43 results about "Polymer waveguide" patented technology

A fabrication process uses casting to form portions of a waveguide having ultra-flat surfaces. A casting resin is coated between a prism mold and a top flat mold via inkjet, slot die, spray coating, etc. The top flat mold is lowered to conform with the casting resin and the casting resin is then cured to form a bottom prism array. After curing, the bottom prism array is demolded from the prism mold and the top flat mold is used as a carrier wafer to support the bottom prism array. The bottom prism array is selectively coated with a reflective coating and a second casting process is performed by coating the bottom prism array with casting resin to form a reflective waveguide.

The polymer waveguide assembly comprises a waveguide plate and two coupling structures located at the two ends of the waveguide plate, the two ends of a waveguide channel on the waveguide plate extend out to form cantilevers, the waveguide plate is connected with the coupling structures through the cantilevers, coupling grooves are formed in the coupling structures, and the two sides of the cantilevers are limited by the two side wall bodies of the coupling grooves; v-shaped grooves distributed in an array are formed in the bottom of the front end of the coupling groove, and adapter optical fibers are positioned and assembled in the V-shaped grooves; a positioning plane for bearing the cantilever is arranged at the bottom of the rear end of the coupling groove, the front end face of the cantilever located on the positioning plane is connected with the tail end face of the switching optical fiber, and the center line of a core layer of the cantilever coincides with the center line of the switching optical fiber in the corresponding V-shaped groove. According to the polymer waveguide assembly, standardization of the coupling end face is achieved through coupling of the waveguide plate and the switching optical fiber in the coupling structure, and then rapid end face butt joint with an adaptive optical fiber connector is achieved.

Various embodiments of a multifunctional ferromagnetic fiber robot (MFFR) are described. According to one embodiment, the MFFR includes a central core and a ferromagnetic layer around the central core. The central core can include a waveguide, an electrode, and a hollow channel in one example. The ferromagnetic layer can include magnetic microparticles distributed in a thermoplastic elastomer. The waveguide can include silica or polymer waveguides. The electrode can include high-melting-point or low-melting-point metal electrodes. The MFFR includes or exhibits magnetic actuation properties that are activated in response to an external magnetic field. The magnetic actuation properties are adjustable based on a cross-sectional geometry of the central core and a particle loading concentration of the magnetic microparticles.

This invention relates to a method for fabricating a low insertion loss spatial multiplexer / demultiplexer for multi-core optical fibers, belonging to the field of multi-core optical fiber communication technology. By using single-core fibers of different core diameters at the splice points, this invention effectively improves the fault tolerance of the multiplexer's core arrangement while reducing optical signal leakage at the splice points, thereby reducing insertion loss. This allows for the multiplexing of signals from single-core fibers into multi-core fibers at the input end and the demultiplexing of signals from multi-core fibers into single-core fibers at the output end. The spatial multiplexing / demultiplexer device prepared using this method exhibits lower insertion loss compared to the traditional bundled method, and is simpler and less expensive to operate than polymer waveguide and fused taper methods. The prepared spatial multiplexer / demultiplexer is small, flexible, durable, and suitable for mass production.

A graded-index polymer waveguide (30) and a manufacturing method thereof are provided. The method includes providing a waveguide substrate (1); manufacturing a waveguide lower cladding layer (2) on a surface of the waveguide substrate (1); coating a material of a waveguide core layer (3) having UV photosensitivity on a surface of the waveguide lower cladding layer (2) away from the waveguide substrate (1); performing a hot imprinting process for the material of the waveguide core layer by means of a flexible transfer film mold and forming a waveguide core layer (3) having an imprinted waveguide link structure; performing a heat treatment process for the waveguide core layer (3); performing a pre-exposure process for the waveguide core layer; coating a waveguide upper cladding layer on a surface of a waveguide core layer (3); and curing the waveguide core layer (3) and the waveguide upper cladding layer (4).

