Graphene-based array type flexible pressure distribution sensor and preparation method thereof

A pressure distribution and graphene technology, which is applied to the measurement of properties and forces of piezoelectric resistance materials, can solve the problems of limited use range of pressure sensors, and achieve the effect of improving the use range, long service life and high detection accuracy.

Active Publication Date: 2012-07-11
中科芯未来微电子科技成都有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In the patent US8044472, this principle is used to make a pressure sensor using graphene, but the scope of use of the pressure sensor is limited

Method used

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  • Graphene-based array type flexible pressure distribution sensor and preparation method thereof
  • Graphene-based array type flexible pressure distribution sensor and preparation method thereof
  • Graphene-based array type flexible pressure distribution sensor and preparation method thereof

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Embodiment Construction

[0037] The present invention will be further described below in conjunction with specific drawings and embodiments.

[0038] like figure 1 and Figure 11 Shown: the graphene-based array flexible pressure distribution sensor includes a flexible substrate 100 and a graphene film array 301 located on the flexible substrate 100, and the graphene film array 301 includes at least one graphene conductive body 310, the graphene conductor 310 is electrically connected to the row electrode 210 and the column electrode 220 on the flexible substrate 100; the graphene film array 301 is obtained by the graphene film 300 by electron beam etching, and forms a number of mutually independent Graphene conductor 310. in, figure 1 shows a structure in which a single graphene conductor 310 is set on the flexible substrate 1, that is, there is only one graphene conductor 310 in the graphene film array 301, Figure 11 shows a structure in which several graphene conductors 310 are disposed on a fl...

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Abstract

The invention relates to a graphene-based array type flexible pressure distribution sensor. The sensor comprises a flexible substrate; a graphene film array is arranged on the flexible substrate; the graphene film array comprises at least one graphene conductor; and the graphene conductor is electrically connected with a row electrode and a column electrode on the flexible substrate. The graphene film array is arranged on the flexible substrate, the graphene conductor in the graphene film array is electrically connected with the row electrode and the column electrode, and corresponding detection information such as change of the voltage can be output through the row electrode or the column electrode when the graphene conductor is deformed by pressure, so the sensor has high detection precision; the sensor has long service life; the made sensor is light and thin; the sensor is applied in the field of pressure distribution measurement of tooth engaging pressure distribution, sole pressure distribution, tyre pressure distribution and the like; and the using range of the sensor is enlarged, and the sensor is safe and reliable.

Description

technical field [0001] The present invention relates to a distribution sensor and a preparation method thereof, in particular to a graphene-based array flexible pressure distribution sensor, specifically for measuring pressure distributions such as teeth occlusal pressure distribution, plantar pressure distribution, tire pressure distribution, etc. The sensor and its preparation belong to the technical field of array pressure distribution sensors. Background technique [0002] Graphene is a two-dimensional crystal structure composed of a single layer of carbon atoms with a honeycomb hexagon. It has a special energy band structure, has a Hall quantum effect that can be observed at room temperature, and has good conductivity. Ideal In this case, the resistance of one square meter of graphene is only 31Ω. Graphene has high tensile strength, the ideal strength is 110-130MPa. Single-layer graphene is very thin, with a thickness of less than 0.335nm. The light transmission is g...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/18
Inventor 王雯王慰康威胡庆庆武斌
Owner 中科芯未来微电子科技成都有限公司
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