The invention discloses an
optical computing chip with a vertical micromirror structure and a
wafer-level intelligent manufacturing method thereof, the
optical computing chip comprises a plurality of optical modulators and a plurality of
quantum logic gates, and interference optical paths in the optical modulators are set based on a vertical micromirror, so that optical modulation is realized; the
quantum logic gate constructs a stable light path through a reflecting mirror arranged vertical to the micro-mirror, interference is realized by using a
beam splitter, and
Hadamard transform is executed by a wave plate at an inlet or an outlet of a target light path, so that light calculation is realized; a deep groove
beam splitter or a deep wall
beam splitter is adopted as a beam splitter, a
silicon wall in the deep wall beam splitter is arranged to be perpendicular to two side walls of a substrate to form a preset included angle, and the deep groove beam splitter is manufactured by the following steps: photoetching a pattern of a deep groove on the surface of a
monocrystalline silicon wafer;
etching a deep groove with a preset angle by using a deep
etching method, and
smoothing the side wall; depositing an
optical thin film in the deep groove; photoetching and deeply
etching the shape of the deep groove beam splitter, wherein the side wall of the deep groove beam splitter is smooth; and growing an optical antireflection film on the vertical side wall.