Micron-nano grade three-dimensional measurement '331' system and measurement method thereof

Abstract

The invention provides a micro-nano level 3-D measurement '331' system and a measurement method thereof. The system is characterized in that X, Y and Z-axis standard-measure dimension lines or extended lines thereof of the 3-D measurement system are arranged to be perpendicular to one another and intersect at one intersection point, so as to establish a 3-D coordinate system taking the intersection point as a coordinate origin; an X-axis guide-rail guide plane and a Y-axis guide-rail guide plane of a measurement platform in the measurement platform are arranged to be coplanar with a measurement plane where a measuring-head central point is, so as to form a coincidence plane; the intersection point of the X, Y and Z-axis standard-measure dimension lines or the extended lines thereof is on the coincidence plane of the measurement platform; meanwhile, the X and Y-axis standard-measure dimension lines or the extended lines thereof are also arranged to coincide with three planes, so as to ensure that X and Y coordinate planes of the established coordinate system coincide with the measurement plane; and the measuring-head central point is arranged to coincide with the intersection point of the three standard-measure dimension lines or the extended lines thereof. The invention satisfies the Abbe principle in 3-D direction, thereby effectively avoiding Abbe errors and guaranteeing high measurement precision.

Description

technical field [0001] The invention relates to the technical field of three-dimensional coordinate measurement at the micro-nano level, and more specifically relates to a three-dimensional measurement system and a measurement method at the micro-nano level. Background technique [0002] For measuring instruments, in addition to requiring the accuracy of the sensor, a reasonable layout of the instrument structure can enable the measuring instrument to obtain high measurement results under the condition of low machining accuracy, and reduce the requirements of the measurement system for the accuracy of the mechanical structure. [0003] For more than 100 years, the measurement system has followed Abbe's principle, that is, when the measured dimension line of the measured piece coincides with the standard measurement line of the measuring instrument or is on its extension line, the measurement error is the smallest, which does not meet the Abbe principle. The measurement error...

AI Technical Summary

Problems solved by technology

However, the real-time error correction method is more complicated than the static correction method. On the one hand, it requires a lot of high-precision sensors with real-time response; on the other hand, it also requires the dynamic response characteristics of the entire software system to be very good.

Obviously, this method is more costly

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