The invention discloses a pluggable optical fiber end face packaging device for a polymer waveguide integrated optical genetic probe and a preparation method of the pluggable optical fiber end face packaging device. The pluggable optical fiber end face packaging device comprises a packaging tray, a probe placement flat plate, an optical fiber sleeve, an optical fiber insertion tube, an optical fiber insertion needle and the polymer waveguide probe. The packaging tray is provided with a through optical fiber pin guide groove, one end of the probe placing flat plate is fixed in the optical fiber pin guide groove, and the other end extends out of the packaging tray; the polymer waveguide probe is fixedly connected to the probe placement flat plate, the optical fiber pin is located in the optical fiber pin guide groove, one end of the optical fiber pin is coupled and aligned with the polymer waveguide probe, and the other end of the optical fiber pin is embedded into the center of the optical fiber cannula; the other end of the optical fiber insertion tube extends out of the optical fiber insertion pin guide groove and is detachably connected with the optical fiber sleeve; and the optical fiber pin and the optical fiber intubation tube are fixedly supported in the optical fiber pin guide groove through cured UV glue and are encapsulated by black thermocuring glue. According to the invention, the coupling efficiency is high, the mechanical stability is strong, and the probability of probe breakage and package damage can be effectively reduced.

This invention relates to the field of polymer waveguide fabrication technology, specifically disclosing a method for processing a 45° micromirror on the end face of a polymer waveguide, comprising the following steps: Step S1: Determining the forming quality characterization of the 45° micromirror on the end face of the polymer waveguide; Step S2: Determining the initial range of influencing factors affecting the quality of the 45° micromirror on the end face of the polymer waveguide fabricated by femtosecond laser; Step S3: Determining the laser incident mode, using a waveguide substrate tilted at 45° to the horizontal plane, with the laser incident perpendicular to the horizontal plane; Step S4: Optimizing the influencing factors to obtain the optimal parameter combination; Step S5: Conducting experiments with the optimal parameter combination, detecting and analyzing the experimental results. The femtosecond laser fabrication of the 45° micromirror on the end face of the waveguide of this invention results in small surface roughness and angle deviation, leading to higher integration, greater transmission efficiency, and lower coupling loss in the link formed by coupling the polymer waveguide and optical transceiver devices.

The invention relates to a semiconductor-pumped quantum dot green laser and a manufacturing method thereof, and belongs to the technical field of lasers, blue light is coupled to the surface of a waveguide through a grating structure to be output, the blue light is irradiated into a polymer waveguide containing a green quantum dot material, and a polymer waveguide resonant cavity is formed in a photoetching mode; and finally, the two ends of the polymer waveguide are coated to form a green laser, and laser output with the wavelength of 520-540 nm is achieved. The technology depends on a conventional semiconductor laser device process, spin coating and photoetching steps containing green light quantum dot polymers are only added on P-face metal, mass production can be achieved, meanwhile, the laser device cost can be effectively reduced, and green light laser output can be achieved without subsequent optical crystals and frequency doubling crystals.

The invention relates to the technical field of polymer waveguide preparation, and particularly discloses a processing method of a polymer waveguide end face 45-degree micromirror, which specifically comprises the following steps: S1, determining the forming quality representation of the polymer waveguide end face 45-degree micromirror; s2, determining an initial range of influence factors influencing the quality of the polymer waveguide end face 45-degree micromirror manufactured by the femtosecond laser; s3, a laser incidence mode is determined, the waveguide substrate is arranged to be inclined by 45 degrees relative to the horizontal plane, and laser is incident in the mode of being perpendicular to the horizontal plane; s4, carrying out influence factor optimization to obtain an optimal parameter combination; and S5, carrying out a test by using the optimal parameter combination, and detecting and analyzing a test result. The surface roughness and the angular deviation of the waveguide end face 45-degree micromirror manufactured by femtosecond laser are small, so that a link formed by coupling and connecting the polymer waveguide and an optical transceiver is higher in integration level, higher in transmission efficiency and smaller in coupling loss.

