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2199results about How to "Short manufacturing time" patented technology

Polyceramic e-chuck

The present invention discloses an electrostatic chuck for clamping work substrates, said chuck comprising three layers, where the dielectric constant of included non-conductive layers is selected to provide overall lower capacitance to the chuck. In the chuck assembly of the present invention, the top dielectric layer that is in contact with a substrate, such as, for example, a wafer, has a dielectric constant that is preferably greater than about 5, with a resistivity that is preferably greater than about 1E6 ohm.m, whereas the bottom dielectric layer has a dielectric constant that is preferably less than about 5 and a resistivity that is preferably greater than about 1E10 ohm.m. The intermediate layer preferably has a conductive layer where the resistivity is less than about 1 ohm.m. The electrostatic chuck may be bonded to heat sinks coated with anti-arc dielectrics. The heat sink can also be used as an RF electrode. The heat sink may have provisions for coolants and gas channels to feed a cooling gas to the backside of a wafer. The heat sink may have feed thrus to power the segmented electrodes in the electrostatic chuck. The passages for the feed thrus, gas feed holes and lift pins may be lined with ceramics or polymers to prevent any discharge to the heat sink. The electrostatic chuck is for clamping work substrates like Si, GaAs, SiO2, etc. used in semiconductor tools.
Owner:FM INDS

Method for improving flavor and texture of plant enzyme food by utilizing fermentation of compound strains

The invention discloses a method for improving the flavor and the texture of plant enzyme food by utilizing fermentation of compound strains. The method is characterized in that strains with good permeability resistance, aroma strains, plant-source preponderant strains and strains for optimizing the texture of a product are screened by sugaring digestion, fermentation of the compound strains, after-ripening, clarifying and membrane filtration treatment, reasonable and scientific combination is carried out on the strains, the preparation time of the plant enzyme food is effectively shortened by controlling the matching and the used amount of the strains, the prepared plant enzyme food is coordinated in flavor, stable in texture, safe and sanitary, and uniform in color, has strong composite fruit flavor and fermenting mellow flavor, is viscous in organization and mellow in taste, has no stimulation in eating, is coordinated in sweetness and sourness, smooth in swallowing, and sweet and lasting in residual taste. The method disclosed by the invention has the advantages that the process is simple, the fermented product can be stored at normal temperature, and the quality is still stable after 6 months, so that the method is suitable for large-scale production, and has a good market prospect.
Owner:深思来福(深圳)科技有限公司

Preparation method of high temperature resistant silicon dioxide nanometer fiber filtering membrane

The invention provides a preparation method of a high temperature resistant silicon dioxide nanometer fiber filtering membrane. The preparation method is characterized by comprising the specific steps of: adding organosilicone, water, ethanol and inorganic acid at room temperature into a stirring kettle so as to obtain a mixed solution, and adding inorganic salt; stirring the mixed solution so as to obtain a precursor colloidal sol; inputting the precursor colloidal sol in a spinning head of electrostatic spinning equipment, simultaneously wherein the spinning head is connected with a high-voltage power supply so as to carry out electrostatic spinning to obtain the nanometer fibrous membrane; placing the nanometer fibrous membrane into a vacuum drying chamber to dry, then placing into a box resistance furnace to carry out warming for calcination, namely obtaining the high temperature resistant silicon dioxide nanometer fiber filtering membrane. The preparation method provided by the invention has the advantages that the preparation process is simple, the cost is cheap, the fiber diameter of the acquired high temperature resistant silicon dioxide nanometer fiber filtering membrane is small, the fire resisting quality is good, and the high temperature resistant silicon dioxide nanometer fiber filtering membrane has good structural stability; and the filter efficiency of high temperature smoke dust particles the sizes of which are more than 0.24 mum achieves 99.9% at 1500 DEG C, and the high temperature resistant silicon dioxide nanometer fiber filtering membrane has extensive application prospects in the fields such as high-temperature insulation, individual protection, and aerospace.
Owner:DONGHUA UNIV
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