The invention relates to a directional purification method and equipment for
titanium tetrachloride in the field of preparation and purification of
integrated circuit raw materials, the directional purification equipment comprises an oxidation device, the oxidation device comprises an oxidation kettle, a pure
copper part and a spraying device, the pure
copper part and the spraying device are contained in the oxidation kettle, and the spraying device is suspended above the pure
copper part; a feeding hole connected with the spraying device is formed in the oxidation kettle, and a first heating device for heating the pure copper workpiece is arranged on the oxidation kettle; the rectifying
system comprises a rectifying still, a rectifying
tower connected to the top of the rectifying still and a second heating device used for heating the rectifying still, a material pressing opening and an
inert gas opening are formed in the rectifying still, and a
tower top condensation structure is formed at the top of the rectifying
tower; a plurality of tower plates are arranged in the rectifying tower at intervals along the height direction of the rectifying tower. According to the directional purification method and equipment, the purification difficulty of the
titanium tetrachloride can be effectively reduced, the production cost is reduced, and the purity of the
titanium tetrachloride is effectively improved.