Manufacturing method of integral linear motion positioning system based on grating measuring technology

Abstract

The invention discloses a manufacturing method of an integral linear motion positioning system based on a grating measuring technology. The method comprises the following steps: manufacturing of grating lines on a linear motion component: grinding and polishing the surface of the linear motion component, and then making a grating line structure on the surface of the linear motion component; coating of a grating line protection film: coating the surfaces of the grating lines with a layer of SiO2 protective film; manufacturing of a compact reflective grating reading head: composing a photoelectric conversion part with an LED (Light-Emitting Diode) light source and a grating sensor, and then composing a complete compact reflective grating reading head by a subdivision circuit part; assembling the grating reading head. When the integral linear motion positioning system disclosed by the invention is applied to a numerically-controlled machine tool and a measuring instrument, complex debugging loops during installation of the grating can be omitted, an Abbe error can be avoided effectively, measuring uncertainty is lowered, and the positioning and measuring accuracy of equipment is increased; the method has a wide market prospect and a high popularization and application value.

Description

technical field [0001] The invention relates to the technical field of precision measurement, in particular to a preparation method of an integrated linear motion positioning system based on grating measurement technology. Background technique [0002] The precise positioning of equipment such as CNC machine tools, semiconductor equipment, and precision measuring instruments is an important guarantee for processing and measurement accuracy. At present, the most widely used linear motion positioning system is composed of linear motion components (such as U-shaped linear motors, linear guides) and measurement. Components (grating, magnetic grid, capacitive grid, etc.). The conventional linear motion positioning system adopts a separate installation method, that is, the linear motion components are first installed on the base of the equipment, and then the measuring components (grating, magnetic grid, capacitive grid, etc.) Mount the readhead on the motion unit of the linear m...

AI Technical Summary

Problems solved by technology

However, due to its separate installation method, its application range is limited

In addition, the anti-fouling and wear-resistant ability of the surface of the grating ruler is an important guarantee for the accuracy and durability of the secondary reading of the grating. At present, there is no grating with high light transmission, low reflectivity, wear resistance, acid and alkali resistance, and organic solvent resistance. ruler protective film

[0003] The existing linear motion positioning system does not have the advantages of integrating linear motion guidance, support and high-precision displacement measurement

Images