Traceability Calibration Device and Traceability Method for Elastic Constant of Microcantilever Beam

Abstract

The invention provides a source tracing calibrating device for a micro cantilever beam elastic constant. The source tracing calibrating device structurally comprises a marble frame, a nanometer balance, a micro cantilever beam, a three-dimensional micro-nano displacement platform, a force loading rod, a polarization difference interferometer, an instrument controller, a computer and measuring and controlling software. The invention meanwhile provides a source tracing method of the source tracing calibrating device for the micro cantilever beam elastic constant. The source tracing calibrating device and source tracing method have the advantages that an elastic constant value can be directly traced to the international system of unit SI when the device is used, micro light spots, formed on the upper surface of the free end of the micro cantilever beam, of measuring light beams of the polarization difference interferometer completely coincide with force loading points when the lower surface of the free end of the micro cantilever beam is loaded by the force loading rod on the nanometer balance through the device, so that the Abbe arm is zero, the Abbe principle of displacement measuring is abided by, generation of Abbe errors is avoided, and the measurement accuracy of a source tracing instrument is ensured. Uniformity, reliability and comparability of micro force measuring by using the micro cantilever beam in different labs can be ensured.

Description

technical field [0001] The invention belongs to the cross field of nanotechnology and metrology, and relates to a traceability calibration device and a traceability method for the elastic constant of a micro-cantilever beam. Background technique [0002] The three-dimensional dimensions of the length, width and thickness of the micro-cantilever are in the range of several nanometers (nano-meter) to several hundreds of micrometers (micro-meter). Micro-cantilever is an important sensing element on the micro-nano scale. It is often used as a force sensor to detect tiny physical, chemical and biological forces, and is also used to measure physical quantities such as temperature and medium viscosity. As an elastic sensing element, the micro-cantilever follows Hooke's law, that is, F=kΔz, where k is the elastic constant of the micro-cantilever and Δz is the displacement of the free end. It can be seen that the force measurement accuracy of the micro-cantilever beam depends on the...

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Problems solved by technology

Some scholars have also proposed a plan to use light levers as displacement measurement, but since the light rod actually measures the deflection angle of the micro-cantilever rather than the displacement, this solution cannot directly trace the elastic constant to the International System of Units SI

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