This invention belongs to the field of
ceramic materials technology and discloses a high-temperature, high-insulation 96
alumina ceramic and its preparation method. The material is made by mixing α-Al₂O₃
powder with a
dopant, wherein the
dopant is composed of TiO₂ and CaO mixed in a
mass ratio of (1-3):(3-1). Its average volume resistivity at
room temperature is higher than 10 Ω·cm. 15 The optimal component insulation resistivity can reach 1.75 × 10⁻⁶ Ω·cm at a high temperature of 500°C. 12 The preparation method involves mixing α-Al₂O₃
powder with dopants TiO₂ and CaO according to their
doping content; mixing the
raw material powder with
anhydrous ethanol and then ball-milling;
drying and sieving the ball-milled
slurry; adding a binder to the obtained powder, sieving it again, granulating it, and pressing it into a
green body; firing the
green body after debinding to obtain the final
ceramic sample. This invention utilizes Ca... 2+ Ti 4+ By
doping and modifying the material, 96
alumina ceramics that meet the properties of coulombic electrostatic chucks were prepared. While reducing the
sintering temperature, the resistivity was maintained, thus better meeting the practical application requirements.