White light microscopic interferometry system and method capable of acquiring spectral information

A technology of spectral information and microscopic interference, which is applied in the direction of color/spectral characteristic measurement, measuring device, phase influence characteristic measurement, etc., can solve the problem that the spectral information and surface microscopic shape of the measured sample cannot be obtained at the same time, and achieve Save experimental steps and time, the structural design is simple and ingenious, and the effect is easy to achieve

Inactive Publication Date: 2019-05-21
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] There are measurement systems with high precision in the fields of surface microscopic topography measurement and spectral measurement, but in the existing measurement system, it is impossible to simultaneously obtain the spectral information of the measured sample and the surface microscopic topography

Method used

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  • White light microscopic interferometry system and method capable of acquiring spectral information
  • White light microscopic interferometry system and method capable of acquiring spectral information
  • White light microscopic interferometry system and method capable of acquiring spectral information

Examples

Experimental program
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Effect test

Embodiment 1

[0046] A white light micro-interferometry system that can obtain spectral information, such as figure 1 As shown, it includes a wide-spectrum light source 1, a first beam splitter 3, a first microscopic objective lens 4, a second beam splitter 8, a second microscopic objective lens 9, a first CCD detector 7 and a spectral detection module 12;

[0047] The wide-spectrum light source 1 is collimated by a collimator lens 2 into parallel light and then vertically incident on the first beam splitter 3, where it is divided into transmitted light T1 and reflected light F1, and the reflected light F1 is focused on the reference plane by the first microscopic objective lens 4 5, the reference light is obtained after being reflected by the reference plane 5, and the reference light is irradiated on the first beam splitter 3 through the first microscope objective lens 4 along the optical axis direction, and the transmitted light T1 is divided into the transmitted light by the second beam ...

Embodiment 2

[0050] A white light microscopic interferometry system capable of obtaining spectral information, its structure is as shown in Embodiment 1, the difference is that the spectral detection module 12 includes a third beam splitter 14, a moving mirror 15, a fixed mirror 16, a second CCD detector 17 and PC terminal 13;

[0051] The reflected light F2 is divided into the transmitted light T3 and the reflected light F3 through the third beam splitter 14, the transmitted light T3 is reflected by the fixed mirror 16, the reflected light F3 is reflected by the moving mirror 15, and the two beams of light interfere on the third beam splitter 14 The generated interference light is received by the second CCD detector 17 through the second focusing lens 62 , and then processed and recorded by the PC terminal 13 . The second CCD detector 17 in the spectral detection module 12 is connected to the PC terminal 13, and the obtained interference pattern detected by the second CCD detector 17 firs...

Embodiment 3

[0053] A white light microscopic interferometry system that can obtain spectral information, its structure is as shown in Embodiment 1, the difference is that the reflection surface of the second beam splitter 8 and the direction of the test light reflected back from the plane 10 to be measured At an included angle of 45° clockwise, the test light containing the sample plane information is introduced into the spectrum measurement module to detect the spectrum signal;

[0054] The reflective surfaces of the first beam splitter 3 and the third beam splitter 14 form an included angle of 45° counterclockwise with the direction of the respective incident light, and divide the incident light beam into transmitted light and reflected light.

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Abstract

The invention, belonging to the field of precision measurement, relates to a white light microscopic interferometry system and method capable of acquiring spectral information. The system comprises awide spectrum light source, a first beam splitter, a first microscope objective, a second beam splitter, a second microscope objective, a first CCD detector and a spectrum detecting module. Light emitted by the light source is split into reflected light and transmitted light by the beam splitters; the split light passes through a reference optical path and a test optical path; after the interfering on the beam splitters, the processed light is received by the CCD detector to obtain a surface microstructure of a to-be-tested plane; and the beam splitters are added into the test optical path, areflection optical signal containing the spectral information of the to-be-tested plane is introduced into the spectrum detection module to obtain an interference pattern, and Fourier transform calculation is carried out by a PC terminal to obtain spectral information. The employed ideal is novel; and the surface topography detection technology is combined with the Fourier transform spectroscopy principle, so that the surface stereoscopic shape and spectral information of the sample can be obtained simultaneously. Therefore, the multi-element measurement of the object is realized; and the experimental steps and time are saved.

Description

technical field [0001] The invention relates to a white light micro-interference measurement system and method capable of obtaining spectral information, belonging to the technical field of precision measurement. Background technique [0002] With the continuous development of the information age and the continuous update and progress of ultra-precision manufacturing technology, micro-nano technology has become one of the most important development directions of modern science and technology, and is a representative of cutting-edge technology. Various micro-nano devices have important applications in many fields such as extreme equipment manufacturing, biomedicine, aerospace, quantum communication, etc. [0003] There are many measurement methods for surface microscopic topography. As a traditional measurement method, the contact measurement method is easy to scratch the surface. It is often not suitable for surfaces with high precision requirements. The non-contact measurem...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/27G01N21/45G01N21/25G01B11/24
Inventor 刘兆军辛磊杨忠明刘振华
Owner SHANDONG UNIV
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