The invention discloses a preparation method of a double-diaphragm optical microphone, which adopts a single-mode optical fiber to irradiate polymer glue through ultraviolet light to form a polymer waveguide film, and overcomes the problems of complex process, high cost and difficulty in batch production of 3D printing and two-photon polymerization in the prior art. Meanwhile, a process of firstly preparing the polymer waveguide film and then combining the polymer waveguide film with the silicon diaphragm is adopted, so that environmental dust pollution in the preparation process is effectively avoided, and the effectiveness of the preparation process and the yield of products are improved. Meanwhile, the invention further provides the double-diaphragm optical microphone which is prepared by adopting the preparation method, the production efficiency and the product quality of the double-diaphragm microphone can be effectively improved, and the double-diaphragm optical microphone is suitable for large-scale batch production and is beneficial to reducing the production cost of the double-diaphragm microphone.

The invention provides an on-chip integrated interconnection structure which comprises a calculation module integrated on the same substrate, a plurality of photoelectric co-packaging modules and coarse wavelength division multiplexers, the photoelectric co-packaging modules and the coarse wavelength division multiplexers are stacked around the calculation module, and the calculation module and the photoelectric co-packaging modules are electrically interconnected through a rewiring layer. And the photoelectric co-packaging module and the coarse wavelength division multiplexer realize optical interconnection through a polymer waveguide. According to the on-chip integrated interconnection structure provided by the invention, the photoelectric co-packaging module, the coarse wavelength division multiplexer and the calculation module are interconnected and packaged and integrated together, so that an optical in-out integrated optical communication module is realized; moreover, the photoelectric co-packaging module and the coarse wavelength division multiplexer are connected through the polymer waveguide, the problem that the packaging density is limited due to the size limitation of existing optical fiber interconnection is solved through the small size of the polymer waveguide, and the packaging density is effectively improved.

A multi-port input, multi-port output polymer waveguide optical power divider based on an MMI structure and a preparation method thereof belong to the technical field of planar optical waveguide devices and their preparation. From bottom to top, it is composed of a silicon wafer substrate, a polymer lower cladding, a polymer optical waveguide core layer, and a polymer upper cladding. The polymer optical waveguide core layer and the polymer upper cladding are located together on the polymer lower cladding. The polymer optical waveguide core layer is completely covered in the polymer upper cladding. The refractive index of the polymer optical waveguide core layer material is higher than that of the polymer upper and lower claddings. The entire polymer optical waveguide core layer is based on an MMI optical waveguide structure. The waveguide-type power divider of the present invention combines the characteristics of the MMI optical waveguide structure with large process tolerance and small size, and utilizes the advantages of a wide variety of organic polymer materials to achieve the purpose of distributing the same power to multiple different port inputs. It can be mass-produced and is a power divider that can be applied in practice.

The application discloses a mode-insensitive optical switch based on an organic polymer waveguide and belongs to the technical field of mode-insensitive optical switches.The mode-insensitive optical switch is composed of a substrate, a polymer waveguide lower cladding layer, a rectangular polymer optical waveguide core layer, a polymer waveguide upper cladding layer, a first graphene capacitor and a second graphene capacitor.The polymer waveguide lower cladding layer is prepared on the substrate, the polymer waveguide upper cladding layer is prepared on the polymer waveguide lower cladding layer, and the rectangular polymer optical waveguide core layer is covered in the polymer waveguide lower cladding layer and the polymer waveguide upper cladding layer.The optical switch adopts a polymer material to design a waveguide structure, graphene is used as a modulation electrode and is buried in the waveguide, through designing a graphene capacitor electrode structure and optimizing a buried position, simultaneous modulation and switching of TE 11 , TE 21 , TE 12 and TE 22 modes can be realized, and the preparation process is compatible with a traditional CMOS process and is easy to integrate.

The invention relates to the technical field of semiconductor technologies, and discloses a hybrid integrated optical gyroscope chip, a preparation method and an optical gyroscope, the hybrid integrated optical gyroscope chip comprises a multifunctional optical module, a light emitting module, a circuit module, a detector module and an optical fiber which are arranged in a multi-layer stacking manner along a first direction; wherein the light emitting module is provided with a first coupling port, the detector module is provided with a second coupling port, and the multifunctional optical module is provided with a third coupling port and a fourth coupling port. At least one of the following conditions is satisfied: the first coupling port and the third coupling port are connected through a first three-dimensional polymer waveguide; the second coupling port and the third coupling port are connected through a second three-dimensional polymer waveguide; and the fourth coupling port is connected with the optical fiber through a third three-dimensional polymer waveguide. The hybrid integrated optical gyroscope chip is small in size and has excellent thermal mechanical stability and measurement accuracy.

