254 results about "Single exposure" patented technology

The invention provides a chip bonding wire three-dimensional measurement method and system based on an inner cavity reflection camera system, and relates to the technical field of three-dimensional measurement. The method comprises the following steps: performing one-time exposure imaging on a chip bonding wire to be detected through an inner cavity reflection camera system to obtain at least three mutually independent visual angle images in the same frame; performing brightness normalization compensation and geometric calibration on the visual angle image to obtain a visual angle data set with uniform brightness and correlation; pairing the view angle data sets in pairs, extracting parallax information by using a feature matching algorithm based on optical flow, and fusing multiple pairs of parallax to generate a lead three-dimensional point cloud; performing noise filtering and curved surface reconstruction on the three-dimensional point cloud to obtain a continuous three-dimensional grid model of a lead; and performing texture mapping on the three-dimensional grid model by adopting any visual angle in the visual angle image or the combination of the visual angles, and outputting a lead three-dimensional reconstruction result with textures. According to the invention, high-precision, large-depth-of-field and rapid three-dimensional measurement of the chip bonding wire is realized.

The invention discloses a snapshot type hyperspectral imaging industrial online sorting system which comprises a support assembly, an optical imaging assembly and a motion control assembly. The bracket assembly consists of a bottom plate, and an adjustable bracket and a fixed bracket which are fixed on the bottom plate; the optical imaging assembly comprises a lighting unit, an imaging objective lens and a snapshot type hyperspectral camera, and can synchronously obtain space image information of a measured object and spectral information of a continuous wave band in a single exposure process; the motion control assembly realizes automatic transmission of the measured object through the transmission platform; the data processing module is integrated with an image preprocessing unit, a spectral analysis unit and a spectral database, and is used for end-to-end closed-loop control from original hyperspectral data generation to sorting decision making; the system adopts a metasurface light splitting structure to realize real-time decoding, performs material or category identification by using a pre-trained classification model, and finally automatically generates a sorting decision signal according to an identification result to drive a motion control assembly to complete sorting operation.

An ophthalmic imaging system provides an automatic focus mechanism based on the difference of consecutive scan lines. The system also provides of user selection of a focus point within a fundus image. A neural network automatically identifies the optic nerve head in an FA or ICGA image, which may be used to determine fixation angle. The system also provides additional scan tables for multiple imaging modalities to accommodate photophobia patients and multi-spectrum imaging options.

The invention discloses a phase recovery method based on non-interference coding aperture holography, and belongs to the field of computational optical imaging. According to the technology, phase information of an object is directly extracted from a single hologram through a physically-driven numerical optimization framework in combination with Wiener inverse filtering and an improved G-S (Gerchberg-Saxton) algorithm. A frequency domain inverse filter is constructed based on system modeling of a point diffusion hologram, noise interference is effectively suppressed, meanwhile, a historical gradient acceleration strategy is provided, a convergence path is optimized by dynamically adjusting an iteration step length, and the calculation efficiency is improved. The technology has the core advantages that the limitation of a traditional interference light path is broken through, precise optical alignment or multi-time out-of-focus surface data acquisition is not needed, the system architecture is simplified, the environmental adaptability is enhanced, and quantitative phase distribution reconstruction of transparent and weak scattering samples can be realized through single exposure.

The invention discloses an intermediate infrared polarization spectrum imaging method and device. The method comprises the following steps: carrying out joint coding on an intermediate infrared light beam carrying to-be-measured target space, spectrum and polarization information by adopting an intermediate infrared polarization spectrum modulator consisting of metasurface units which are arranged in an array and have non-correlation response characteristics; projecting the coding light field to a two-dimensional detector array to generate a two-dimensional coding image under single exposure; and decoding the two-dimensional coding image through a reconstruction unit so as to reconstruct and obtain a space-spectrum-polarization four-dimensional data cube of the target to be measured. The problem that polarization information cannot be rapidly obtained in the prior art is solved, target full information can be obtained under single exposure, and the system has the advantages of being high in imaging speed, simple in structure, easy to miniaturize and the like.

