The utility model belongs to the technical field of
vacuum coating, and relates to a static seal magnetic
coupling rotating device which comprises a sample frame, a rotation driving component for driving the sample frame to rotate and a transmission component for transmitting rotation power, the transmission
assembly comprises a magnetic-permeable sleeve, a rotating shaft axially penetrating through the magnetic-permeable sleeve, a driven gear located outside the magnetic-permeable sleeve and a magnetic
coupling transmitting torque of the driven gear to the rotating shaft, the sample holder is fixed to the lower end of the rotating shaft, the upper end and the lower end of the magnetic-permeable sleeve are sealed, and the rotation driving
assembly drives the driven gear to rotate. According to the device, the rotation driving
assembly drives the rotating shaft to rotate through the magnetic
coupling, the magnetic permeable sleeve does not block magnetic force
permeation, and therefore the magnetic coupling can complete
torque transmission under the condition that the inside and the outside do not make direct contact. The magnetic permeable sleeve can separate the interior of the
vacuum chamber from the
atmosphere and is in a fixed state, so that a static sealing mode is adopted, and compared with a magnetic
fluid bearing, the cost is lower, and the vacuum stability is higher.