical field of radio frequency filtering. The filter comprises a piezoelectric substrate, a first resonator, a second resonator and a dielectric layer. The first resonator and the second resonator are both arranged on the piezoelectric substrate, the first resonator is arranged on one side of the second resonator, a spacing area is formed between the first resonator and the second resonator, and the first resonator and the second resonator both comprise interdigital transducers; the dielectric layer is at least arranged in the spacer region; wherein the propagation speed of sound waves in the dielectric layer is greater than that of the sound waves in the interdigital transducer. According to the invention, surface acoustic waves leaked by the surface acoustic wave devices can be converted into leaky waves, so that mutual interference between the surface acoustic wave devices is effectively reduced, and the performance of the filter is improved.

Proposed are an antenna RF module and an antenna apparatus including the antenna RF modules. The antenna RF module includes an amplification unit module which is arranged between a main board and an RF filter and into which at least one analog amplification element is built. The amplification unit module includes an amplification unit body, an amplification unit board seated inside the amplification unit body, a front end portion of an edge of the amplification unit board being connected to the RF filter for signal transmission and a rear end portion of the edge thereof being connected to the main board for signal transmission, an amplification unit cover provided in such a manner as to cover the amplification unit board, and a vapor chamber positioned between the amplification unit body and the amplification unit board or between the amplification unit cover and the amplification unit board and serving as a medium for transferring heat generated from analog amplification elements mounted on the amplification unit board.

A micro-acoustic RF filter comprises first and second ports (101, 102). First and a second signal paths (120, 110) are coupled between the first and second ports and include a corresponding resonator (111, 121). The resonator of at least one of the signal paths is a micro-acoustic resonator. One of the signal paths includes also a phase shifter (232) serially connected with the resonator (111). The micro-acoustic RF filter achieves a broad passband determined by the resonance frequencies of the micro-acoustic resonators. The filter allows flexible adaption of the passband and stopband performance.

Embodiments relate to a coaxial double motor for tuning an RF filter whose one motor is equipped with two coaxial shafts for controlling a tuning screwdriver for tightening a tuning screw of an RF filter and a nut driver for tightening a nut thereof and that is implemented to make one motor independently rotate one shaft for controlling a tuning screwdriver of an RF filter and the other shaft for controlling a nut driver thereof; and an RF filter tuning apparatus using the same and a method thereof.

A radio frequency multiplexer (210, 220, 230) comprises send and receive circuits each including a RF filter circuit (211, 212, 221, 227, 231, . . . , 234). The send and receive circuits are coupled to an antenna port (225, 245) and corresponding send and receive ports (221, 222). A portion of the send circuit and a portion of the receive circuit are disposed on a single die (213, 226, 250). The layer stacks of the resonators of the send and receive circuits disposed on the single die can be optimized for the required functionality.

The present invention relates to an antenna RF filter assembly, and more particularly, the present invention comprises a main board on which a plurality of electric components are mounted; a plurality of RF filters provided on one surface of the main board; and a filter support member disposed between the main board and the plurality of RF filters, formed of a metal material, and spaced apart from the plurality of RF filters in the direction of the one surface of the main board, thereby providing the advantages of preventing cracks in the solder paste due to the difference in the thermal expansion coefficients of the main board and the RF filters, and achieving a more precise arrangement of the RF filters, and improving the reliability of the product.

Implementation of RF filters The present description relates to a device comprising first (12) and second (14) filters, the first filter (12) comprising a first region (20) made of a first piezoelectric material, the second filter (14) comprising a second region (22) made of a second piezoelectric material, the first and second materials being different and the first (20) and second (22) regions being on the same substrate. Figure for abstract: Fig. 1

In one aspect, a method comprises: comparing, in a comparator, a signal level of a receive radio frequency (RF) signal to a first threshold, the receive RF signal obtained from a controllable location in an RF front end circuit; and in response to the signal level of the receive RF signal exceeding the first threshold, causing the RF front end circuit to be reconfigured from a first mode in which an input to a low noise amplifier (LNA) is coupled an antenna to a second mode in which the input to the LNA is coupled to an RF filter.