This invention relates to a highly symmetric, wide-bandwidth flexible arrayed waveguide grating chip for FBG demodulation systems, belonging to the field of planar optical waveguide device technology. It comprises a polymer flexible substrate, a polymer lower cladding, a polymer waveguide core, and a polymer upper cladding. The refractive indices of the polymer upper and lower cladding materials are lower than those of the polymer waveguide core material. The polymer waveguide core is an optical waveguide structure integrated from two AWG and two MMI units. This invention solves the defects of existing arrayed waveguide gratings in FBG demodulation systems, such as demodulation blind zones and unidirectional transmission. It achieves demodulation with a wide dynamic range and high resolution for reflected wavelengths and supports bidirectional signal input and output at both ports, improving system flexibility. Furthermore, the use of polymer materials to fabricate optical waveguide devices offers significant advantages over inorganic material systems, including better flexibility, simpler processing, lower cost, and higher efficiency, making it suitable for dynamic deformation environments or bio-integrated scenarios.

In some embodiments, a head-mounted augmented reality display system comprises one or more hybrid waveguides configured to display images by directing modulated light containing image information into the eyes of a viewer. Each hybrid waveguide is formed of two or more layers of different materials. The thicker of the layers is a highly optically transparent “core” layer, and the thinner layer comprises a pattern of protrusions and indentations to form, e.g., a diffractive optical element. The pattern may be formed by imprinting. The hybrid waveguide may include additional layers, e.g., forming a plurality of alternating core layers and thinner patterned layers. Multiple waveguides may be stacked to form an integrated eyepiece, with each waveguide configured to receive and output light of a different component color.

A multi-channel optical power divider based on an MMI structure and its fabrication method are disclosed, belonging to the field of planar optical waveguide devices and their fabrication technology. From bottom to top, it consists of a silicon substrate, a polymer lower cladding, a strip-shaped polymer waveguide core layer, and a polymer upper cladding. The strip-shaped polymer waveguide core layer is based on an MMI structure and is encased within the polymer upper cladding. This waveguide-type power divider combines the advantages of large process tolerance and small size of MMI optical waveguide structures with the advantage of a wide variety of organic polymer materials, achieving the goal of equal power distribution across multiple different input ports. Furthermore, the fabrication process using polymer materials is relatively simple, requiring only conventional processes such as spin coating and photolithography, without the need for more complex processes. Moreover, it boasts low production costs, high efficiency, and the ability to be mass-produced, making it a practically applicable power divider.

To separate a process of forming a layer having electrical wiring and a process of forming a layer having optical wiring.SOLUTION: An optoelectronic integrated circuit 10 includes: a photonic integrated circuit 200 (PIC200); an interposer 300 having an electrical redistribution layer 310 (ERDL310) electrically connected to the PIC200; and a polymer waveguide layer 500 having an optical redistribution layer 510 (ORDL510) optically coupled to the PIC200. The interposer 300 and the polymer waveguide layer 500 are separate bodies.SELECTED DRAWING: Figure 3

A method of forming an optical interconnect between first and second photonic chips located on an optical printed circuit board (OPCB) includes applying a coupling agent to a bonding surface of a flexible, freestanding polymer waveguide array film having at least one polymer waveguide disposed therein. The waveguide array film is placed onto the first and second photonic chips so that the waveguide array film extends over a gap and / or a step between the first and second photonic chips to thereby form a bonding interface between the bonding surface of the waveguide array film and the first and second photonic chips. The coupling agent is selected such that optical coupling between the first and second photonic chips arises simultaneously with formation of the bonding interface.

