Patents
Literature
Patsnap Copilot is an intelligent assistant for R&D personnel, combined with Patent DNA, to facilitate innovative research.
Patsnap Copilot

93results about How to "Reduced Miller Capacitance" patented technology

Trench-gate charge storage type IGBT and manufacturing method therefor

The invention discloses a trench-gate charge storage type IGBT and a manufacturing method therefor, and belongs to the technical field of semiconductor power devices. A trench-gate emitter structure connected with a P-type volume region is introduced to an N-type drift region at one side of a trench gate in a conventional CSTBT device, thereby enabling the gate-collector capacitance into gate-emitter capacitance, and improving the adverse effect of Miller capacitance. A thick dielectric layer of the trench-gate emitter structure avoids an electric field concentration effect at the bottom of atrench, and improves the breakdown voltage of a device. The depth of a gate electrode is enabled to be less than the junction depth of an N-type charge storage layer, thereby reducing the overall gatecapacitance under the condition that the connection of an IGBT is not affected, improving the switching speed of the device, reducing the switching loss of the device, and improving the compromise characteristics between a positive conduction voltage and the switching-off loss. According to the invention, the existing of the P-type volume region can reduce the extraction area of a hole, and improves the carrier concentration distribution of the whole N-type drift region. Moreover, the noise impact is reduced, and the EMI effect is avoided.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

A superjunction IGBT with a shielded gate and a manufacturing method thereof

The invention discloses a superjunction IGBT with a shield gate and a manufacturing method thereof. The superjunction IGBT comprises a semiconductor substrate, a cell region and a terminal protectionarea. The semiconductor substrate comprises a second conductivity type collector region, a first conductivity type field termination layer and at least one first conductivity type epitaxial layer. Thecell region comprises a plurality of cells connected in parallel with each other, which includes a plurality of cell trenches and a gate conductive polysilicon and a shield gate filled in the cell trenches, A seventh oxide layer is arranged on both sides and sidewalls of the notch of the cell trench opposite to the gate conductive polysilicon, a fifth oxide layer is arranged between the gate conductive polysilicon and the shield gate, and a fourth oxide layer is arranged on the bottom and sidewalls of the cell trench opposite to the shield gate. A P-pillar is also provided in the first conductivity type epitaxial layer, one end of the P-pillar is connected to the second conductivity type well layer, and the other end extends toward the first conductivity type field termination layer. Theinvention adopts the shielding gate structure, reduces the Miller capacitance, thereby reducing the switching loss.
Owner:无锡市乾野微纳科技有限公司

On-chip low dropout regulator with fast transient response function

The invention belongs to the technical field of power source management, and relates to an on-chip low dropout regulator with the fast transient response function. The on-chip low dropout regulator comprises an error amplifier, a power tube MP, a Miller capacitor CL, a first divider resistor and a second divider resistor, wherein the source electrode of the power tube MP is connected with input voltage VIN, and the drain electrode of the power tube MP is grounded after passing through a series structure of the first divider resistor and the second divider resistor; the negative input end of the error amplifier is connected with the reference voltage Vref, the positive input end of the error amplifier is connected with the series point of the first divider resistor and the second divider resistor, the output end is connected with the grid electrode of the power tube MP, and the Miller capacitor CL is connected between the drain electrode of the power tube MP and the ground; an error amplifier of an STCB structure is adopted, and a transient enhancing structure is inserted into the input stage of the error amplifier; a differentiator is connected between the grid electrode and the drain electrode of the power tube MP, and meanwhile a self-biasing structure is introduced into the LDO. Miller capacitance needed by loop compensation is substantially reduced while transient response speed is increased.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA +1

