185 results about "Single exposure" patented technology

The invention provides a chip bonding wire three-dimensional measurement method and system based on an inner cavity reflection camera system, and relates to the technical field of three-dimensional measurement. The method comprises the following steps: performing one-time exposure imaging on a chip bonding wire to be detected through an inner cavity reflection camera system to obtain at least three mutually independent visual angle images in the same frame; performing brightness normalization compensation and geometric calibration on the visual angle image to obtain a visual angle data set with uniform brightness and correlation; pairing the view angle data sets in pairs, extracting parallax information by using a feature matching algorithm based on optical flow, and fusing multiple pairs of parallax to generate a lead three-dimensional point cloud; performing noise filtering and curved surface reconstruction on the three-dimensional point cloud to obtain a continuous three-dimensional grid model of a lead; and performing texture mapping on the three-dimensional grid model by adopting any visual angle in the visual angle image or the combination of the visual angles, and outputting a lead three-dimensional reconstruction result with textures. According to the invention, high-precision, large-depth-of-field and rapid three-dimensional measurement of the chip bonding wire is realized.

The invention discloses an intermediate infrared polarization spectrum imaging method and device. The method comprises the following steps: carrying out joint coding on an intermediate infrared light beam carrying to-be-measured target space, spectrum and polarization information by adopting an intermediate infrared polarization spectrum modulator consisting of metasurface units which are arranged in an array and have non-correlation response characteristics; projecting the coding light field to a two-dimensional detector array to generate a two-dimensional coding image under single exposure; and decoding the two-dimensional coding image through a reconstruction unit so as to reconstruct and obtain a space-spectrum-polarization four-dimensional data cube of the target to be measured. The problem that polarization information cannot be rapidly obtained in the prior art is solved, target full information can be obtained under single exposure, and the system has the advantages of being high in imaging speed, simple in structure, easy to miniaturize and the like.

The invention discloses a pipeline inner wall panoramic three-dimensional scanning device and a measuring method, and the device comprises a panoramic plane laser generator which comprises a point laser generator, an axicon, a laser focusing lens, a conical surface reflector and a transparent cylindrical support, and is used for transmitting a 360-degree panoramic plane laser beam to the inner wall of an object to be measured; according to the invention, single-exposure full-circumferential high-precision three-dimensional measurement is realized, and the device can synchronously obtain complete three-dimensional point cloud data of the circumference of the inner wall of the whole pipeline at the moment of single exposure through innovative combination of a panoramic annular imaging system and a panoramic planar laser projection technology; the method has the advantages that axial rotary scanning or multi-view data splicing required by a traditional method is avoided, measurement efficiency is improved, splicing accumulative errors are avoided, laser stripe image acquisition is complete and free of breakpoints, and completeness and accuracy of three-dimensional reconstruction data are guaranteed from the source.

The invention relates to the technical field of photoelectric detection, and particularly discloses a three-dimensional defect detection method and system based on compound color stripe projection, and the method comprises an upper computer control and processing module which is used for generating a compound color stripe pattern coded with phase difference information, and coordinating and controlling the synchronous operation of the whole system; the structured light projection module is used for receiving the composite color stripe pattern and projecting the composite color stripe pattern to the surface of a measured object at one time; the imaging module is used for receiving the composite colored light reflected after being modulated by the surface of the measured object and separating the composite colored light into monochromatic light signals with different colors for synchronous acquisition; the imaging module further comprises an active highlight suppression unit which is used for dynamically adjusting the polarization direction according to an instruction of the upper computer control and processing module so as to suppress highlight caused by specular reflection. Multiple groups of sine fringes with fixed phase differences are projected to the surface of a measured object at one time. And a plurality of deformed fringe patterns with phase displacement can be synchronously acquired under single exposure.

The invention discloses an all-solid-state snapshot full-Stokes parameter measurement and imaging enhancement sensor device. The all-solid-state snapshot full-Stokes parameter measurement and imaging enhancement sensor device comprises a micro-lens array module, a liquid crystal phase modulation module, a polarization wire grating array module and an image sensor module. The micro lens array module is composed of a plurality of micro lenses which are arranged in a two-dimensional mode, and incident light is focused on the photodiode of each pixel. The liquid crystal phase modulation module is composed of two high-speed liquid crystal variable phase delayers, and active phase modulation is carried out on the polarization state of incident light. Polarized light information in four polarization directions can be obtained only through single shooting in the polarization wire grating array module. The image sensor module calculates the full Stokes parametric polarization characteristics of the incident light. According to the invention, full-polarization information measurement of incident light can be realized only through single exposure, and a polarization enhancement mode is switched after measurement is completed, so that the imaging efficiency of the sensor in dark light scenes such as weak contrast target detection is greatly improved.

