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Silicon dioxide and polymer combined and integrated optical waveguide type thermal-optical modulator

A thermo-optic modulator, silicon dioxide technology, applied in instruments, optics, nonlinear optics, etc., can solve the problems of large device size and high power, and achieve the effects of small transmission loss, simple manufacturing process, and reduced coupling loss.

Active Publication Date: 2014-07-23
ZHEJIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the very small thermo-optic coefficient of silica materials, the thermo-optic modulator devices based on silica materials are very large in size and very high in power.

Method used

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  • Silicon dioxide and polymer combined and integrated optical waveguide type thermal-optical modulator
  • Silicon dioxide and polymer combined and integrated optical waveguide type thermal-optical modulator
  • Silicon dioxide and polymer combined and integrated optical waveguide type thermal-optical modulator

Examples

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Embodiment 1

[0033] In this example, the refractive index of the silicon dioxide lower cladding layer 7 is 1.45, and the thickness is about 12 μm; the refractive index of the germanium-doped silicon dioxide core layer 8 is 1.46, and the thickness is 6 μm; the refractive index of the silicon dioxide upper cladding layer 9 is It is 1.45 and the thickness is about 4 μm. For the silicon dioxide input waveguide 1 and the silicon dioxide output waveguide 9, the height of the germanium-doped silicon dioxide core layer is 6 μm. The specific manufacturing process is as follows: a silicon dioxide lower cladding layer with a refractive index of 1.45 and a germanium-doped silicon dioxide core with a refractive index of 1.46 are sequentially deposited on a silicon substrate by plasma enhanced chemical vapor deposition (PECVD). layer. Since the refractive index 3.45 of Si is higher than that of germanium-doped silicon dioxide, the thickness of the lower cladding layer 7 of silicon dioxide must be great...

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Abstract

The invention discloses a silicon dioxide and polymer combined and integrated optical waveguide type thermal-optical modulator. The thermal-optical modulator comprises an input waveguide, an input connecting waveguide, a 1*2 optical power splitter, a first tapered waveguide, a transmission arm, a second tapered waveguide, a 2*1 combiner, an output connecting waveguide and an output waveguide. Input light passes through the input waveguide and is connected with one end of the 1*2 optical power splitter through the input connecting waveguide, the 1*2 optical power splitter generates interference, and two split light beams with the ratio of 1:1 are obtained. One end of the 1*2 optical power splitter is connected with one end of the transmission arm through the first tapered waveguide, the other end of the transmission arm is connected with one end of the 2*1 combiner through the second tapered waveguide, and the other end of the 2*1 combiner is connected with the output waveguide through the output connecting waveguide. The thermal-optical modulator has the advantages of being compact in structure, easy to manufacture and insensitive to wave length; meanwhile, the manufacturing process of polymer optical waveguides is simple, and therefore the process difficulty of the thermal-optical modulator is lowered.

Description

technical field [0001] The invention belongs to the field of optoelectronic devices, in particular to a silicon dioxide and polymer hybrid integrated optical waveguide thermo-optic modulator. Background technique [0002] Optical modulators are indispensable key components in optical communication systems. Optical modulators based on planar optical waveguide structures have attracted extensive attention due to their compact structure, easy integration with other devices, and suitability for mass production. The modulation mechanism of the optical waveguide modulator is mainly based on the electro-optic effect and thermo-optic effect of the optical waveguide. Among them, the thermo-optic modulator has the advantages of simple fabrication, high yield, low cost, and easy integration. [0003] Silica is the earliest widely used optical waveguide material, and its technology is the most mature. This is because silica optical waveguides have a very good matching relationship wit...

Claims

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Application Information

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IPC IPC(8): G02F1/01
Inventor 时尧成彭伟
Owner ZHEJIANG UNIV
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