This invention relates to the field of
infrared focal plane array (FLAS)
chip technology, specifically to an
infrared FLAS
chip and its fabrication method. The FLAS
chip includes a readout circuit and a photosensitive substrate. A
pixel array, comprising multiple pixels, is disposed on the photosensitive substrate. Each pixel is flip-chip connected to the readout circuit via interconnect units. At least some interconnect units include bumps and limiting connection components. The limiting connection components include a
dielectric film and a slotted connector. A through-hole is formed in the
dielectric film, and the slotted connector is disposed within the through-hole. The bumps are inserted into the slotted connector and soldered to it. One of the bumps and the limiting connection components is disposed on a corresponding pixel, and the other is disposed on the readout circuit. This invention effectively prevents the bumps from slipping or misaligning during flip-chip
soldering. Furthermore, the limiting connection components do not encroach on the pixel area and are unaffected by pixel
pitch, making it particularly suitable for
infrared FLAS chips with ultra-small pixel pitches. The use of a
dielectric film allows for precise fabrication of the through-hole, avoiding pattern
distortion.