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Method for measuring plasma electron density by fiber spectrum synergizing discharge current

A technology of discharge plasma and discharge current, applied in the field of ion plasma diagnosis, to achieve the effect of reducing deviation, increasing flexibility and expanding the scope of application

Inactive Publication Date: 2009-10-28
DALIAN MARITIME UNIVERSITY
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The technical problem to be solved by the present invention is to overcome the defects and deficiencies of the existing optical emission spectrometry in diagnosing plasma electron density, and provide a method for measuring plasma electron density with optical fiber spectrum coordinated discharge current

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  • Method for measuring plasma electron density by fiber spectrum synergizing discharge current
  • Method for measuring plasma electron density by fiber spectrum synergizing discharge current
  • Method for measuring plasma electron density by fiber spectrum synergizing discharge current

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Embodiment Construction

[0023] The specific implementation of the present invention will be described in detail below in combination with the technical scheme and accompanying drawings, taking the measurement of the electron density of neon gas glow discharge plasma as an example.

[0024] The structure of the optical fiber spectrum coordinated discharge current measuring plasma electron density device of the present invention is as shown in the accompanying drawing, comprises optical fiber probe 1; Conductive optical fiber 2; Miniature optical fiber spectrometer 3; Computer data processing system 4; Current sensor 5; Current signal amplifier 6; data collector 7. When the discharge plasma generation system 8 is activated, the optical signal emitted by the plasma to be measured is collected by the fiber probe 1 and enters the miniature fiber optic spectrometer 3 through the conducting fiber 2 . In the miniature fiber optic spectrometer 3 , the optical signal is converted into an electrical signal char...

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Abstract

The invention relates to a method for measuring plasma electron density by fiber spectrum synergizing discharge current, and belongs to the technical field of discharge plasma diagnosis. The method is technically characterized by comprising the following steps: using a micro fiber spectrum measuring path and a discharge current measuring circuit at the same time to acquire real-time parameters of optical radiation spectrum of discharge plasma and discharge current, comprehensively analyzing the parameters through a computer data processing system, and calculating the electron density of the plasma. The micro fiber spectrum measuring path consists of a fiber probe, a conducting fiber and a micro fiber spectrometer, which are connected in turn; the discharge current measuring circuit consists of a current sensor, a current signal amplifier and a data acquisition device, which are connected in turn; and the computer data processing system calculates the electron density of the discharge plasma by using the acquired data according to the gas molecule motion theory. The method has the advantage that the application range of the discharge plasma electron density diagnosed by optical emission spectrometry is expanded to an imbalance state from a local thermal balance state.

Description

technical field [0001] The invention belongs to the technical field of discharge plasma diagnosis, and relates to a method for real-time, in-situ, and non-disturbance diagnosis of plasma electron density, in particular to a method for measuring plasma electron density with optical fiber spectrum cooperative discharge current. Background technique [0002] The generation and maintenance of discharge plasma is an important basis for the current high-tech industry and scientific and technological research. It has been deeply studied and widely used in many fields such as cutting-edge electronic device manufacturing, energy, environmental protection, plasma metallurgy, and national defense. Science and engineering with global impact. The progress of discharge plasma research and engineering applications depends on the control of plasma physical processes and processes, and the premise of control must be guaranteed by reliable detection technology, especially real-time, in-situ, ...

Claims

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Application Information

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IPC IPC(8): G01J3/28G01R19/00G01J3/02
Inventor 张芝涛赵建森俞哲殷燕张钰博
Owner DALIAN MARITIME UNIVERSITY
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