The invention discloses a monocular four-dimensional imaging device and method based on a metasurface. The monocular four-dimensional imaging device comprises an image sensor and an imaging optical system arranged in front of the image sensor. Wherein the imaging optical system comprises a metasurface, the metasurface is designed to simultaneously generate a self-acceleration Airy point spread function with depth-dependent lateral displacement for incident left-hand circularly polarized light and right-hand circularly polarized light, and the self-acceleration Airy point spread function can generate a self-acceleration Airy point spread function with depth-dependent lateral displacement under the condition that a mechanical moving part is not used. Carrying out polarization separation and focusing on the left-hand circularly polarized light and the right-hand circularly polarized light; the image sensor is used for recording a mixed image containing the left-hand circularly polarized light information and the right-hand circularly polarized light information at the same time through single exposure so as to obtain three-dimensional depth and polarization information of the metasurface, namely monocular four-dimensional imaging of the metasurface. The scene perception and understanding capability of a machine is greatly enhanced, and the method has unique advantages in the aspects of target identification, material discrimination, severe environment perception and the like.

The invention discloses a surface topography measurement device and method based on polarization phase shift. The device comprises a laser module, a polarization beam splitting and interference module, a polarization beam combining and imaging module, a polarization image acquisition module and a control and reconstruction module. The laser module comprises a monochromatic tunable laser, an optical fiber collimating amplifier and a polarizer; the polarization beam splitting and interference module comprises a polarization beam splitting prism, a first quarter-wave plate, a plane mirror and a second quarter-wave plate; the polarization beam combining and imaging module comprises a polarization splitting prism, a third quarter-wave plate and a telecentric lens; the polarization image acquisition module comprises a micro-polarization array camera and an image processing unit, and the micro-polarization array camera synchronously acquires four polarization interference images through single exposure; and the control and reconstruction module obtains measurement data of the surface topography of the to-be-measured object through a phase unwrapping algorithm and three-dimensional topography reconstruction. According to the invention, high-precision, large-field-of-view, portable and high-efficiency field detection can be realized.

The invention provides a photogrammetry control method and device based on a laser galvanometer and electronic equipment, and belongs to the technical field of photogrammetry, and the method comprises the steps: controlling the laser galvanometer to deflect according to a preset scanning path in a single exposure period of a camera, so as to form n laser gratings in a single frame image collected by the camera; extracting feature information of each laser grating from the single-frame image, wherein the feature information comprises pixel coordinates in a space coordinate system; and calculating three-dimensional coordinate points of the surface of the object to be measured according to the real-time deflection angles of the laser galvanometer when the laser galvanometer projects the laser gratings, the feature information of the laser gratings and pre-calibrated camera parameters, and summarizing to generate three-dimensional point cloud data. According to the invention, the precision of photogrammetry is improved.

The invention discloses a spectral space coding imaging system and method of a programmable diffractive optical element. The method comprises the following steps: S10, receiving a target scene light signal through a light field model and forming an optical image; s20, performing spatial spectrum joint modulation on the optical image by adopting a programmable diffractive optical element to obtain a coded light field; s30, projecting the coding light field to a detector and obtaining a two-dimensional coding image of primary exposure; and S40, inputting the two-dimensional coding image into a reconstruction module, combining modulation information of the programmable diffractive optical element, and performing decoding reconstruction by using a compressed sensing algorithm to obtain a high-resolution space image and spectral information of the scene. According to the invention, the limitation of the existing system on spatial / spectral resolution is broken through, the system structure is simplified, and the hardware programmability is improved; the imaging capability in a dynamic scene is improved; the signal-to-noise ratio and the penetrating power are improved; and balancing a physical model and a data driving method.

According to the mid-infrared multispectral integrated imaging device system and method based on the metasurface, superatom phase distribution is designed through dispersion engineering, accurate matching is conducted through a particle swarm optimization algorithm, incident light of different wavelengths generates transverse dispersion on a focal plane, full-wave-band spectral imaging can be completed through single exposure, and a mechanical scanning device is not needed. The quadruple rotational symmetry structure of the metasurface ensures the consistent response to TE / TM polarized light, and significantly improves the adaptability of the system in a complex polarization environment. The average energy utilization rate of the metasurface exceeds 50%, the highest isolation degree of each pixel is 48, and the metasurface has the characteristics of high signal-to-noise ratio and low crosstalk. Compared with a traditional spectral imaging device, the spectral imaging device has the advantages of being high in speed, high in energy utilization rate, small in size, low in crosstalk and the like, is suitable for application scenes such as medical endoscopy, industrial online detection and unmanned aerial vehicle environment monitoring which have high requirements for real-time performance and portability, and provides an innovative solution for achieving a miniaturized spectral imaging system.

