The invention relates to an SOI-based MIS p-GaN HEMT half-bridge
integrated circuit and a preparation method thereof. The SOI-based MIS p-GaN HEMT half-bridge
integrated circuit comprises an
SOI substrate, an AlN layer, a GaN layer, an AlGaN layer, a p-GaN layer and a second insulating
dielectric layer which are sequentially arranged from bottom to top. The
SOI substrate comprises substrate
silicon, a first insulating medium layer and top
silicon;
etching the p-GaN layer and the second insulating
dielectric layer, growing a third insulating
dielectric layer, and preparing a grid
electrode; source
electrode metal and drain
electrode metal respectively grow on two sides of the grid electrode; field plate
metal grows above the source electrode metal and the grid electrode metal and is filled with a fourth insulating
dielectric layer; a deep groove is formed in the middle of the circuit and penetrates through the fourth insulating medium layer, the third insulating medium layer, the AlGaN layer, the GaN layer, the AlN layer, the top
silicon layer and the filling insulating medium. Filling the top with a fifth insulating
dielectric layer; and obtaining a half-bridge
integrated circuit through a top through hole and an
interconnection process. According to the invention, the parasitic effect can be reduced, and leakage current and switching loss are reduced.