The present disclosure provides a method, apparatus, medium and device for calculating the wafer layout of a wafer, belonging to the field of semiconductor technology. The method includes: based on the distribution array of each wafer, taking any wafer as a reference wafer, moving the wafer center in a preset area according to a first step length to determine the first coverage area after each movement, and determining the feasible area of the reference wafer according to the number of complete wafers in the coverage area; moving the wafer center in the feasible area according to a second step length to determine the second coverage area after each movement, and determining the maximum number of complete wafers in the coverage area; placing the reference wafer at different positions in the single-exposure area in turn according to the wafer position distribution pattern of the single-exposure area of the lithography machine to determine the minimum number of exposures for exposing all wafers; determining the positions of each wafer according to the maximum number and the minimum number of exposures to generate a wafer layout. The present disclosure can improve the accuracy and efficiency of calculating the maximum number of wafers.

The invention discloses a pipeline inner wall panoramic three-dimensional scanning device and a measuring method, and the device comprises a panoramic plane laser generator which comprises a point laser generator, an axicon, a laser focusing lens, a conical surface reflector and a transparent cylindrical support, and is used for transmitting a 360-degree panoramic plane laser beam to the inner wall of an object to be measured; according to the invention, single-exposure full-circumferential high-precision three-dimensional measurement is realized, and the device can synchronously obtain complete three-dimensional point cloud data of the circumference of the inner wall of the whole pipeline at the moment of single exposure through innovative combination of a panoramic annular imaging system and a panoramic planar laser projection technology; the method has the advantages that axial rotary scanning or multi-view data splicing required by a traditional method is avoided, measurement efficiency is improved, splicing accumulative errors are avoided, laser stripe image acquisition is complete and free of breakpoints, and completeness and accuracy of three-dimensional reconstruction data are guaranteed from the source.

The invention discloses an image acquisition method and device, equipment, a storage medium and a program product, and relates to the technical field of image acquisition. The method is used for an image acquisition device, and the image acquisition device comprises a light supplement lamp, a master camera, a slave camera and a controller. The method comprises the following steps: the controller sends a first exposure control signal to the main camera; under the condition that the first exposure control signal is received, the main camera performs periodic exposure; under the condition that single exposure is completed, the master camera sends a frame synchronization signal to the slave camera; under the condition that the frame synchronization signal is received, the slave camera performs exposure; the controller controls the light supplementing lamp to perform periodic light supplementing based on the exposure time of the camera, and the light supplementing time period of the light supplementing lamp covers the exposure time period of the camera; and the master camera and the slave camera transmit acquired image data to the controller.

The invention relates to the technical field of photoelectric detection, and particularly discloses a three-dimensional defect detection method and system based on compound color stripe projection, and the method comprises an upper computer control and processing module which is used for generating a compound color stripe pattern coded with phase difference information, and coordinating and controlling the synchronous operation of the whole system; the structured light projection module is used for receiving the composite color stripe pattern and projecting the composite color stripe pattern to the surface of a measured object at one time; the imaging module is used for receiving the composite colored light reflected after being modulated by the surface of the measured object and separating the composite colored light into monochromatic light signals with different colors for synchronous acquisition; the imaging module further comprises an active highlight suppression unit which is used for dynamically adjusting the polarization direction according to an instruction of the upper computer control and processing module so as to suppress highlight caused by specular reflection. Multiple groups of sine fringes with fixed phase differences are projected to the surface of a measured object at one time. And a plurality of deformed fringe patterns with phase displacement can be synchronously acquired under single exposure.

The invention discloses an all-solid-state snapshot full-Stokes parameter measurement and imaging enhancement sensor device. The all-solid-state snapshot full-Stokes parameter measurement and imaging enhancement sensor device comprises a micro-lens array module, a liquid crystal phase modulation module, a polarization wire grating array module and an image sensor module. The micro lens array module is composed of a plurality of micro lenses which are arranged in a two-dimensional mode, and incident light is focused on the photodiode of each pixel. The liquid crystal phase modulation module is composed of two high-speed liquid crystal variable phase delayers, and active phase modulation is carried out on the polarization state of incident light. Polarized light information in four polarization directions can be obtained only through single shooting in the polarization wire grating array module. The image sensor module calculates the full Stokes parametric polarization characteristics of the incident light. According to the invention, full-polarization information measurement of incident light can be realized only through single exposure, and a polarization enhancement mode is switched after measurement is completed, so that the imaging efficiency of the sensor in dark light scenes such as weak contrast target detection is greatly improved.

