Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

A surface topography measuring device with continuously variable magnification

A technology of surface topography measurement and zoom group, applied in the direction of measurement device, optical device, instrument, etc., can solve the problem of discontinuous change of magnification, and achieve the effect of not easily losing the target

Active Publication Date: 2019-02-01
长川科技(苏州)有限公司
View PDF4 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If there are different magnification requirements for the field of view during measurement, the objective lens needs to be replaced to achieve the purpose of variable magnification, and the change of magnification is discontinuous

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A surface topography measuring device with continuously variable magnification
  • A surface topography measuring device with continuously variable magnification
  • A surface topography measuring device with continuously variable magnification

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0013] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0014] Such as figure 1 Shown is a schematic diagram of the structure of the device, including a light source 1, a light collecting mirror system 2, a beam splitting prism 3, an interference objective lens 4, a zoom optical system 6, an imaging optical system 7, an area array CCD camera 8, a micro-movement device 9, a carrier Object table 10 etc. The collecting mirror system 2 and the interference objective lens 4 form an epi-ejection Kohler illumination optical path, forming a uniform light beam to illuminate the workpiece 5; The moving device 9 and the interference objective lens 4 are coaxially arranged in the direction of the reflected light path of the dichroic prism 3...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a surface morphology measuring device capable of continuous zooming. The device comprises a light source, a collecting lens system, a light splitting prism, an interference object lens, a zooming optical system, an imaging optical system, an area array CCD camera, a micro movement device and an objective table, emergent type of the light collecting system is orientated to the light splitting prism, reflection light of the light splitting prism is orientated to the interference object lens, the zooming optical system is arranged coaxially between the light splitting lens and the imaging optical system, and an interference optical path is integrated and connected with an illumination optical path of the light splitting prism. The zooming optical system is a continuous zooming optical system, and comprises a compensation set, a zooming set and a fixed set. Aimed at requirements of different amplification multiplying power, it is only required to adjust the amplification multiplying power M of the zooming optical system instead of replacing the object lens to zooming in / out the view field of measurement, and the amplification multiple can be adjusted continuously. The device is suitable for realizing the surface morphology measurement in the phase difference interferometry or the vertical white light interferometry.

Description

technical field [0001] The invention relates to the technical field of surface topography measurement, in particular to a surface topography measurement device capable of continuously variable magnification. Background technique [0002] In recent years, with the continuous progress and development of precision manufacturing technology, especially in the fields of semiconductor nano-process technology, micro-electro-mechanical systems, nano-composite materials, and ultra-precision machining, non-destructive methods such as optical interference and their devices are used to measure objects The technique of three-dimensional surface topography has been increasingly widely used. Interference microscopy technology is the product of the combination of optical interference technology and microscopic technology. By adding a microscopic magnification system to the interference system, the lateral resolution of the interferogram can be improved, so that it can complete the three-dime...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 夏勇周伟
Owner 长川科技(苏州)有限公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com