The invention relates to a method for preparing a vertical double-diffusion metal oxide semiconductor device, which belongs to the technical preparation field of a semiconductor. The method comprises the main preparing steps: preparing a N<+> substrate, extending and growing N<->, oxidizing gate oxidation, depositing and adulterating polysilicon, depositing silicon dioxide, etching polysilicon windows, injecting and pushing a P trap, injecting high-concentration deep P<+>, injecting a N<+> source, oxidizing and forming a contact hole, etching a groove-shaped window by using an oxidizing layer as a mask, depositing metal, etching metal, passivating and back metalizing. The invention can manufacture a VDMOS device by only using two mask plates, the manufacturing cost of the device is greatly reduced, and meanwhile, the parasitic transistor effect of the device is weakened for the existence of a P<+> layer and the introduction of groove-shaped source contact metal, and the resistance among drain sources is reduced. The invention can be used for the production and the manufacture of the VDMOS device, other semiconductor devices (such as an insulating gate double-pole transistor) and an integrated circuit.