The application provides a trench power device with a back
source structure and a preparation method thereof. The preparation method comprises the following steps: forming a P-type
body region and an N-type drift region on a
surface layer of an N-type substrate; forming a trench, wherein the trench extends from the P-type
body region to the N-type substrate; forming a
gate dielectric layer on a surface of the trench, and filling a gate layer in the trench; forming an
isolation layer, and forming a drain through hole in the
isolation layer; performing N-type
ion implantation on the drain through hole to form an N-type drain region in the N-type drift region; forming a drain
electrode;
etching a back surface of the N-type substrate to form a source through hole, wherein the source through hole exposes the P-type
body region; and depositing a source
electrode on the back surface of the N-type substrate and in the source through hole, wherein the source
electrode is connected with the N-type substrate and the P-type body region. The drain electrode and the gate electrode are integrated on the front surface of the device, the
trench gate structure is adopted to improve the
unit density and the channel control ability, and the source electrode is connected with the P-type body region through the back surface deep groove contact, so that the source
contact resistance is effectively reduced, and the heat dissipation capacity is improved.