The invention discloses a wide-spectrum high-resolution hyperspectral video imaging method and device, and the method comprises the steps: carrying out the feature extraction of a plurality of wide-spectrum aliasing wide-spectrum hyperspectral video frames captured by a wide-spectrum hyperspectral sensor in single exposure imaging, and obtaining a hyperspectral output feature; the method comprises the following steps: extracting features for panchromatic video frames of the same scene captured by a panchromatic sensor to obtain panchromatic output features, splicing wide-band spectrum hyperspectral video frames and the panchromatic video frames, and extracting features to obtain space-spectrum features; fusing the hyperspectral output feature, the panchromatic output feature and the space-spectral feature to obtain a final coding feature; the encoded features are decoded to obtain a high resolution hyperspectral video frame. The method aims at recovering spectral information of more wavebands from aliasing spectrums, the problems of spectral aliasing and the like are solved through fusion imaging, and high-resolution hyperspectral videos are obtained.

The invention belongs to the technical field of astronomy, and provides a multi-channel synchronous polarization imager system which is used for a night astronomy observation scene. According to the system, through cooperative work of key components such as a relay optical system, a polarization calibration unit rotating wheel, a broadband optical filter, a zero polarization splitting prism, a super achromatic half-wave plate and a polarization splitting prism, celestial body polarization state synchronous measurement in a full view field is completed through one-time exposure. Wherein the relay optical system is responsible for collimation and imaging functions; the polarization calibration unit rotating wheel is used for polarization calibration; the zero-polarization splitting prism divides an incident light beam into a transmission light beam and a reflection light beam; the super achromatic half-wave plate and the polarization splitting prism are used for polarization modulation. The system solves the problem of dispersion effect during broadband measurement, improves the detection capability of a dark and weak target, and is suitable for high-precision synchronous polarization measurement of a large field of view.

The invention discloses a micro-lens array non-scanning type laser interference three-dimensional imaging method and device for a dynamic sample, and relates to the technical field of optical three-dimensional measurement and imaging, and the method comprises the steps: dividing laser into object light and reference light; irradiating a dynamic sample arranged at the focal plane of the micro-lens array with the object light after beam expansion, modulating the object light carrying sample information by the micro-lens array, and combining the modulated object light with the reference light in space to generate a composite interference field containing a plurality of sub-region interference patterns; recording a single-frame composite interferogram by an area array detector; and finally, reconstructing the three-dimensional morphology of the sample at the measurement moment through a phase extraction and unwrapping algorithm. By means of the mode, full-view-field three-dimensional information can be obtained through single exposure by means of the microlens array, mechanical scanning or multi-frame phase shifting is not needed, the problem of motion artifacts generated when a dynamic sample is measured through a traditional interference method is effectively solved, and high-speed and high-resolution three-dimensional imaging of the surface appearance of the dynamically-changed sample is achieved.

The invention discloses a camera time sequence control method, electronic equipment and a driver monitoring system, and relates to the technical field of artificial intelligence. The method is suitable for a camera of an image sensor, and the exposure starting time of photosensitive pixels in all rows or columns of the camera is sequentially staggered, and according to the single exposure duration, the effective imaging time and the periodic time sequence interval of the image sensor, the exposure starting time of the photosensitive pixels in all rows or columns is calculated. Under the condition that the total energy of infrared radiation received by each exposure pixel is the same, determining the light-emitting duration of the light-supplementing light source; according to the effective imaging time, the frame blanking time and the light-emitting duration, determining a light-emitting starting moment under the condition that the starting position of a light-emitting signal of the current frame image is located at the last time slice before the end of the previous frame image; and generating a control signal corresponding to the light supplementing light source according to the light emitting starting time and the light emitting duration. According to the invention, the problems of high cost and large image noise in related technologies can be solved, the cost can be effectively reduced, and the image effect can be optimized.

