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Optical readout focal plane array and preparation method thereof

A focal plane array, visible light technology, applied in optical radiation measurement, radiation pyrometry, instruments, etc., can solve problems such as undiscovered uncooled detectors, decreased absorption rate, etc., to achieve low cost, uniformity and reliability improvement , the effect of improving sensitivity

Inactive Publication Date: 2015-07-22
PEKING UNIV
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Problems solved by technology

The core absorption peak of silicon nitride is around 10 μm, so detection and imaging can be realized in the long-wave infrared band. However, for shorter or longer wave bands, such as short-wave and medium-wave infrared bands, and terahertz bands, the absorption rate decreases significantly.
Especially in the terahertz frequency band, people have not yet found materials with high absorption rate and suitable for the preparation of uncooled detectors

Method used

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  • Optical readout focal plane array and preparation method thereof
  • Optical readout focal plane array and preparation method thereof
  • Optical readout focal plane array and preparation method thereof

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Embodiment Construction

[0046] In order to make the object, technical solution and advantages of the present invention clearer, the structure and method of the present invention will be described in detail below with reference to the accompanying drawings.

[0047] A focal plane array applied to terahertz and full-band infrared detection imaging, such as figure 1 As shown, it includes a plurality of dual-material micro-cantilever beams (101) and a substrate (103) supporting the plurality of dual-material micro-cantilever beams. The multiple double-material micro-cantilever beams (101) have identical structures and dimensions, and are fixed on the substrate through anchor points (102). Such as figure 2 As shown in the top view of A, the bimaterial micro-cantilever includes an absorber (201), two deformable legs (202), two heat-isolated legs (203), two anchor points (102) and a reflective mirror (301). The plurality of double-material micro-cantilever beams are arranged in a close-packed manner to ...

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Abstract

An uncooled focal plane array (FPA) for imaging at full-band infrared and terahertz regime is provided. The FPA utilizes bimaterial cantilever array as the pixels (101) and are fabricated on a visible light transparent substrate (103). The bimaterail cantilever (101) comprises an absorber (102), two bimaterial legs (202), two thermal isolation legs (203), two anchors (102), and a mirror. The radiation to be detected casts on the front side of bimaterial cantilevers (101), while the transparent substrate (103) is illuminated by visible light to readout the deformation of the bimaterial cantilevers (101) caused by the energy absorption by the absorber (102). The FPA is fabricated by surface sacrificial layer processes, especially by using metamaterial to enhance the function of the absorber and polyimide as the sacrificial layer. The advantages of the uncooled focal plane array include multiband work,high sensitivity and resolution, good reliability and uniformity, low cost and easy fabrication.

Description

technical field [0001] The invention belongs to the technical field of terahertz and full-band infrared detection and imaging, and relates to a design and preparation method of an optical readout focal plane array, in particular to a design and preparation of terahertz and full-band infrared on a transparent substrate using MEMS technology. Focal Plane Array Method. Background technique [0002] Focal Plane Array (FPA-Focal Plane Array) is a device that can convert electromagnetic waves into other readable signals, and is mainly used in the field of detection and imaging technology. Electromagnetic waves in the infrared to terahertz bands are widely used in both military and civilian fields. Since World War II, infrared detectors have developed extremely rapidly because they can effectively improve the combat capability of individual soldiers at night and in dim environments. At present, commercial infrared detection systems have been widely used in the automotive industry...

Claims

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Application Information

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IPC IPC(8): G01J5/00G01J5/20H04N5/33B32B33/00
CPCB81B3/0081B81B2201/0207G01J5/0853G01J5/40
Inventor 于晓梅文永正马蔚王舒阳
Owner PEKING UNIV
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