The invention discloses an aluminum
nitride heater designed based on a
slurry synergistic heating structure and a
slurry preparation method of the aluminum
nitride heater, and relates to the technical field of aluminum
nitride heaters, the heater comprises a base body, a
kovar electrode, a heating circuit and a protrusion structure, the heating circuit and the
kovar electrode are brazed through the base body through
soldering paste, and the protrusion structure is arranged on the base body. A protruding structure is arranged on the side wall of the base body, the
kovar electrode penetrates through the protruding structure, and a pin circuit is arranged in the protruding structure. Through the
collaborative design of the low-square-resistance
slurry and the protruding structures, the problem that a traditional aluminum nitride heater loses
efficacy at a high temperature due to the limitation of the
melting point of silver-
copper-
titanium brazing solder is effectively solved, and compared with the limitation that the traditional heater can only stably work within 450 DEG C for a long time, when the electrode temperature of the heater is 450 DEG C, the electrode temperature of the aluminum nitride heater is 450 DEG C; the
heating temperature of the working face can be increased to 550 DEG C, long-term stable work at the temperature of 550 DEG C or above is successfully achieved, the application scene of the heater is greatly expanded, and the use requirement under the high-temperature working condition is met.