The invention belongs to the technical field of power semiconductors, and relates to a 1200V SiC trench-type
MOSFET (
Metal-
Oxide-
Semiconductor Field Effect Transistor) integrated with a super junction and shield gate technology, which comprises an N + substrate layer, a drift region positioned above the N + substrate layer, and a
trench gate structure and a
source structure positioned above the drift region, compared with a conventional SiC trench type
MOSFET with a P-type shielding layer, the SiC trench type
MOSFET with the P-type shielding layer has the advantages that the peak
electric field of the
gate oxide layer is reduced, and the reliability of the device is ensured; the drift region adopts a super-junction structure, so that the
electric field distribution is optimized, the blocking capability of the device is improved, the high
doping concentration of the drift region can be adopted while the high
breakdown voltage is maintained, the specific on-resistance of the device is remarkably reduced, and the
conduction loss of the device is reduced; a shield gate structure is adopted, and the overlapping area of the gate and the drain is reduced, so that the gate-drain
capacitance and the gate-drain charge are reduced, the switching speed of the device is improved, and the dynamic loss of the device is reduced. The performance is excellent in the high-
voltage and high-frequency field.