The invention belongs to the technical field of precision machining and testing, and discloses a high-precision probe device used for linearity error measurement. The device comprises a guide seat, amicro-displacement lever transmission system, a slide block system, a slide block driving system, a side pressure plate, an upper pressure plate, a cover plate, and a side baffle. According to the device, a polytetrafluoroethylene guide rail soft tape is adopted as a friction auxiliary material, and the motion stationarity of a slide block and a probe can be substantially improved in a lubricationstate; the position of a measuring point is located above an extending surface of a guide rail work surface so that the direction has no measuring Abbe error, and the measuring precision can reach the submicron magnitude; by employing a high-sensitivity crossed reed micro-displacement transmission lever, the micro-displacement acquired by a ball probe is transmitted to a high-precision inductionprobe in an equivalent manner, and the device is applicable to the measurement of high-precision linearity errors without direct adoption of an axial probe. The device is advantageous in that the structure is simple, the deformation is symmetric, the influence of the driving precision on the motion precision of the probe is small, measuring Abbe errors can be avoided, the measuring precision of linearity errors is high, and the application range is wide.