Provided is a technique for appropriately performing plasma processing using a pulsed DC signal. The plasma processing apparatus includes: a plasma processing chamber; a substrate support portion disposed in the plasma processing chamber, the substrate support portion including a conductive base, an electrostatic chuck disposed on the conductive base, a chuck electrode disposed in the electrostatic chuck, and a bias electrode disposed below the chuck electrode in the electrostatic chuck; an upper electrode disposed above the substrate support part; a radio frequency generation unit electrically connected to the conductive base, the bias electrode, or the upper electrode, and configured to generate a radio frequency signal; a pulse DC generation unit electrically connected to the bias electrode and configured to generate a pulse DC signal; a radio frequency filter connected between the bias electrode and the pulsed DC generation unit; and a ringing suppression circuit that is connected between the bias electrode and the pulsed DC generation unit and suppresses ringing that overlaps the pulsed DC signal.

To provide an RF filter that allows RF power to be provided to a heating element in an RF electrode without ingress.SOLUTION: A radio frequency (RF) filter includes an inductive element having a plurality of coil sections collectively forming a non-split coil of a cable of a twisted magnetic wire. The coil sections have different winding pitches. The cable of the twisted magnetic wire is configured for at least one channel, with two wires per channel. The cable of the twisted magnetic wire is connected at a first end to an electrical component that is to receive power from a power source, and the cable of the twisted magnetic wire is connected at a second end to a power source. A terminating capacitive element is electrically connected between a reference ground potential and each wire of the cable of the twisted magnetic wire at a respective location between the second end of the inductive element and the power source.SELECTED DRAWING: Figure 6

The substrate supporting apparatus according to an embodiment of the present invention comprises: a seating plate in which a heater for heating a substrate is installed and on which the substrate is seated; a first power supply line and a second power supply line which are configured to connect the heater to a heater power supply apparatus for supplying power to the heater; a first RF filter unit and a second RF filter unit which are installed on the first power supply line and the second power supply line, respectively, and configured to allow power supplied from the heater power supply apparatus to pass therethrough, while blocking RF power supplied for plasma generation; and a high-pass circuit positioned between the heater and the first and second RF filter units and installed on a connection line connecting the first power supply line and the second power supply line, the high-pass circuit being configured to block the RF power.

A plasma processing apparatus is provided. The apparatus comprises: a plasma processing chamber; a substrate support arranged inside the plasma processing chamber, the substrate support including a lower electrode, an electrostatic chuck, and an edge ring disposed to surround a substrate mounted on the electrostatic chuck; an upper electrode arranged on an upper side of the substrate support; a source RF power supply configured to supply source RF power to generate plasma from a gas; a bias power supply configured to supply bias power; a DC power supply configured to apply a negative DC voltage; an RF filter electrically connected between the edge ring and the DC power supply, and including at least one variable passive element; and a controller configured to control the DC power supply and the variable passive element, and configured to control a voltage of the bias power within a permissible range.

The invention discloses a multiplexer and a radio frequency front-end module, and relates to the technical field of radio frequency filtering. The multiplexer comprises an antenna port, a plurality of first filters, a first matching circuit and a second filter. Each first filter is connected to a first common node; the first matching circuit is connected in series between the first common node and the antenna port; the second filter is connected to the antenna port; wherein in a preset mode, the at least one first filter and the second filter transmit radio frequency signals at the same time, and the center frequency of the working frequency band of the second filter is higher than that of the working frequency band of the first filter. According to the invention, the number of matching elements can be reduced, and the CA performance of the multiplexer can be improved, so that the performance of the radio frequency front-end module is improved.