Transverse groove-type MOSFET device and preparation method thereof

The present invention provides a transverse groove-type MOSFET device, belonging to the technical field of semiconductor power devices. A polycrystalline silicon region or a Schottky contact metal region is formed at the circumference side of the gate structure to allow polycrystalline silicon region or the Schottky contact metal region and the drift region to form heterojunction or Schottky contact with rectification characteristics. Because the heterojunction or Schottky contact is multiple sub devices and is lower in conduction pressure drop compared to a traditional parasitic diode, the reverse recovery characteristic of the device can be optimized, and an excellent three-quadrant on-state performance is achieved; and compared to an external antiparallel diode mode, the size of the electrical power system can be significantly reduced, the package cost is reduced, interconnection lines are reduced, and the parasitic effect of the interconnection lines is reduced so as to improve thereliability of the system. Aiming at the problem that the device gate medium electric field is too high, the optimization is design to improve the long application reliability performance of the device. Besides, the preparation method of the device is simple and controllable and easy to achieve, and promotes the popularization of the semiconductor power device in the many actual applications.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Trench insulated gate bipolar transistor device and generating method thereof

The invention provides a trench insulated gate bipolar transistor device and a generating method thereof. A relatively thick gate oxide film is formed at the bottom of a trench region through a plasmafilm forming process. Due to the fact that the thickness of the gate oxide film at the bottom of a trench is increased, the consistency of the gate oxide thickness is guaranteed, the defect that a gate oxide layer at the bottom of the trench is easy to break down is eliminated, and the robustness of a gate oxide breakdown voltage is improved. Meanwhile, the area of a gate-drain capacitor is reduced, so that the Miller capacitance is reduced, the switch delay time is shortened, the switch dynamic loss of a device is reduced, and the switch characteristic of the device is improved. Meanwhile, the relatively thick gate oxide film is formed at the bottom of the trench, so that the upper surface of polycrystalline silicon subjected to back etching can be leveled and is slightly higher than thesurface of a silicon wafer of a N-type base region; and higher N+ emitter junction depth can be formed without increasing the injection energy of an N+ emitter and carrying out longer-time high-temperature trap pushing, so that the vertical overlapping area of the gate and the source is reduced, the gate-source capacitance is reduced, and the switch loss of an IGBT is reduced.
Owner:上海擎茂微电子科技有限公司

Bidirectional IGBT and manufacturing method therefor

The invention discloses a bidirectional IGBT and a manufacturing method therefor, and belongs to the technical field of power semiconductor devices. According to the invention, a split electrode whichis equipotential with a surface metal and a thick dielectric layer located at a peripheral side of the split electrode are introduced to a conventional trench gate structure, and a floating P-type body region is introduced to one side of a split trench gate structure, thereby achieving the symmetric forwarding and reverse on/off characteristics of an IGBT structure under the condition that a threshold voltage and connection of an IGBT device are not affected. The adverse effect caused by the Miller effect is improved, and the drive power consumption is reduced. The current and voltage oscillation and EMI problems are avoided in a start dynamic process of the device. The short-circuit safety working area of the device is improved. The gate capacitance is reduced, the switching speed of thedevice is improved, and the switching loss of the device is reduced. The concentration of an electric field at the bottom of a trench is improved, and the breakdown voltage of the device is improved.The carrier enhancement effect of an emitter electrode is improved, the carrier concentration distribution of the whole N-type drift region is improved, and the compromise between the forwarding conduction voltage drop and switching-off loss is improved.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Ring ion injection method, semiconductor device and manufacture method thereof

The invention provides a ring ion injection method which comprises the steps of: respectively carrying out ion injection on a source electrode and a drain electrode on a substrate, wherein an included angle of a drain electrode ion injection direction and a direction vertical to the surface of the substrate is more than that of a source electrode ion injection direction and the direction vertical to the surface of the substrate; and enabling a charge region of a drain electrode space to be compressed from a trench direction so that an overlapping area of the drain electrode and a grid electrode is compressed, thus a parasitic overlap capacitance between the drain electrode and the grid electrode of a semiconductor device is decreased, a Miller capacitance of a common-source amplifier is reduced, and the frequency response characteristic of the common-source amplifier is improved. In addition, though the charge region of the drain electrode space is compressed, a charge region of a source electrode space extends into a trench, the effective trench length of the semiconductor device is basically kept unchangeable, and other properties of the semiconductor device can be maintained.
Owner:SHANGHAI HUALI MICROELECTRONICS CORP
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products