The invention discloses a purification process of high-purity
titanium tetrachloride, which comprises the following steps: pressurizing a
raw material by a pump, filtering, feeding into a rectifying
tower I, separating low-boiling-point substances, and feeding a
liquid phase into a rectifying
tower II; high-boiling residues at the bottom of the rectifying
tower II are removed from a residual
liquid tank, a tower top
gas phase part supplies heat to a rectifying tower I
reboiler, a residual
gas phase enters a first-stage adsorption column and a second-stage adsorption column after passing through a
superheater, and a condensed
liquid phase enters a rectifying tower III after passing through a third-stage adsorption column; discharging low-boiling-point substances at the top of the rectifying tower III, feeding a
liquid phase part into a rectifying tower IV, supplying heat to a
reboiler of the rectifying tower III by a
gas phase of the tower IV, and feeding high-boiling-point substances at the bottom into a residual
liquid tank; the other part of the liquid phase in the third rectifying tower enters a product
evaporation tower, and the electronic-grade high-purity TiCl4 is obtained through a finished product filter after tower top condensation. According to the process, multi-tower rectification and three-stage adsorption are combined, cyclic utilization of
heat energy is achieved through the
differential pressure coupling technology, and the process has the advantages of being low in
energy consumption, high in purity and stable in operation and is suitable for industrial production of electronic-grade
titanium tetrachloride.