Multilayer symmetrical metamaterial capable of generating Fano resonance enhancing phenomenon and frequency tunable phenomenon
A Fano resonance and metamaterial technology, applied in optics, instruments, electrical components, etc., can solve problems that limit the application of Fano resonance
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[0022] First, a multilayer structure (lower metal layer 3-dielectric layer 4-upper metal layer 3-oxidation layer 5) 2 is formed on a glass substrate 1 by material growth process, as shown in the attached figure 2 (a) shown.
[0023] Second, deposit SiO on the multilayer structure 2 2 film as a mask 6, as attached figure 2 (b) shown.
[0024] Then, the designed resonant cell array is transferred to the mask through the mask process, as shown in the attached figure 2 (c) shown. Among them, the structure design can adopt algorithms such as finite time domain difference method and finite element method.
[0025] Then, through an etching process, a resonant unit array 7 is prepared on the 2 material, and the resonant unit array is arranged in a rectangular lattice (that is, on the surface of the metamaterial, the horizontal period length L of the resonant unit x and vertical cycle length L y ranging) as attached figure 2 (d) shown.
[0026] Finally, the mask 6 is remove...
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