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Large-length laser interferometer measurement system for eliminating Abbe error

A technology of laser interference and Abbe error, applied in the field of metrology and testing, can solve the problem of not all satisfying Abbe principle, and achieve the effect of low cost, improved accuracy and strong operability

Active Publication Date: 2014-12-17
NAT INST OF METROLOGY CHINA
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Problems solved by technology

[0012] The high-precision and long-length laser interferometry system needs to realize multi-functional measurement and meet the measurement requirements of different types of long-length line measuring tools and instruments, but cannot all meet the Abbe principle. The measurement uncertainty is limited to 5×10 -7 the magnitude of

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  • Large-length laser interferometer measurement system for eliminating Abbe error
  • Large-length laser interferometer measurement system for eliminating Abbe error
  • Large-length laser interferometer measurement system for eliminating Abbe error

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Embodiment Construction

[0039] The specific implementation manner of the present invention will be further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0040] Such as Figure 4It is a schematic diagram of the spatial position of each component of the large-length laser interferometry system for eliminating Abbe error in the present invention, including 3 laser interferometers 1 and 3 laser interferometers can be arranged in any triangle form, and the measured instrument 6 is arranged in the Any position within the triangle area. Such as Figure 5 It is a schematic diagram of the optical path of each interferometer in the three independent laser interferometers of the large-length laser interferometry system for eliminating Abbe errors in the present invention, and a laser interferometer 1, a beam splitter mirror 2, and a fi...

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Abstract

The invention discloses a laser interferometer measurement system for eliminating Abbe error. The system comprises three independent laser interference length measuring systems and a high-precision long guide rail. With the use of the three independent laser interference length measuring systems which are placed in an arbitrary triangle, equivalent measuring optical paths with a starting point at any position of an the initial plane are constructed. Meanwhile, with the three independent laser interference length measuring systems having the same optical path with a device under test, measurement uncertainty caused by the fact that an Abbe principle is not met. The laser interferometer measurement system for eliminating Abbe error has the advantages of being simple in technical principles, low in costs, strong in operability and capable of improving accuracy of the large-length laser interferometer measurement system.

Description

technical field [0001] The invention relates to the technical field of testing and measurement, in particular to a one-dimensional, multi-functional, large-length laser interferometry system with a measuring range of several meters or tens of meters and eliminating the Abbe error. Background technique [0002] The development of laser tracking, laser scanning, radar scanning and computer technology has continuously improved geometric measurement technology, and precision measurement technology has continued to develop from conventional dimensions to macroscopic dimensions; due to the development needs of large-scale manufacturing industries, the requirements for large-scale manufacturing industries Measurement puts forward higher requirements and provides a broad market demand for the application of various large-scale measurement systems with different principles. [0003] At the same time, the precision requirements for the traceability measurement devices of large-scale m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02
Inventor 李建双赫明钊缪东晶李连福邓向瑞汪涛
Owner NAT INST OF METROLOGY CHINA
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