The invention discloses a high-order non-interference quantitative phase imaging system and method based on single exposure, and belongs to the technical field of optical microscopic imaging. The microscope module comprises a halogen lamp, a condenser, an annular diaphragm, a sample, an objective lens, a phase plate, a lens I, a reflector and a lens II which are sequentially arranged along the light beam propagation direction, and the light splitting modulation module comprises a lens III, a light splitting module I, a light splitting module II, a spatial light modulator, a lens IV and a CMOS camera which are sequentially arranged along the light beam propagation direction. By adopting the single-exposure-based high-order non-interference quantitative phase imaging system, the advantages of stable structure, insensitivity to environmental interference, high phase sensitivity, low spatial noise and the like of a white light illumination system are reserved.

The invention discloses a monocular four-dimensional imaging device and method based on a metasurface. The monocular four-dimensional imaging device comprises an image sensor and an imaging optical system arranged in front of the image sensor. Wherein the imaging optical system comprises a metasurface, the metasurface is designed to simultaneously generate a self-acceleration Airy point spread function with depth-dependent lateral displacement for incident left-hand circularly polarized light and right-hand circularly polarized light, and the self-acceleration Airy point spread function can generate a self-acceleration Airy point spread function with depth-dependent lateral displacement under the condition that a mechanical moving part is not used. Carrying out polarization separation and focusing on the left-hand circularly polarized light and the right-hand circularly polarized light; the image sensor is used for recording a mixed image containing the left-hand circularly polarized light information and the right-hand circularly polarized light information at the same time through single exposure so as to obtain three-dimensional depth and polarization information of the metasurface, namely monocular four-dimensional imaging of the metasurface. The scene perception and understanding capability of a machine is greatly enhanced, and the method has unique advantages in the aspects of target identification, material discrimination, severe environment perception and the like.

The invention discloses a snapshot Mueller matrix polarization imaging device and method based on a photo-oriented liquid crystal chip. The device comprises a light source unit, a polarization modulation unit based on the photo-alignment liquid crystal chip, a sample measurement unit, a polarization demodulation unit based on the photo-alignment liquid crystal chip, a light detector unit and a computer. According to the invention, the light source unit and the polarization modulation unit generate polarized light which is distributed in a specific mode in a space in a polarization state, the polarized light generates signal light after acting similarly, and after the signal light passes through the polarization demodulation unit, the signal light can be subjected to one-time photographing exposure through the light detector to acquire a signal image. And calculating the spatial distribution of all Mueller matrix elements of the to-be-detected sample through a computer. Measurement can be completed only through single exposure of the light detector, and the measurement speed is high; meanwhile, mechanical rotating elements, electric adjustable elements and the like are not needed, and the structure is simple and compact; the device has the advantages of high spatial resolution, high measurement precision and low manufacturing cost.

The invention discloses a differential compression structured light illumination super-resolution imaging device based on time sequence multiplexing. The differential compression structured light illumination super-resolution imaging device is composed of a light source and beam expanding system, a structured light illumination imaging system, a coding aperture time domain compression imaging system, a time sequence control system and a data processing reconstruction system. According to the invention, the two digital micromirror devices are controlled through a time sequence, and wide-field and structured light compression imaging is realized respectively. In the wide-field mode, the two digital micromirror devices are switched to the total transmission mode, and fluorescence signals of the excitation sample are directly collected by the camera; in a structured light mode, the first digital micro-mirror device generates six time-varying stripe coding patterns, and dynamic space coding of the second digital micro-mirror device is combined, so that a camera obtains a compressed image through single exposure. Through differential processing of a wide field and a compressed image, background noise is suppressed, high-frequency information weight is enhanced, the bottleneck of high-frequency signal offset in traditional compressed imaging is broken through, image reconstruction quality is remarkably improved, and high-fidelity imaging of a high-speed dynamic scene is realized.

To provide a solid-state imaging apparatus, a method for driving a solid-state imaging apparatus, and an electronic apparatus, capable of substantially achieving a wide dynamic range and a high frame rate by minimizing the reduction of an SNR at the coupling point of an HCG signal and an LCG signal, without being affected by optical specification and sufficiently exhibiting single exposure high dynamic range (SEHDR) performance.SOLUTION: In a solid-state imaging apparatus 10, pixels 200 arranged in matrix in a pixel part 20 include a photoelectric conversion read-out part 210 and the voltage level of a first low conversion gain signal for reading out with a first low conversion gain LCG1 is equivalent to the voltage level of a second low conversion gain signal for reading out with a second low conversion gain LCG2.SELECTED DRAWING: Figure 7

