Double-layer coupling type Fano resonance sensor based on graphene
A Fano resonance and graphene technology, applied in instruments, scientific instruments, measuring devices, etc., can solve the problems of large ohm and radiation loss, low quality factor and sensitivity, performance loss, etc., and achieve high resonance strength, simple and compact structure , Improve the effect of resonance intensity and resonance excitation frequency
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[0021] The following is a specific embodiment of the present invention and in conjunction with the accompanying drawings, further describes the technical solution of the present invention, but the present invention is not limited to this embodiment.
[0022] attached figure 1 It is a schematic diagram of a unit structure of a graphene-based double-layer coupled Fano resonance sensing device. Using silicon with a length and width of px and py and a thickness of h as the base layer, the thickness of the silicon dioxide substrate layer is d2, the thickness of the middle graphene disk is 1 nm, and the radius is R1, and then engraved on the graphene disk A circular engraved hole with an eclipse radius of R2 and an offset of L. The graphene disk structure is shown in the attached figure 2 shown. The thickness of the silicon dioxide isolation layer is d1, and the size and structure of the graphene disk on the top layer are the same as that of the graphene disk on the middle layer....
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