The invention discloses an intracranial peripheral heart multifunctional pacing guide wire based on optical fiber sensing, and relates to the field of medical instruments, and the pacing guide wire comprises a near-end interface section, a middle sensing section and a far-end sensing section which are sequentially connected from the near end to the far end; the middle sensing section comprises a layered coaxial structure, and the layered coaxial structure comprises a core layer, a sensing waveguide layer wrapping the core layer, a conductive layer wrapping the sensing waveguide layer and a lubricating layer wrapping the conductive layer from inside to outside; a polymer waveguide extending in the axial direction of the guide wire is arranged in the sensing waveguide layer, and the track of the polymer waveguide is a three-dimensional spiral line. The three-dimensional spiral polymer waveguide is integrated in the sensing waveguide layer, the intuition and reliability of navigation can be remarkably improved, information guarantee is provided for the pacing electrode to accurately reach and stably abut against the heart target spot, and therefore the success rate and safety of an operation are improved.

The present application relates to an optical chip integration module and a manufacturing method thereof. The method includes: forming an interposer structure including a plurality of grooves; respectively disposing at least two optical chips in corresponding grooves; forming a polymer waveguide; and stacking the polymer waveguide on the interposer structure so that one optical chip is connected to another optical chip through the polymer waveguide. The method is easy to execute, has high manufacturing precision, and has a large process tolerance.

A wideband photonic bump (WBB) comprising: a positive taper of a polymer waveguide, a curved mirror formed on a surface of the WBB, and a tilted flat mirror; the positive taper of the polymer waveguide is configured to further expand a light beam from an anti-taper to match a fiber mode of an optical fiber; the curved mirror is configured to reflect the light beam from the optical fiber; the tilted flat mirror is configured to direct the reflected light beam to an external optical fiber, wherein the WBB is coupled on a surface of a photonic integrated circuit (PIC).

Disclosed are apparatus and methods for a silicon photonic (SiPh) structure comprising the integration of an electrical integrated circuit (EIC); a photonic integrated circuit (PIC) disposed on top of the EIC; two or more polymer waveguides (PWGs) disposed on top of the PIC and formed by layers of cladding polymer and core polymer; and an integration fan-out redistribution (InFO RDL) layer disposed on top of the two or more PWGs. The operation of PWGs is based on the refractive indexes of the cladding and core polymers. Inter-layer optical signals coupling is provided by edge-coupling, reflective prisms and grating coupling. A wafer-level system implements a SiPh structure die and provides inter-die signal optical interconnections among the PWGs.

The invention discloses a multi-port input and multi-port output polymer waveguide optical power divider based on an MMI structure and a preparation method thereof, and belongs to the technical field of planar optical waveguide devices and preparation thereof. The optical fiber is composed of a silicon wafer substrate, a polymer lower cladding layer, a polymer optical waveguide core layer and a polymer upper cladding layer from bottom to top, the polymer optical waveguide core layer and the polymer upper cladding layer are jointly located on the polymer lower cladding layer, and the polymer optical waveguide core layer is completely wrapped in the polymer upper cladding layer. The refractive index of the material of the polymer optical waveguide core layer is higher than that of the polymer upper and lower cladding layers; the whole polymer optical waveguide core layer is based on an MMI optical waveguide structure. According to the waveguide type power divider, the characteristics of large process tolerance and small size of an MMI optical waveguide structure are combined, the advantage of various types of organic polymer materials is utilized, the purpose of carrying out same power distribution on input of multiple different ports is achieved, large-scale batch production can be achieved, and the waveguide type power divider can be applied to practice.

The invention discloses a double-arm adjustable 2 * 2 thermo-optical switch with a phase shifter, and belongs to the technical field of optical communication. The invention discloses an MZI-type MZI-type polymer waveguide core layer which is composed of a silicon substrate, a silicon dioxide lower cladding layer, a polymer waveguide core layer and a polymer upper cladding layer, and the polymer waveguide core layer is of an MZI-type structure. The invention relates to an S-shaped waveguide dual-mode interferometer which is composed of two input waveguides, an input 2 * 2 multi-mode interference coupler, two input S-shaped bent waveguides, a phase shifter, a straight waveguide, a first modulation arm waveguide, a second modulation arm waveguide, two output S-shaped bent waveguides, an output 2 * 2 multi-mode interference coupler and two output waveguides. And two metal electrodes which are parallel to each other are arranged on the polymer upper cladding at the positions of the two modulation arm waveguides. The phase shifter introduces pi / 2 phase shift for the first modulation arm waveguide in advance, and the state change of the switch can be realized only by introducing the pi / 2 phase shift for each modulation arm waveguide, so that the double-arm adjustable 2 * 2 thermo-optical switch function is realized, and the effect of reducing the power consumption required by single modulation is achieved.