The application provides a method for obtaining a multispectral image through single exposure, an endoscope system and electronic equipment. The method comprises the following steps: obtaining an original image within a single exposure time, wherein the original image is obtained by sequentially imaging a light signal on a main light path of the endoscope system through a lens array and a continuous variable filter; dividing the original image into a plurality of sub-images corresponding to different channels in the lens array, wherein different sub-images correspond to different wave bands and different channel response coefficients; and performing normalization correction on the corresponding sub-images according to the wave bands and the channel response coefficients, so as to eliminate the response difference between different channels and obtain a sequence image of multiple wave bands. Through multiple parallel channels, a plurality of sub-images with different spectral responses are obtained within a single exposure, and the rapid acquisition of multispectral information of an endoscope is realized.

This invention discloses a flow field measurement method and system based on structured light coding and dual-view optical field imaging. The method includes calibrating the resolution and point spread function of the imaging system to generate orthogonal structured light fringes; constructing an excitation optical path to generate three orthogonal structured lights of different colors with a phase difference of 120°; acquiring the three phase structured light fringes within a single camera exposure time; constructing an experimental optical path for dual-view optical field imaging and reconstructing the optical field from the imaging results under the illumination of the three different phase structured lights; performing structured light super-resolution reconstruction on the optical field images under dual-view to obtain super-resolution images of particles in the Y and Z directions; superimposing the dual-view images of the super-resolution images to obtain a super-resolution three-dimensional particle distribution image; performing cross-correlation calculation on the super-resolution three-dimensional particle distribution image and post-processing the three-dimensional velocity vector field of the flow field.

The embodiment of the invention relates to the technical field of image processing, in particular to an image fusion method, a chip, electronic equipment and a storage medium. The method comprises the following steps: in response to a shooting operation, acquiring a first raw image and a second raw image by a camera of the electronic equipment; the first raw image and the second raw image are acquired by the camera through one exposure process. That is to say, the camera can obtain the first raw image and the second raw image through a single-exposure multiple-reading mode. Next, the electronic device calculates an image light ratio through the pixel values of the pixel points of the first raw image and the pixel values of the pixel points of the second raw image. And the electronic device performs image fusion on the first raw image and the second raw image according to the image light ratio to obtain a fused raw image. Then, the electronic device displays the fused raw image. Through the method, the signal-to-noise ratio of the obtained fused image can be improved.

The invention discloses a multi-exposure offset method for improving PCB ink color difference and a medium. The multi-exposure offset method comprises the following steps: preparing a PCB substrate coated with ink; determining the power ratio of a plurality of lasers in the laser direct imaging equipment; an exposure parameter set corresponding to the multiple exposure modes is established, the exposure parameter set at least comprises an exposure dose parameter and an exposure starting point offset parameter, and the total exposure dose of the multiple exposure modes is equivalent to the single exposure dose required for improving the chromatic aberration target; based on the exposure parameter set, the laser direct imaging equipment is controlled to execute at least two times of exposure operation on the same target pattern area on the PCB substrate, and the starting point positions of the exposure operation are different from one another. According to the invention, multiple exposure is carried out by setting different starting points for the same pattern area, so that the light path energy is dispersed and homogenized, the chromatic aberration in PCB ink exposure is efficiently compensated, and the product yield is improved.

The invention discloses a single frequency domain holographic ultrafast imaging system and method based on two-step phase shift. The ultrafast imaging system comprises a light source part used for generating linearly polarized femtosecond laser pulses; the chirp laser pulse part is connected with the light source part and is used for broadening the femtosecond laser pulse into a chirp laser pulse; the single two-step phase shift part is connected with the chirp laser pulse part and is used for splitting the chirp laser pulse into reference light and signal light and generating two groups of phase shift interferograms with fixed phase difference based on the reference light and the signal light; wherein the two groups of phase shift interferograms are generated at the same time under single exposure; and the spectral imaging part is connected with the single two-step phase shift part, and is used for recording the two groups of phase shift interferograms at the same time, and reconstructing the phase information of the sample through a preset phase reconstruction algorithm. Therefore, through optical system design, two groups of phase shift interferograms are simultaneously obtained through single exposure, time delay and phase errors caused by traditional step-by-step acquisition are avoided, and the method is suitable for observation of a femtosecond ultrafast dynamic process.

