A method of 
semiconductor manufacturing is disclosed in which 
doping is accomplished by the implantation of 
ion beams formed from ionized molecules, and more particularly to a method in which molecular and cluster 
dopant ions are implanted into a substrate with and without a co-
implant of non-
dopant cluster 
ion, such as a carbon cluster 
ion, wherein the 
dopant ion is implanted into the amorphous layer created by the co-
implant in order to reduce defects in the crystalline structure, thus reducing the leakage current and improving performance of the 
semiconductor junctions. 
Dopant ion compounds of the form AnHx+ and AnRzHx+ are used in order to minimize 
crystal defects as a result of 
ion implantation. These compounds include co-implants of carbon clusters with implants of 
monomer or cluster dopants or simply implanting cluster dopants. In particular, the invention described herein consists of a method of implanting 
semiconductor wafers implanting semiconductor wafers with carbon clusters followed by implants of 
boron, 
phosphorus, or 
arsenic, or followed with implants of dopant clusters of 
boron, 
phosphorus, or 
arsenic. The 
molecular cluster ions have the chemical form AnHx+ or AnRzHx+, where A designates the dopant or the carbon atoms, n and x are integers with n greater than or equal to 4, and x greater than or equal to 0, and R is a molecule which contains atoms which, when implanted, are not injurious to the implantation process (for example, Si, Ge, F, H or C). These ions are produced from chemical compounds of the form AbLzHm, where the 
chemical formula of Lz contains R, and b may be a different integer from n and m may be an integer different from x and z is an integer greater than or equal to zero.