The utility model discloses an exhaust switching box, exhaust device and
electroplating equipment relates to the field of
semiconductor manufacturing technology. The exhaust switching box has the intercommunication cavity, two above
branch port and at least one confluence port, each
branch port and the exhaust outlet sealed
butt joint of the
electroplating unit adjacent to it, and the confluence port is arranged in any
cavity wall of intercommunication cavity, is used for leading out the
waste gas that converges, and different confluence ports are located in the same
cavity wall or different cavity walls of intercommunication cavity. Realize each
branch port can respectively with the exhaust outlet
butt joint of at least two
electroplating units, and utilize intercommunication cavity to make the
waste gas of multiple exhausts confluence to the confluence port concentrated
discharge, effectively realized the centralized collection and
discharge of multiple electroplating unit
waste gas, significantly reduced the number of independent exhaust pipeline in electroplating equipment, greatly optimized the pipeline
layout in compact space, saved the internal space of electroplating equipment, and improved the overall space utilization.