This invention discloses an ultra-
narrowband optical filter and its design method, belonging to the field of micro-nano optical device technology. It is a reflective all-
dielectric guided-mode
resonant filter, comprising, from bottom to top, a substrate, a planar
waveguide layer, a single-layer one-dimensional subwavelength
grating layer, and a single-layer anti-reflection film. The design method includes initial tuning of the resonant
wavelength, optimization of the ultra-
narrowband bandwidth, fine-tuning of the resonant
wavelength, and synergistic optimization of
sideband suppression. It clarifies the priority of adjusting each structural parameter, achieving
narrowband reflection filtering through the guided-mode
resonance effect of the
grating and
waveguide layer. Through the synergistic design of the single-layer anti-reflection film and the resonant structure, non-resonant
broadband background reflection is suppressed without disrupting the ultra-narrowband resonant peak. At the target filtering
wavelength of 1064nm, an ultra-narrowband filter with a peak
reflectivity of 100% and a
full width at half maximum (FWHM) as low as 0.03nm can be achieved, with a
sideband suppression ratio exceeding 30dB. This solves the core defect of existing technologies that cannot simultaneously achieve ultra-narrowband filtering and high
sideband suppression ratio.