White light interference three-dimensional reconstruction method applicable to surface topography detection

A technology of white light interference and surface topography, applied in the field of white light interference 3D reconstruction, can solve problems such as poor robustness and deviation of measurement results, and achieve good robustness and accurate and stable 3D reconstruction results

Active Publication Date: 2018-11-06
BEIHANG UNIV
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Problems solved by technology

However, in actual testing, errors will be introduced due to mechanical vibration, wavelength drift of the light source, linearity error of the phase shifter, and environmental interfe

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  • White light interference three-dimensional reconstruction method applicable to surface topography detection
  • White light interference three-dimensional reconstruction method applicable to surface topography detection
  • White light interference three-dimensional reconstruction method applicable to surface topography detection

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Embodiment Construction

[0018] The present invention will be further described in detail with reference to the accompanying drawings and embodiments.

[0019] Such as figure 1 Shown is the schematic diagram of the principle of the white light interferometry system. The light source is shaped by the Kohler illumination system and then divided into two beams of light through the beam splitter. reference light. The two beams of light are merged at the focal plane of the camera by the beam splitter and interfered. The unidirectional movement of the phase shifter drives the interference fringes across the entire image. Cameras record and store images as raw data. The height value of each point is obtained through the calculation method, so as to complete the three-dimensional reconstruction of the entire surface.

[0020] The key of the method is to accurately find the position of zero optical path difference, that is, the position of zero optical path difference with the maximum light intensity value...

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Abstract

The invention discloses a white light interference three-dimensional reconstruction method applicable to surface topography detection, which mainly comprises intensity information and phase information, wherein the intensity information is obtained by quickly generating an envelope curve corresponding to an interference curve through a Guassian function, function fitting is performed on the envelope curve, and the position of a peak value of a continuous function is the zero optical path difference position; and the phase information is calculated based on a Carre algorithm. The results are combined to obtain height information, and the three-dimensional topography is reconstructed. The white light interference three-dimensional reconstruction method is applicable to surface topography measurement for various samples. The solved zero optical path difference position is the maximum value of the continuous function, more accurate than the maximum value of discrete sampling points and notsubject to sampling frequency fluctuations of a phase shifter. The white light interference three-dimensional reconstruction method reduces requirements for the test environment, still can obtain anaccurate test result under external interference such as vibration, central wavelength fluctuations of a light source, camera noise and low surface reflection coefficient of a tested sample, and is greatly improved in robustness.

Description

technical field [0001] The invention relates to a white light interference three-dimensional reconstruction method suitable for surface topography detection, belonging to the technical field of surface topography measurement. Background technique [0002] Surface refers to the curved surface formed by machining, surface treatment and other processes, which directly affects its functional characteristics and use, such as friction and wear, corrosion resistance, electrical conductivity, thermal conductivity, etc., and is also an important aspect of evaluating processing technology. Surface topography measurement is an important link in the quality characterization of manufactured products and a prerequisite for quality control and reliable function assurance. With the development of scientific research and advanced manufacturing technology, the surface morphology and structure of products are becoming more and more diversified, from traditional engineering surfaces to more and...

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Application Information

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IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 张春熹李豪伟李慧鹏宋凝芳
Owner BEIHANG UNIV
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