The invention discloses a surface topography measurement device and method based on polarization phase shift. The device comprises a laser module, a polarization beam splitting and interference module, a polarization beam combining and imaging module, a polarization image acquisition module and a control and reconstruction module. The laser module comprises a monochromatic tunable laser, an optical fiber collimating amplifier and a polarizer; the polarization beam splitting and interference module comprises a polarization beam splitting prism, a first quarter-wave plate, a plane mirror and a second quarter-wave plate; the polarization beam combining and imaging module comprises a polarization splitting prism, a third quarter-wave plate and a telecentric lens; the polarization image acquisition module comprises a micro-polarization array camera and an image processing unit, and the micro-polarization array camera synchronously acquires four polarization interference images through single exposure; and the control and reconstruction module obtains measurement data of the surface topography of the to-be-measured object through a phase unwrapping algorithm and three-dimensional topography reconstruction. According to the invention, high-precision, large-field-of-view, portable and high-efficiency field detection can be realized.

The invention provides a multi-probe lithographic apparatus and a lithographic method, the multi-probe lithographic apparatus comprises a plurality of exposure unit groups capable of independently moving relative to each other, and each exposure unit group comprises one or more exposure units. The photoetching method comprises the following steps: dividing a pattern to be photoetched into a plurality of sub-patterns, wherein each sub-pattern corresponds to a writing field of a single exposure unit; determining an exposure sequence of the plurality of sub-graphs, the exposure sequence indicating an exposure unit for executing exposure of each sub-graph and a moving sequence of each exposure unit, and the graph to be photoetched is simultaneously photoetched by at least the exposure units in the two exposure unit groups, the distance between any two adjacent exposure unit groups in the plurality of exposure unit groups is greater than the size of a writing field of a single exposure unit; initializing the relative position of each exposure unit group in the plurality of exposure unit groups according to the exposure sequence; and performing exposure of the image to be photoetched according to the exposure sequence.

The invention relates to a metal workpiece surface image acquisition method and device based on multiple exposure. The acquisition method comprises the following steps: determining total exposure, and determining single exposure time and corresponding weight according to the total exposure; acquiring a surface image of the metal workpiece at each exposure time, and adjusting the surface image by using the corresponding weight; and combining a plurality of adjusted images to obtain a metal workpiece surface reflection-removed image. According to the method, a strategy of multiple times of irregular exposure is adopted, multiple times of short-time exposure is used for replacing one time of long-time exposure, a strong single light reflection area is avoided, light reflection is reduced, meanwhile, more image details are reserved, and the final image quality is improved.

The invention provides a photogrammetry control method and device based on a laser galvanometer and electronic equipment, and belongs to the technical field of photogrammetry, and the method comprises the steps: controlling the laser galvanometer to deflect according to a preset scanning path in a single exposure period of a camera, so as to form n laser gratings in a single frame image collected by the camera; extracting feature information of each laser grating from the single-frame image, wherein the feature information comprises pixel coordinates in a space coordinate system; and calculating three-dimensional coordinate points of the surface of the object to be measured according to the real-time deflection angles of the laser galvanometer when the laser galvanometer projects the laser gratings, the feature information of the laser gratings and pre-calibrated camera parameters, and summarizing to generate three-dimensional point cloud data. According to the invention, the precision of photogrammetry is improved.

The invention discloses a spectral space coding imaging system and method of a programmable diffractive optical element. The method comprises the following steps: S10, receiving a target scene light signal through a light field model and forming an optical image; s20, performing spatial spectrum joint modulation on the optical image by adopting a programmable diffractive optical element to obtain a coded light field; s30, projecting the coding light field to a detector and obtaining a two-dimensional coding image of primary exposure; and S40, inputting the two-dimensional coding image into a reconstruction module, combining modulation information of the programmable diffractive optical element, and performing decoding reconstruction by using a compressed sensing algorithm to obtain a high-resolution space image and spectral information of the scene. According to the invention, the limitation of the existing system on spatial / spectral resolution is broken through, the system structure is simplified, and the hardware programmability is improved; the imaging capability in a dynamic scene is improved; the signal-to-noise ratio and the penetrating power are improved; and balancing a physical model and a data driving method.

