This invention discloses a narrow-angle polarization detection integrated
chip covering communication frequency bands and its fabrication method, comprising: a top-layer
chip, using
silicon as a substrate, wherein the
silicon has an array of through-holes; an array of through-hole grooves with an insulating layer on the upper surface of the
silicon; a multi-dimensional composite metasurface, disposed within the array of through-hole grooves of the insulating layer and in contact with the silicon; silicon through-hole
metal connecting pillars, uniformly arrayed within the through-holes of the silicon, and connected to each other through the insulating layer; electrodes, evenly distributed above the insulating layer on the upper surface of the silicon with the array of through-hole grooves of the insulating layer as the center, and in contact with the silicon through-hole
metal connecting pillars; and a bottom-layer
chip, containing a
readout integrated circuit module, connected to the top-layer chip via an
indium tin alloy. This invention achieves chip-level ultra-narrow-angle detection, integrates the characteristics of anisotropic trench structures, and expands the detection capability of silicon-based chips across the entire communication
frequency band, making it suitable for
wafer-level production.