The invention belongs to the technical field of optical imaging, and discloses a non-intrusive imaging method and device penetrating through a dynamic scattering medium, and the method comprises the steps: controlling a preset coherent object light beam to irradiate an object to be imaged, and forming an object light field; collecting a speckle intensity image of a speckle field formed by an object light field penetrating through the preset dynamic scattering medium in a far-field region, wherein the far-field region is a region of the preset dynamic scattering medium penetrated by the object light field; based on a four-moment correlation function of the speckle intensity image, analyzing to obtain a far-field mutual dry function; according to a function relationship between the far-field mutual coherence function and the object light field autocorrelation function, analyzing to obtain an autocorrelation function of the object to be imaged; and based on a phase recovery algorithm, reconstructing an image of the to-be-imaged object through the autocorrelation function. According to the invention, view field limitation caused by dependence on an optical memory effect is avoided, imaging can be completed through single exposure, a data acquisition process is simplified, and adaptability to a dynamic scattering medium and imaging efficiency are improved.

This application relates to the field of optoelectronic imaging technology, specifically to an image sensor, imaging device, and imaging method. The image sensor includes a pixel array, which comprises multiple functional units arranged in an array. Each functional unit includes at least two pixel sub-units. Each pixel sub-unit includes at least two polarization pixels and at least one spectral pixel. The spectral pixel includes a first photosensitive pixel layer and a narrowband filter layer. In each functional unit, the narrowband filter layer of the spectral pixel corresponding to the at least two pixel sub-units has a different center wavelength. This application enables efficient acquisition of polarization and spectral information through a single exposure and effectively reduces device size and manufacturing costs.

The invention relates to the technical field of light field imaging, and provides a snapshot type full Stokes imaging and depth estimation method and device and electronic equipment. In the device, a cascade metasurface module comprises a first-stage metasurface and a second-stage metasurface; the first-stage metasurface is a depth coding metasurface and is used for performing depth-related phase modulation on incident scene light to obtain first middle light; the second-stage metasurface is a polarization coding metasurface, and the second-stage metasurface is matched with the polarization camera and used for jointly carrying out polarization-related intensity adjustment on the first middle light; the polarization camera captures an original image subjected to depth and polarization dual coding through single exposure; and the rear-end reconstruction unit receives the original image and decodes the depth map and the full Stokes image of the output scene through a preset reconstruction algorithm. The invention provides a snapshot type imaging system capable of simultaneously acquiring scene polarization information and depth information, and the information acquisition efficiency is greatly improved.

The utility model provides a chip bonding wire three-dimensional measurement system based on an inner cavity reflection camera system. The chip bonding wire three-dimensional measurement system comprises a microscope lens, a reflector cavity, a relay lens, an industrial camera and an illumination module. Two parallel plane mirrors are arranged in the reflector cavity and used for separating a first real image imaged by the microscope lens into three independent light paths to form a three-view virtual image, and the three-view virtual image is transmitted to a photosensitive chip of the industrial camera through the relay lens at the amplification factor of 1: 1, so that three-view images are acquired through single exposure. The system is matched with a computer to carry out optical flow calculation, point cloud fusion and three-dimensional reconstruction, a three-dimensional grid model with texture colors is generated, and high-precision and non-contact measurement of the multi-layer lead shielding structure is achieved. The system is compact in structure, easy and convenient to install and adjust and suitable for on-line detection of bonding and packaging of vehicle-gauge-level chips.

The utility model discloses an O wave band end face coupler based on a silicon nitride multi-cone waveguide. The O wave band end face coupler is characterized in that a waveguide layer is composed of three double-cone input waveguides, two double-cone waveguides, a single-cone waveguide and a straight waveguide connected with the single-cone waveguide; according to the utility model, through the introduction of the multi-conical structure of the biconical input waveguide, the biconical waveguide and the single-conical waveguide, the mode mismatch between the waveguides and the optical fiber is effectively reduced, so that the loss caused by mode adaptation is reduced, the efficient optical coupling between the optical fiber and a chip is realized, and the structure between the waveguides is compact; only single exposure and etching are needed, the process complexity is reduced, the coupling loss in the O wave band is low, and the bandwidth is large.

The application discloses a kind of full solid, snapshot type full stokes parameter measurement and imaging enhanced sensor device, including microlens array module, liquid crystal phase modulation module, polarization grating array module and image sensor module.Microlens array module is composed of many small lens two-dimensional arrangement, focusing on the photodiode of each pixel on incident light.Liquid crystal phase modulation module is composed of two high-speed liquid crystal variable phase retarder, realize the polarization state of incident light active phase modulation.Polarization grating array module only needs single shooting to obtain four polarization directions of polarized light information.Image sensor module calculates the full stokes parameter polarization characteristics of incident light.The application only needs single exposure to realize the full polarization information measurement of incident light, and after completing measurement, it turns into polarization enhancement mode, greatly improves the imaging efficiency of sensor in weak contrast target detection and other dark light scene.