Embodiments disclosed herein include package substrates with filter architectures. In an embodiment, a package substrate comprises a core with a first surface and a second surface, and a filter embedded in the core. In an embodiment, the filter comprises a ground plane, where the ground plane is substantially orthogonal to the first surface of the core, and a resonator adjacent to the ground plane.

A microacoustic RF filter includes first and second ports (101, 102). First and second signal paths (120, 110) are coupled between the first and second ports and include corresponding resonators (111, 121). The resonator of at least one of the signal paths is a microacoustic resonator. One of the signal paths further comprises a phase shifter (232) connected in series with the resonator (111). The microacoustic RF filter achieves a wide passband determined by the resonant frequency of the microacoustic resonator. The filter allows for flexible adjustment of passband and stopband performance.

The invention provides a packaging structure of an embedded filter, and the structure comprises a glass-based substrate which is provided with a blind groove; the blind groove is filled with the first conductive layer; the length, width and height of the first conductive layer are smaller than or equal to the length, width and height of the blind groove. Through the design of the blind groove, the first organic protection layer can be completely embedded into the blind groove, the interface fitting structure of the first organic protection layer and the glass substrate is changed, the reliability of the radio frequency filter is effectively improved, and meanwhile the packaging thickness of the whole radio frequency filter can be reduced.

The present invention relates to an RF filter assembly for an antenna. Particularly, the RF filter assembly for an antenna comprises: a main board on which a plurality of electronic components are mounted; a plurality of RF filters which are installed on one surface of the main board; and a filter support member which is disposed between the main board and the plurality of RF filters, is made of a metal material, and separates each of the plurality of RF filters in the direction of the one surface of the main board. Thereby, the present invention provides advantages of preventing the occurrence of cracks in solder cream caused by differences in thermal expansion coefficients between the main board and each RF filter, and also, enabling a more precise RF filter arrangement, and improving product reliability.

The present disclosure relates to an antenna RF module, an RF module assembly including the antenna RF modules, and an antenna apparatus including the RF module assembly. Particularly, the antenna RF module includes an RF module, a radiation element module arranged on a first side of the RF filter, and an amplification unit board arranged on a second side of the RF filter, an analog amplification element being mounted on the amplification unit board. A plurality of antenna RF modules constitute the RF module assembly, and the RF module assembly and an antenna housing constitute the antenna apparatus. Accordingly, a radome that interrupts dissipation of heat to in front of an antenna is unnecessary, and heat generated from heat generating elements of the antenna apparatus is spatially separated. Thus, it is possible that the heat is dissipated in a distributed manner toward the front and rear directions of the antenna apparatus. The effect of greatly improving performance in heat dissipation can be achieved.

An electroacoustic resonator is provided that is compatible with a thin piezoelectric film and provides additional degrees of freedom. The resonator includes an IDT section with two busbars (ES, BB) and electrode fingers (ES, EF). The IDT section is tilted at an angle α by shear and is rotated as a whole by an angle β with respect to the piezoelectric axis (PA).

An RF filter includes a filter housing, a plurality of hybridly coupled resonators configured in a cascade arrangement in the filter housing, a three-dimensional structure for providing inductive coupling in the RF filter. Each of the hybridly coupled resonators includes a conductive support structure extending vertically from a base of the filter housing and a folded resonator head supported on and electrically connected to the conductive support structure. The three-dimensional structure includes at least one conductive ridge extending vertically from the base of the filter housing between and electrically connected to the conductive support structures of adjacent resonators among the hybridly coupled resonators. The folded resonator head of each of the hybridly coupled resonators is configured to provide capacitive coupling in the RF filter.

Methods and apparatus for processing a substrate are herein described. For example, a processing system for processing a substrate comprises a chamber body defining a processing volume, a radio frequency (RF) power source configured to generate RF energy, an impedance matching network configured to optimize delivery of the RF energy to a plasma in the processing volume, and an RF filter connected between the radio frequency (RF) power source and the matching network via an RF cable.

