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80results about How to "Wide gap" patented technology

Deep reactive ion etching process and microelectromechanical devices formed thereby

A process for forming a microelectromechanical system (MEMS) device by a deep reactive ion etching (DRIE) process during which a substrate overlying a cavity is etched to form trenches that breach the cavity to delineate suspended structures. A first general feature of the process is to define suspended structures with a DRIE process, such that the dimensions desired for the suspended structures are obtained. A second general feature is the proper location of specialized features, such as stiction bumps, vulnerable to erosion caused by the DRIE process. Yet another general feature is to control the environment surrounding suspended structures delineated by DRIE in order to obtain their desired dimensions. A significant problem identified and solved by the invention is the propensity for the DRIE process to etch certain suspended features at different rates. In addition to etching wider trenches more rapidly than narrower trenches, the DRIE process erodes suspended structures more rapidly at greater distances from anchor sites of the substrate being etched. At the masking level, the greater propensity for backside and lateral erosion of certain structures away from substrate anchor sites is exploited so that, at the completion of the etch process, suspended structures have acquired their respective desired widths.
Owner:GOOGLE LLC

Underwater propelling device for underwater vehicle

The present invention relates to an underwater propelling device (10) i
    • a stator (20) comprising circumferential arrayed coils (35) and being adapted to generate a controlled electromagnetic field along an axial direction,
    • a shaftless propellant rotor (30) comprising:
      • at least two magnetized ring-shaped plates, respectively an upper magnetized plate (31) and a lower magnetized plate (32), coaxially spaced-apart along said axial direction and perpendicular thereto such that said circumferential arrayed coils (35) are positioned therebetween, each plate (31, 32) defining a central aperture (31a, 32a) and having a circumferential array of radially extended magnetized poles (34) embedded therein, said magnetized poles (34) generating a magnetic field which interacts with the electromagnetic field of the stator (20) so as to cause the rotation of said plates (31, 32) about a central axis (ZZ′) parallel to said axial direction,
      • at least one ring-shaped propeller (33) defined by its outer periphery and its inner periphery, said propeller being received inside the central apertures (31a, 32a) of said plates (31, 32) and fixedly secured thereto,
      • a plurality of propeller blades (35) projecting inward from the inner periphery of said propeller (33), said blades (35) producing a thrust along the central axis (ZZ′) when the plates (31, 32) rotate,
wherein the rotor (30) is axially separated from the stator (20) by a gap, preferably less than 3 mm, so as to permit the formation of a hydraulic film inside said gap, said hydraulic film being adapted to provide lubrication of the rotor, thus reducing friction between the rotor and the stator, and to transmit the axial thrust force of the rotor to the stator.
Owner:ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
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