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White light interferometry-based test system and test method therefor

A technology of white light interferometry and test system, which is applied in the field of test systems based on white light interferometry, can solve problems such as the influence of measurement results, and achieve the effects of small noise and dispersion, high measurement efficiency, and improved measurement accuracy

Inactive Publication Date: 2016-10-12
CHINA JILIANG UNIV +1
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Problems solved by technology

Since the coherence peaks represent the relative height of the test surface, any positioning error of the coherence peak will affect the measurement results

Method used

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  • White light interferometry-based test system and test method therefor
  • White light interferometry-based test system and test method therefor
  • White light interferometry-based test system and test method therefor

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Embodiment Construction

[0015] According to attached figure 1 and 2 The structure of the test system based on white light interferometry in the present invention includes a microscopic optical system 2, a digital CCD camera 3, an image acquisition card 4, an interference system 5, a piezoelectric ceramic 7, and a piezoelectric ceramic controller connected to the piezoelectric ceramic 7 9. The air-floating platform 8, the white light halogen light source 1 and the PC 10 that provide the light source to the micro-optical system 2; the piezoelectric ceramic 7 is arranged on the air-floating platform 8; the micro-optic system 2 consists of tube A tube lens is added in front of the microscope objective lens. The tube lens is composed of two convex lenses. There is a parallel optical path between the two convex lenses. Different types of Optical components, such as polarizers, filters, etc., are used to filter out stray light. The light passing through the tube lens passes through the diaphragm and the mi...

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Abstract

The present invention is a test system and test method based on white light interferometry, characterized in that the test system includes a microscopic optical system, a digital CCD camera, an image acquisition card, an interference system, piezoelectric ceramics, piezoelectric ceramics Controller, air floating platform, white light halogen light source and PC. The test method of the present invention controls the piezoelectric ceramics to drive the sample to be tested to scan vertically through the PC to operate the piezoelectric ceramic controller, so that the interference fringes are swept across the measured area, and the image collected is recorded by a digital CCD camera; After the image is filtered, the white light interference signal of a single pixel is extracted, the background light intensity value of the white light interference fringes obtained is subtracted, the light intensity of each pixel is converted from the time domain to the frequency domain, and decomposed in the frequency domain to obtain the wave number and The phase relationship; the position of zero optical path difference is obtained by integrating the wavenumber and phase information in the frequency domain of the interference signal, and the extraction of surface height information is realized.

Description

technical field [0001] The invention relates to a microstructure appearance testing system and a testing method thereof, and in particular discloses a white light interferometry-based testing system and a testing method thereof, which are applied to non-contact measurement of three-dimensional microstructure topography. Background technique [0002] With the rapid development of ultra-precision processing technology and various micro-devices such as MEMS (Micro-Electro-Mechanical System) and NEMS (Nano-Electro-Mechanical System), the structural feature size of related processing devices is getting smaller, the complexity is getting higher, and the size span is getting bigger and bigger. The larger the size, the higher the requirements for measurement and characterization. Ultra-precision measurement not only includes the measurement of longitudinal height information dimensions, transverse line spacing, structural period and other dimensions, but also has very important meas...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 邵杨锋魏佳斯李源蔡潇雨雷李华傅云霞李东升
Owner CHINA JILIANG UNIV
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