System for measuring hard disk magnetic head flight height and common-path dual-frequency laser interference measuring method
A high-flying, dual-frequency laser technology, applied in the field of optical measurement, can solve problems such as difficulty in improving measurement accuracy, and achieve the effects of avoiding light intensity calibration errors, high robustness, accuracy, and high stability
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[0035] The invention provides a system for measuring the flying height of a magnetic head of a hard disk and a common optical path laser interference measurement method. The structure and working principle of the system for measuring the flight performance of the hard disk magnetic head by dual-frequency laser heterodyne interferometry of the common optical path are described in detail in conjunction with the embodiments and accompanying drawings as follows:
[0036] The structure of this embodiment is as figure 2 The schematic diagram of the transmissive measurement and image 3 The schematic diagram of the reflective measurement is shown. Including: metering type transverse Zeeman He-Ne dual-frequency laser 1, used for spectroscopic detection of beat frequency reference signals; 10% reflective spectroscopic flat plate 2, semi-reflective spectroscopic flat plate 3 and mirror 12 constitute an adjustable beam splitting angle structure , small beam splitting angle Wollaston p...
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