Method and device for detecting uniformity of optical glass based on white light interferometry

A technology of optical glass and white light interference, which is applied in the field of optical interferometry, can solve the problems of high manufacturing cost and high cost, and achieve the effect of reducing test cost, low environmental requirements, and reducing interference

Active Publication Date: 2013-12-18
NANJING UNIV OF SCI & TECH
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Problems solved by technology

This method requires the use of a high-precision reference mirror to assist measurement, especially when measuring large-diameter optical glass, a large-diameter interferometer equipped with a large-diameter reference mirror must be used, and the manufacturing cost of a large-diameter interferometer is very high, resulting in the cost of this measurement method. too high

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  • Method and device for detecting uniformity of optical glass based on white light interferometry
  • Method and device for detecting uniformity of optical glass based on white light interferometry
  • Method and device for detecting uniformity of optical glass based on white light interferometry

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Embodiment 1

[0039] The present invention combines white light interferometry and displacement sensor measurement method for scanning detection figure 1 The method for the homogeneity of the glass plate, comprising the steps of:

[0040] Step 1: First calibrate the white light interferometer. Each instrument according to figure 2 After being installed and adjusted in place as shown, a monochromatic LED is used as the light source of the interferometer, and its wavelength is λ, at figure 2 Put a standard compensation mirror into the position of the measured glass plate for calibration; Figure 5 As shown, adjust the front and rear positions of the standard compensation mirror and the first compensation mirror 4 in the optical path, so that the reflected light r 1 with r 2 ' / r 3 ’, r 2 with r 1 ' / r 2 ' / r 3 ’, r 3 with r 1 ' / r 2 ' / r 3 ’ the optical path difference is not zero, then r 1 with r 2 ' / r 3 ’, r 2 with r 1 ' / r 2 ' / r 3 ’, r 3 with r 1 ' / r 2 ' / r 3 ’ will not ...

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Abstract

The invention discloses a method and device for detecting uniformity of optical glass based on white light interferometry. The device comprises a white light interferometer and two double-frequency laser feedback displacement measurement systems, and the two double-frequency laser feedback displacement measurement systems and the white light interferometer are in a linkage structure and are combined into an integral structure for performing mobile scanning. The detection method comprises the following steps: calibrating the white light interferometer, and obtaining a proportionality coefficient between the optical path difference and fringe offset; acquiring the introduced optical path difference variation of the optical glass to be detected, and measuring the thickness deviation of the to-be-detected optical glass at the same detected position by using the displacement measurement systems; determining the refractive index deviation of the optical glass to be detected according to the optical path difference obtained by the white light interferometer and the thickness deviation obtained by the displacement measurement systems; scanning the whole optical glass to be detected, and finishing detection of the uniformity of the optical glass to be detected. The method and device for detecting the uniformity of the optical glass are high in precision and low in cost, and the testing process is simple and convenient.

Description

technical field [0001] The invention belongs to the technical field of light interference measurement, in particular to a method and device for detecting the uniformity of optical glass based on white light interference. Background technique [0002] The uniformity of optical glass refers to the inconsistency of the refractive index inside the material, which can affect the imaging quality of the optical system and is one of the important indicators to measure the quality of optical glass processing. At present, the interferometer is mainly used to measure the uniformity of optical glass. The difference is that the means of eliminating the surface error of optical glass are different: [0003] One method is to improve the measurement accuracy by using the mounting board. A pair of high-precision parallel flat plates are used as the mounting plates, and the refractive index liquid is pasted on both sides of the measured optical glass to eliminate the influence of the measure...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/45
Inventor 陈磊李金鹏陈悦宋倩宋乐周舒
Owner NANJING UNIV OF SCI & TECH
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