An uncooled infrared focal plane array detector

Abstract

The invention relates to a non-refrigeration infrared focal plane array seeker. The structure is characterized in that one end part of a bridge leg is connected with a bridge surface, and the other end part of the bridge leg is connected to a base through an anchor post; the base is a read-out integrated circuit substrate, and the surface of the base is provided with a reflection film layer; the bridge surface is hanged deadly above the reflection film layer, and forms a vacuum clearance layer with the base; the bridge leg is arranged at two sides corresponding to the bridge surface, and the respective lower surface of the bridge leg and the bridge surface are distributed on the same plane; the bridge surface is sequentially provided with a support layer, an absorption layer, an insulation layer, a heat sensitive layer and a protection layer from bottom to up; the bridge leg is sequentially provided with a heat resistance layer, an electric conduction layer and a passivation layer from bottom to up; and the anchor post consists of a metal tungsten post and an oxide silicon post, and is sequentially provided with metal tungsten and silicon oxide materials from the inside to outside. The anchor post provided by the invention is a novel anchor post, compared with the traditional anchor post formed by the traditional filling technology, the area occupied by the anchor post is shortened, and the technology difficulty is reduced.

Description

technical field [0001] The invention relates to an uncooled infrared focal plane array detector used in the technical field of infrared imaging systems, and the infrared radiation wavelength range targeted at is 8-14 μm. Background technique [0002] According to Planck's black body radiation law, any object above absolute zero will emit infrared electromagnetic heat radiation to the outside world. The light wave range of this radiation is about 0.8-1000 μm, which cannot be directly seen by human eyes. At room temperature (300K), the central wavelength of the emission spectrum of black body radiation is just around the 10μm band; and the infrared heat radiation emitted by the human body and other objects with similar temperature in the environment, 38% of the energy is concentrated in the wavelength range of 8-14μm, Therefore, this band is more suitable for detection needs in strong sunlight, dark night or bad weather. [0003] Infrared radiation detectors capable of detect...

AI Technical Summary

Problems solved by technology

However, the traditional anchor column formation process is a "top-down" (Top-down) filling process, and the formed anchor column is an inverted tapered structure, which is characterized by a smaller opening at the bottom and an opening at the top. larger, such as Figure 5 As shown, this results in the designed anchor column having a size of 2.5 μm×2.5 μm, but the actual formation of the anchor column occupies an area of ​​more than 5 μm×5 μm; taking the rectangular anchor column as an example, the reported size is usually 5 μm×5 μm to 7μm×7μm, that is to say, the traditional anchor column formation process is difficult to control, resulting in larger area occupied by the anchor column and reduced effective area

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