The invention discloses an ultrafast coherent modulation imaging device based on chirped pulse illumination, which can collect evolution information of intensity and phase along with time change in an ultrafast dynamic scene under the condition of single exposure. The device encodes an ultrafast scene by using the spectrum-time mapping characteristic of chirped pulses, realizes phase encoding through random phase modulation, then acquires an encoded diffraction pattern through a snapshot hyperspectral camera, and finally recovers space-time complex amplitude information of the ultrafast dynamic scene through a phase retrieval algorithm. The invention provides an imaging device capable of obtaining dozens of ultrafast time resolution complex amplitude images in single exposure, and the imaging dimension and the time resolution capability are remarkably improved. The device and method provided by the invention provide a new technical path for researching the ultrafast dynamic process, and have certain scientific research application potential and engineering popularization value.

The invention provides an anti-turbulence long-distance pickup method and device and a readable storage medium. In the method, laser generated by a laser is regulated and controlled by a half-wave plate and transmitted light is transmitted and received to realize echo collection; reflected local oscillation light and echoes are processed by a series of optical elements, a digital micromirror device, a wavefront sensor, a deformable mirror and the like and then are subjected to coherent beam splitting in a polarization beam splitter to enter a coherent receiver, a calculation unit processes signals to obtain sound information, and meanwhile, the self-adaptive optical technology is used for resisting turbulence, and the single exposure technology is used for improving the frame rate. The device comprises a laser generation and modulation module, a signal acquisition and conduction module, a signal processing and restoration module, a self-adaptive optical correction module, a frame rate improvement adaptation module and the like. The invention solves the problems of short pickup distance, large turbulence influence and the like in the prior art, realizes long-distance turbulence-resistant pickup, and is suitable for the fields of public safety, criminal investigation and case handling and the like.

According to the mid-infrared multispectral integrated imaging device system and method based on the metasurface, superatom phase distribution is designed through dispersion engineering, accurate matching is conducted through a particle swarm optimization algorithm, incident light of different wavelengths generates transverse dispersion on a focal plane, full-wave-band spectral imaging can be completed through single exposure, and a mechanical scanning device is not needed. The quadruple rotational symmetry structure of the metasurface ensures the consistent response to TE / TM polarized light, and significantly improves the adaptability of the system in a complex polarization environment. The average energy utilization rate of the metasurface exceeds 50%, the highest isolation degree of each pixel is 48, and the metasurface has the characteristics of high signal-to-noise ratio and low crosstalk. Compared with a traditional spectral imaging device, the spectral imaging device has the advantages of being high in speed, high in energy utilization rate, small in size, low in crosstalk and the like, is suitable for application scenes such as medical endoscopy, industrial online detection and unmanned aerial vehicle environment monitoring which have high requirements for real-time performance and portability, and provides an innovative solution for achieving a miniaturized spectral imaging system.

The invention discloses a wide-spectrum high-resolution hyperspectral video imaging method and device, and the method comprises the steps: carrying out the feature extraction of a plurality of wide-spectrum aliasing wide-spectrum hyperspectral video frames captured by a wide-spectrum hyperspectral sensor in single exposure imaging, and obtaining a hyperspectral output feature; the method comprises the following steps: extracting features for panchromatic video frames of the same scene captured by a panchromatic sensor to obtain panchromatic output features, splicing wide-band spectrum hyperspectral video frames and the panchromatic video frames, and extracting features to obtain space-spectrum features; fusing the hyperspectral output feature, the panchromatic output feature and the space-spectral feature to obtain a final coding feature; the encoded features are decoded to obtain a high resolution hyperspectral video frame. The method aims at recovering spectral information of more wavebands from aliasing spectrums, the problems of spectral aliasing and the like are solved through fusion imaging, and high-resolution hyperspectral videos are obtained.

The invention discloses a wavelength-independent real-time polarization imaging method and device based on a metasurface, and belongs to the field of polarization imaging. Comprising a to-be-tested sample, a first lens, a two-dimensional polarization grating, a one-dimensional polarization grating, a second lens, a polarizing film and an image sensor which are sequentially arranged along a light path, a light beam irradiates a to-be-measured sample and then passes through a first lens, and a part of a light field enters a two-dimensional polarization grating to be modulated and split into two left-hand circular polarization components and two right-hand circular polarization components through diffraction; part of the light field is directly transmitted to the one-dimensional polarization grating and is diffracted and split into left-handed and right-handed circular polarization components; at the focal point of the second lens after diffraction splitting, one left-handed circular polarization component and one right-handed circular polarization component diffracted and split by the two-dimensional polarization grating are completely overlapped with the left-handed circular polarization component and the right-handed circular polarization component diffracted and split by the one-dimensional polarization grating respectively; and the light reaches the image plane of the image sensor through the polarizer. According to the invention, the problem of wavelength dependence in the existing single-exposure polarization imaging technology is solved.

