The invention discloses an SiC
MOSFET component of a slant channel. A
primitive cell structure of an active region of the SiC
MOSFET component sequentially comprises a drain
electrode, an n++ substrate, an n-drifting layer, two p-well
layers arranged in left and right symmetry, a p++ region, an n++ region and a source
electrode from bottom to top; the opposite side of the p-well layer is in an arc shape inclined upwards, secondary
epitaxy p-type
layers which incline toward the vertical central axis of the
primitive cell structure are arranged above the arc part of the p-well layer, an injected n layer is arranged between the two secondary
epitaxy p-type
layers, and an arch-shaped
gate oxide layer, an arch-shaped polycrystalline
silicone layer and an arch-shaped isolated
passivation layer are sequentially arranged above the secondary
epitaxy p-type layer and the injected n layer. The invention provides a making method of the SiC
MOSFET component of the slant channel. A
crystal face with
high electron mobility serves as the plane of the channel, the channel is formed in a high-quality secondary-epitaxy SiC surface, the quality of an MOS
grating can be effectively improved, the channel mobility can be effectively improved, and on-resistance of the component can be reduced.