Synchronous phase-shifting Fizeau interference device capable of measuring in real time

A technology of synchronous phase shifting and Fizeau interferometry, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of low measurement accuracy, inability to measure in real time, poor stability, etc., achieve high spatial resolution, realize real-time performance, The effect of maintaining compactness

Active Publication Date: 2012-07-18
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

The invention combines the synchronous phase shifting technology and the Fizeau interferometry method, and solves the technical problems of traditional interferometers such as poor stability, low measurement accuracy, and inability to measure in real time

Method used

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  • Synchronous phase-shifting Fizeau interference device capable of measuring in real time
  • Synchronous phase-shifting Fizeau interference device capable of measuring in real time
  • Synchronous phase-shifting Fizeau interference device capable of measuring in real time

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Embodiment

[0052] according to figure 1 The optical path is shown. Experimentally, we measured the surface topography of a single convex lens with a focal length of 10m. Laser 1 is a helium-neon laser with a wavelength of 632.8nm, and the polarization is linear polarization along the vertical direction. The beam expansion and collimation system composed of lenses 2 and 4 has a beam expansion ratio of 1:25; the diameter of the pinhole filter 3 on the rear focal plane of lens 2 is 20 μm. Behind the non-polarizing beamsplitter prism 5, a 1 / 4 wave plate 6 with a surface flatness of λ / 50 is placed, and the main axis direction of the wave plate forms an angle of 45° with the vertical direction. The sample is placed behind the 1 / 4 wave plate 6 in parallel, with a distance of 5 mm from the 1 / 4 wave plate. On the reflected light path of the non-polarizing beam splitter prism 5, a second 1 / 4 wave plate whose main axis direction is at an angle of 45° to the vertical direction is placed, which con...

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Abstract

The invention aims to provide a synchronous phase-shifting Fizeau interference device capable of performing real-time high-accuracy measurement on the surface appearance of an object. A synchronous phase-shifting technology is combined with a Fizeau interference method, and the technical problems that the traditional interferometer has low stability and low measurement accuracy and cannot measure objects in real time and the like are solved. The synchronous phase-shifting Fizeau interference device capable of measuring in real time comprises an illumination unit, an interference unit and a synchronous phase-shifting unit. Due to the adoption of a coaxial interference light path, a space-bandwidth product of a charge coupled device (CCD) is fully utilized; and compared with an off-axis light path, the coaxial interference light path has a higher spatial resolution; a flat glass plate in the traditional Fizeau interferometer is replaced by a 1 / 4 wave plate, so that object light and reference light have orthogonal polarization directions, and the compactness of the structure of the device is kept under the synchronous phase-shifting; and moreover, four phase-shifting interference patterns can be obtained through single exposure, and the real-time property of measurement is realized on the premise of guaranteeing a high spatial resolution.

Description

technical field [0001] The invention relates to a synchronous phase-shifting Fizeau interference device capable of measuring the three-dimensional topography of an object surface in real time. Background technique [0002] Quantitative measurement of the three-dimensional topography or surface flatness of the surface of an object is of great significance for improving the precision and quality of optical processing. Traditional optical interferometry methods, such as Michelson interferometer, Tieman Green interferometer, etc., provide high-precision, fast and non-destructive testing means for object surface topography measurement. However, in these interferometers, the object light and the reference light travel through different paths in space, so the environmental vibration has a great influence on the measurement results. [0003] The Fizeau interferometer has an optical structure with a common path of matter and parameters, which can overcome the shortcomings of traditi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02G01B11/24
Inventor 姚保利郜鹏闵俊伟雷铭严绍辉杨延龙叶彤
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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