The invention belongs to the technical field of astronomy, and provides a multi-channel synchronous polarization imager system which is used for a night astronomy observation scene. According to the system, through cooperative work of key components such as a relay optical system, a polarization calibration unit rotating wheel, a broadband optical filter, a zero polarization splitting prism, a super achromatic half-wave plate and a polarization splitting prism, celestial body polarization state synchronous measurement in a full view field is completed through one-time exposure. Wherein the relay optical system is responsible for collimation and imaging functions; the polarization calibration unit rotating wheel is used for polarization calibration; the zero-polarization splitting prism divides an incident light beam into a transmission light beam and a reflection light beam; the super achromatic half-wave plate and the polarization splitting prism are used for polarization modulation. The system solves the problem of dispersion effect during broadband measurement, improves the detection capability of a dark and weak target, and is suitable for high-precision synchronous polarization measurement of a large field of view.

The present invention discloses a fast structured light digital holographic measurement system and method, which relates to the field of micro-nano detection technology; in the present invention, structured light after polarization modulation is used to irradiate an object to be measured and then becomes object light. The object light and the reference light are combined and incident on a polarization beam splitter element. After passing through the polarization beam splitter element, multiple structured light digital holograms are formed. The structured light digital holograms are collected by a photodetector, and the photodetector can achieve synchronous collection of two structured light holograms with fixed phase shifts in a single exposure; the measurement method of the present invention introduces spatial phase shift during the measurement process, eliminates the time phase shift step, doubles the overall collection efficiency, and improves the real-time performance of the measurement.

The invention discloses a micro-lens array non-scanning type laser interference three-dimensional imaging method and device for a dynamic sample, and relates to the technical field of optical three-dimensional measurement and imaging, and the method comprises the steps: dividing laser into object light and reference light; irradiating a dynamic sample arranged at the focal plane of the micro-lens array with the object light after beam expansion, modulating the object light carrying sample information by the micro-lens array, and combining the modulated object light with the reference light in space to generate a composite interference field containing a plurality of sub-region interference patterns; recording a single-frame composite interferogram by an area array detector; and finally, reconstructing the three-dimensional morphology of the sample at the measurement moment through a phase extraction and unwrapping algorithm. By means of the mode, full-view-field three-dimensional information can be obtained through single exposure by means of the microlens array, mechanical scanning or multi-frame phase shifting is not needed, the problem of motion artifacts generated when a dynamic sample is measured through a traditional interference method is effectively solved, and high-speed and high-resolution three-dimensional imaging of the surface appearance of the dynamically-changed sample is achieved.

The invention discloses a camera time sequence control method, electronic equipment and a driver monitoring system, and relates to the technical field of artificial intelligence. The method is suitable for a camera of an image sensor, and the exposure starting time of photosensitive pixels in all rows or columns of the camera is sequentially staggered, and according to the single exposure duration, the effective imaging time and the periodic time sequence interval of the image sensor, the exposure starting time of the photosensitive pixels in all rows or columns is calculated. Under the condition that the total energy of infrared radiation received by each exposure pixel is the same, determining the light-emitting duration of the light-supplementing light source; according to the effective imaging time, the frame blanking time and the light-emitting duration, determining a light-emitting starting moment under the condition that the starting position of a light-emitting signal of the current frame image is located at the last time slice before the end of the previous frame image; and generating a control signal corresponding to the light supplementing light source according to the light emitting starting time and the light emitting duration. According to the invention, the problems of high cost and large image noise in related technologies can be solved, the cost can be effectively reduced, and the image effect can be optimized.

To form multiple aerial images in a single lithography exposure pass.SOLUTION: A set of pulses of light in a light beam is passed through a mask toward a wafer during a single exposure pass; at least a first aerial image and a second aerial image on the wafer based on pulses of light in the set of pulses that pass through the mask is generated during a single exposure pass, the first aerial image being at a first plane on the wafer, and the second aerial image being at a second plane on the wafer, where the first plane and the second plane are spatially distinct from each other and separated from each other by a separation distance along the direction of propagation; and a three-dimensional semiconductor component is formed.SELECTED DRAWING: Figure 1A