Terahertz metasurface biosensor based on Fano resonance, and preparation method thereof
A biosensor and metasurface technology, applied in the field of terahertz biosensors, can solve problems affecting biosensing applications and achieve simple and convenient measurement, small size, and enhanced sensitivity
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[0023] Such as figure 1 As shown, a Fano resonance-based terahertz metasurface biosensor and its preparation method is characterized in that it includes a substrate 1 made of ultra-thin flexible polyimide film, and periodically attaches several substrates on the surface of the substrate. A unit structure, the unit structure is made of two metal split rings 2 with overlapping openings, the outer diameter R=50 μm of the metal split ring 2 in the unit structure, the inner diameter r=40 μm, the width is 10 μm, and the thickness is 200 nm. The central angles of the metal split ring 2 are respectively θ 1 = 140° and θ 2 =160°, the unit cell period of a single unit structure is P=120 μm, that is, the size of a single unit structure is a square with a side length of 120 μm, the center of the metal split ring 2 coincides with the center point of the unit structure, and the substrate 1 The thickness is 25 μm, and the length and width of the substrate are 1.5 cm×1.5 cm, respectively. ...
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