An RF multiplexing switching circuit for an RF front end (e.g., for a mobile communications device transmitting / receiving in the RF region) includes a set of RF inputs and a set of RF outputs outputting to RF filters, the RF inputs and outputs connected by signal paths. The switching circuit includes series switches for creating conducting signal paths for transmitting / receiving RF signals between the RF inputs and outputs, and a set of common shared shunt switches (e.g., for M RF inputs and N RF outputs, M+X shunt switches, where X<N) collectively capable (e.g., in conjunction with the series switches) of pulling to ground potential any RF input and output not on the conducting signal path. The RF switching circuit may be implemented as a band select switch (e.g., where the inputs connect to power amplifiers) or an antenna switch (e.g., where the inputs connect to device antennas).

Electroacoustic resonator, comprehensive an acoustic track with a first busbar and a second busbar, a medium excitation range between the first and second busbars, an electrode structure with a first electrical connection, a second electrical connection and a plurality of electrode fingers, which are electrically connected to either the first or the second electrical connection, a first gap region between the middle excitation area and the first busbar and a second gap region between the middle excitation area and the second busbar, a velocity compensation structure designed and configured to create a homogeneous transverse velocity profile, wherein the velocity compensation structure includes dielectric material in the first and / or second gap region and wherein the dielectric material chosen for the velocity compensation structure has a smaller specific acoustic impedance than the material of the electrode structure.

An RF filter, comprising a chassis (1) that defines a cavity, and a plurality of resonators (2a, 2b) that are disposed in the cavity, wherein at least one resonator (2) comprises a body part (21) that extends in a first plane from a first end to an opposite second end along a first direction, an enlarged portion (22) that is provided at the second end and extends in the first plane along a second direction substantially perpendicular to the first direction so as to have a larger width in the second direction than the body part (21), and a folded portion (23) that is formed by bending along a lateral edge of the enlarged portion (22) at an angle of about 90° so as to extend in a second plane substantially perpendicular to the the second direction. The folded portion (23) plays a role in forming a coupling of the resonator with an adjacent resonator. The body part (21), the enlarged portion (22) and the folded portion (23) are made of a metal strip line, or a strip-line made of non-metal base with a metallized surface. The folded positions of two adjacent resonators can achieve desired coupling polarity.

The present invention relates to a radio frequency (RF) module for an antenna and an antenna device comprising the same, and more particularly, to a radio frequency (RF) module for an antenna and an antenna device comprising the same, comprising: a plurality of RF filter units comprising a filter body formed to be elongated in the vertical direction; a plurality of radiating element sections which are formed so as to be longer than the plurality of RF filter sections, and which are detachably fixed so as to be electrically connected to the respective front ends of the plurality of RF filter sections; the present invention provides an antenna device having a plurality of radiating element portions, and an ISOI wall coupled to each of both end portions in the width direction of the plurality of radiating element portions and arranged in a divided manner so as to minimize ISOI between adjacent radiating element portions, thereby providing the advantages of facilitating installation and replacement and improving the overall communication efficiency of the antenna device.

Provided are a phased array system, method, device and communication system, the phased array system comprising: a radio frequency chain for generating a radio frequency signal; the one or more radio frequency filters are connected with the radio frequency chain and are used for decomposing the radio frequency signal into a plurality of sub-band signals; the antenna channel comprises a plurality of sub-channels, the plurality of sub-channels are connected with the radio frequency filter respectively, and the plurality of sub-channels are used for modulating the plurality of sub-band signals entering the plurality of sub-channels respectively to generate a plurality of modulated sub-signals; the antenna channel also comprises a combiner which is arranged at the output ends of the plurality of sub-channels and is used for combining the plurality of modulation sub-signals generated by the plurality of sub-channels. And the antenna array is arranged at the output end of the combiner and is used for transmitting the combined signal. According to the invention, the influence of beam offset or splitting caused by the broadband effect is reduced, the transmitting beam and the working bandwidth are decoupled, and the flexibility of beam and bandwidth combination is improved.