Patents
Literature
Patsnap Copilot is an intelligent assistant for R&D personnel, combined with Patent DNA, to facilitate innovative research.
Patsnap Copilot

36results about How to "Breakdown voltage of device" patented technology

Method for manufacturing an edge termination for a silicon carbide power semiconductor device

A method for manufacturing an edge termination structure for a silicon carbide power semiconductor device having a central region and an edge region is provided. The following manufacturing steps are performed: a) providing an n-doped silicon carbide substrate, b) epitaxially growing a silicon carbide n-doped drift layer on the substrate, which has a lower doping concentration than the substrate, c) creating at least one p-doped termination layer by implanting a second ion up to a maximum termination layer depth and annealing on the first main side, d) forming a doping reduction layer having a depth range, which doping reduction layer comprises at least one doping reduction region, wherein a depth of a doping concentration minimum of the doping reduction layer is greater than the maximum termination layer depth, wherein for the creation of each doping reduction region: implanting a first ion with an implantation energy in the drift layer at least in the edge region, wherein the first ion and the at least one implantation energy are chosen such that the doping reduction layer depth range is less than 10 μm, e) annealing the doping reduction layer, wherein step d) and e) are performed such that the doping concentration of the drift layer is reduced in the doping reduction layer.
Owner:HITACHI ENERGY SWITZERLAND AG

Method for manufacturing an edge termination for a silicon carbide power semiconductor device

A method for manufacturing an edge termination structure for a silicon carbide power semiconductor device having a central region and an edge region is provided. The following manufacturing steps are performed: a) providing an n-doped silicon carbide substrate, b) epitaxially growing a silicon carbide n-doped drift layer on the substrate, which has a lower doping concentration than the substrate, c) creating at least one p-doped termination layer by implanting a second ion up to a maximum termination layer depth and annealing on the first main side, d) forming a doping reduction layer having a depth range, which doping reduction layer comprises at least one doping reduction region, wherein a depth of a doping concentration minimum of the doping reduction layer is greater than the maximum termination layer depth, wherein for the creation of each doping reduction region: implanting a first ion with an implantation energy in the drift layer at least in the edge region, wherein the first ion and the at least one implantation energy are chosen such that the doping reduction layer depth range is less than 10 μm, e) annealing the doping reduction layer, wherein step d) and e) are performed such that the doping concentration of the drift layer is reduced in the doping reduction layer.
Owner:HITACHI ENERGY LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products