The invention discloses a neural network enhanced wavefront sensing method and system based on a metasurface and double-helix PSF coding, and the method comprises the steps: loading a preset reference phase diagram and a to-be-measured phase diagram on unmodulated parallel light through a spatial light modulator, thereby generating a reference wavefront and a to-be-measured wavefront; mutually orthogonal double-helix phase distribution is generated by using the polarization multiplexing super-structure surface, and a reference double-helix point spread function image and a to-be-measured double-helix point spread function image are obtained; and outputting a phase distribution matrix of the wavefront to be measured by using the self-calibration dual-encoder neural network to realize synchronous reconstruction of the dual-channel wavefront. The method can realize high-resolution real-time wavefront measurement under single exposure, has high robustness and expandability, and is suitable for the fields of adaptive optics, polarization imaging, optical communication and the like.

This invention discloses a motor appearance inspection production line, including a frame, a conveying device, a top surface inspection device, a five-sided inspection device, and an endoscopic inspection device. The endoscopic inspection device is positioned between the top surface inspection device and the five-sided inspection device along the conveying direction. In the appearance inspection process, the endoscopic inspection device first inspects the internal condition of the motor. Before the five-sided inspection, motors that fail the endoscopic inspection are graded and removed to the first or second NG line, avoiding the waste of five-sided inspection resources by defective motors. Endoscopic and appearance inspections are integrated in one step. The five-sided inspection device uses a transparent motor placement platform combined with a surrounding reflector group and a bottom single-camera architecture. Transmission imaging of the motor's bottom surface and reflection imaging of the four sides are acquired simultaneously in a single exposure, without the need for flipping. This invention eliminates the constraint of the flipping process on production cycle time, achieving highly efficient and automated integrated inspection of motor appearance and endoscopy.

The application discloses a kind of spectral modulation radiation temperature measuring device and method, belongs to optical radiation temperature measuring technical field.For the problems, such as limited spectral channel, difficult to realize single-exposure multi-channel synchronous acquisition, temperature measuring stability and insufficient inversion robustness of existing radiation temperature measuring technology under long-distance, high dynamic and complex background conditions, the present application sets up wide-spectrum modulation optical window at the incident end, and combines wide-spectrum modulation multi-modal spectral chip, to synchronously acquire multi-channel wide-spectrum modulation radiation image under single exposure;Pretreatment is carried out using system on chip, and wide-spectrum modulation response model, emissivity spectral basis expansion model and time domain regularization are fused in temperature inversion calculation platform, to realize stable inversion of real temperature field, emissivity distribution and temperature rising sequence, suitable for non-contact temperature measurement in long-distance high-temperature target and other fields.

The invention discloses a single-light-source energy spectrum imaging device, and relates to the field of medical science and technology, the single-light-source energy spectrum imaging device comprises a ray light source, a detector assembly and a shooting grid assembly, the detector assembly and the shooting grid assembly are both arranged in the emitting direction of the ray light source, and the detector assembly is used for synchronously collecting at least two types of ray image signals in single exposure of the ray light source; the at least two types of ray image signals correspond to different energy ranges; the emission grid assembly is located between the ray light source and the detector assembly and comprises an enhanced anti-scattering grid, a micropore array is arranged on the enhanced anti-scattering grid and used for allowing rays to pass through, the enhanced anti-scattering grid comprises a barrier layer and an absorption layer, and the absorption layer is arranged on the surface of the barrier layer in a composite mode. The absorption layer is used for absorbing the characteristic rays generated by the barrier layer. The technical problems that in existing single-light-source single-exposure dual-energy imaging, scattered rays are prone to polluting detector signals, energy spectrum data distortion is caused, and image artifacts are serious are solved.

The invention discloses a direct-writing photoetching system, method and device. The system comprises a mechanical subsystem, an optical subsystem and an electric control subsystem, the electric control subsystem is used for determining an exposure mechanism conforming to the exposure dot matrix image and determining the moving position of the mechanical subsystem; the optical subsystem is used for providing a light source, correcting optical distortion and generating an exposure dot matrix image under the control of the electric control subsystem; a substrate coated with photoresist is carried on the mechanical subsystem, and the mechanical subsystem is used for moving from a first position to a second position after single exposure under the control of the electric control subsystem; the distance between the first position and the second position is an integer, and p is the grid width. By adopting the system, the exposure speed of the exposure dot matrix image can be improved, and the requirement on the mobility performance of the workpiece table is reduced.