The invention relates to an optical chip integrated module and a manufacturing method thereof. The method includes forming an interposer structure including a plurality of trenches; respectively arranging at least two optical chips in the corresponding grooves; forming a polymer waveguide; and superposing the polymer waveguide on the intermediary structure, so that one optical chip is communicated with the other optical chip through the polymer waveguide. The method is easy to implement, high in manufacturing precision and large in process tolerance.

The invention provides a linear polymer waveguide processing device, and relates to the technical field of polymer waveguide processing, the linear polymer waveguide processing device comprises a processing device main body, the lower end of the processing device main body is fixedly connected with a base, the upper end of the base is fixedly connected with a processing mold, the interior of the base is of a hollow structure, and a demolding mechanism is arranged in the base; comprising a U-shaped plate and two demolding push plates, a worker starts a motor, the motor drives a corresponding third connecting column to rotate, the two third connecting columns rotate synchronously due to the fact that the two third connecting columns are each provided with two chain wheels, the two chain wheels are both meshed with a synchronous chain, and when rotating to the highest position, the rotating push plates push the U-shaped plate to ascend; the U-shaped plate can drive the two demolding push plates to ascend, the linear polymer waveguide in the machining mold can be pushed out when the demolding push plates ascend, the problem that demolding is difficult due to the fact that the side face of the waveguide is tightly attached to the cavity wall of the mold is solved, and the yield of the linear polymer waveguide is not affected.

The invention discloses a polymer waveguide amplifier capable of realizing L-band light amplification and improving C-band light amplification gain and a preparation method thereof, and belongs to the technical field of erbium-doped polymer optical waveguide amplifiers. Erbium is taken as one of matrixes, and meanwhile, the erbium and other elements are taken as matrixes together to prepare an alloy compound; the erbium element serving as the matrix is equivalent to increase the concentration of erbium in the compound, and the erbium element and other elements jointly serve as the matrix to form the alloy, so that the concentration quenching effect of erbium can be reduced; alloy compound particles are compounded in a polymer to prepare a gain medium of the polymer waveguide amplifier; preparing a polymer-based optical waveguide amplifier by taking the gain medium of the composite alloy compound particles as a core layer; according to the optical waveguide amplifier prepared through the method, the erbium ion concentration in the gain medium can be larger than or equal to 1018 cm <-3 >, high gain can be obtained in the L wave band and reaches 12 dB, light amplification of the polymer optical waveguide amplifier in the L wave band is achieved, and meanwhile the relative gain of the polymer optical waveguide amplifier in the C wave band can be improved.

The application discloses a polymer-based stress sensing photonic device, which adopts an optical sensing mode to monitor stress and comprises a polymer-based upper cladding layer, a lower cladding layer and a polymer waveguide Bragg grating core layer arranged in the upper and lower cladding layers; through selection of materials and film thickness, stress-induced effective refractive index change is far less than stress-induced grating period length change, so that stress-induced effective refractive index change is ignored, and central wavelength change is linearly related to grating period length change; results show that the stress sensing photonic device can detect stress in a range of 0-20kPa, has a sensitivity of not less than 2nm / kPa and an accuracy of 1kPa. Compared with the prior art, the polymer-based stress sensing photonic device has the advantages of anti-electromagnetic interference, high sensitivity, good output linearity and easy integration.

In some embodiments, a head-mounted augmented reality display system comprises one or more hybrid waveguides configured to display images by directing modulated light containing image information into the eyes of a viewer. Each hybrid waveguide is formed of two or more layers of different materials. A first (e.g., thicker) layer is a highly optically transparent core layer, and a second (e.g., thinner) auxiliary layer includes a pattern of protrusions and indentations, e.g., to form a diffractive optical element. The pattern may be formed by imprinting. The hybrid waveguide may include additional layers, e.g., forming a plurality of alternating core layers and thinner patterned layers. Multiple waveguides may be stacked to form an integrated eyepiece, with each waveguide configured to receive and output light of a different component color.