573results about "Gas cushion bearings" patented technology

A journal bearing assembly includes a bearing housing, a plurality of bearing pads, and a plurality of bearing pad support assemblies. The bearing housing includes a radial outer wall. The plurality of bearing pads are mounted within the bearing housing, and include at least one of a gas permeable porous media and an array of gas delivery holes. The plurality of bearing pad support assemblies are radially interposed between the bearing pads and the radial outer wall. Each of the bearing pad support assemblies includes a spring assembly and a damper assembly.

A combined externally pressurized gas and magnetic bearing assembly (3) includes an externally pressurized gas bearing (9) and a magnetic bearing (8) that are integrated together so as to have component parts common to both of the externally pressurized gas bearing (9) and the magnetic bearing (8). The externally pressurized gas bearing (9) or the magnetic bearing (8) may be disposed within an axial extent of the magnetic bearing (8) or the externally pressurized gas bearing (9), respectively. A spindle device (1) utilizing the combined externally pressurized gas and magnetic bearing assembly (3) is also provided which includes a housing (2) for supporting a main shaft (4) rotatably through the combined externally pressurized gas and magnetic bearing assembly (3). This combined externally pressurized gas and magnetic bearing assembly (3) can be applied not only to the radial bearing, but also to the axial bearing.

A support apparatus, a stage apparatus, an exposure apparatus, etc. are proposed that can increase response of a relative movement between a piston and a cylinder, etc. are proposed. There is provided a support apparatus including: a cylinder portion; a piston portion that is provided inside the cylinder portion and is movable in a Z direction; a fluid bearing formed in at least a portion between an inner wall of the cylinder portion and an outer wall of the piston portion, the support apparatus supporting a supported member in the Z direction with respect to a support member by means of a biasing force generated by the cylinder portion and the piston portion, in which fluids are supplied independently inside the fluid bearing and the cylinder.

The invention discloses an air floatation type rotary table which comprises an air floatation shaft and an air floatation sleeve. The air floatation shaft comprises a shaft portion, a top portion and a bottom portion, wherein the top portion and the bottom portion are arranged at the two opposite ends of the shaft portion respectively, the top portion comprises upper thrust surfaces which are opposite to the bottom portion, and the bottom portion comprises lower thrust surfaces which are opposite to the top portion. The air floatation sleeve comprises upper air flotation surfaces which are located on the top portion and lower air flotation surfaces which are located on the bottom portion, wherein the upper air flotation surfaces are in clearance fit with the upper thrust surfaces, the lower air flotation surfaces are in clearance fit with the lower thrust surfaces, and the inner surface of the air flotation sleeve is in clearance fit with the outer surface of the shaft portion. A plurality of air outlets which are connected with an external high-pressure air source are formed in the inner surfaces of the upper air flotation surfaces, the inner surfaces of the lower air flotation surfaces and the inner surface of the air flotation sleeve. According to the air floatation type rotary table, due to the fact that the two opposite upper air flotation surfaces and the two opposite lower air flotation surface are arranged on the air flotation sleeve, the axial static rigidity, rotation rigidity and axial rotation precision of the air flotation type rotary table are improved, a workpiece, to be detected, placed on the rotary table can be located at a stable height all the time, and the height where the workpiece is located is not changed along with the change of the air pressure.

The upper end of a static gas bearing member of a wafer side seal unit is connected to an edge section on the outgoing side of an exposure beam of a chamber in an air tight state via bellows, and the lower end surface is in a state forming a predetermined clearance with a wafer and a wafer holder. By this arrangement, the inside of the chamber is isolated from the outside. Accordingly, it becomes possible to maintain a vacuum environment in the periphery of the optical path of the exposure beam without arranging a vacuum chamber to house a wafer, a wafer holder, and a wafer stage, which allows the size of the entire exposure apparatus to be reduced, and also makes it easy to have access to the vicinity of the wafer stage.

In order to effect a seal; a porous material which comprises one side of two opposing surfaces is used to restrict and evenly distribute externally pressurized gas, liquid, steam, etc. between the two surfaces, exerting a force which is opposite the forces from pressure differences or springs trying to close the two faces together and so may create a non contact seal that is more stable and reliable than hydrodynamic seals currently in use.

A rigid support structure allows for faster and more accurate positioning of axially adjustable optical components in a laser processing system. Vibrational and thermal stability is improved when an optics assembly is housed in a rigid air bearing sleeve that is mounted to a support structure above a specimen stage.

A bearing material includes: a backing metal made of stainless steel; and a porous sintered metal layer integrated with at least one surface of the backing metal by means of a bonding layer, particles of an inorganic substance being contained in a dispersed manner at grain boundaries of the porous sintered metal layer, wherein the porous sintered metal layer containing the particles of the inorganic substance are composed of 4 to 10% by weight of tin, 10 to 40% by weight of nickel, not less than 0.1 and less than 0.5% by weight of phosphorus, and the balance consisting of copper.

A rotating device includes a fixed body having a base and a shaft, a hub, and a rotating body having a rotating-body-side encircling member fixed to the hub and encircling the shaft. A lubricant is present between the fixed body and the rotating body. The rotating-body-side encircling member and the shaft are each formed with a radial dynamic pressure generating groove. The fixed body includes a base-side encircling member having a disk part encircling the base-side portion of the shaft and a cylinder part encircling the rotating-body-side encircling member. The base-side encircling member has the disk part fixed to the shaft by interference fitting, and has the cylinder part fixed to the base. An air-liquid interface is located in a gap in the radial direction between the inner periphery of the cylinder part and the outer periphery of the rotating-body-side encircling member.

A turbomachine has a shaft mounted in a shaft housing, and a rotor in a rotor housing at one end of the shaft, for compression, expansion, or transport of a working gas. The shaft is mounted by hydrostatic, gas-lubricated bearings that have a connector to a compressed gas line that is connected with a pressure region of the turbomachine. A portion of the gas that is passed from the pressure region is applied to the bearing. The shaft is mounted so that the bearing effect is at least extensively independent of the rotational speed of the shaft, thereby guaranteeing support of the shaft during startup of the turbomachine, and good rigidity and low sensitivity to pressure surge stresses. The pressure in the connector to the compressed gas line is at least 5 bar greater than the pressure in the region of the ventilation connector.

The invention discloses an elastically supported foil dynamic pressure gas bearing with inherent structural pre-wedge space, comprising a bearing and a rotating shaft inside the bearing; an elastic supporting element is arranged inside the bearing, and the elastic supporting element and A top layer of flat foil is arranged between the rotating shafts, a smooth shaft section is arranged in the axial middle area of ​​the surface of the rotating shaft, a row of inclined grooves is provided on the surface of the rotating shaft and on both sides of the smooth shaft section, and the top layer is flat. The inside of the foil wraps around the rotating shaft and forms a pre-gap between the top flat foil and the rotating shaft, while the elastic support element and one end of the top flat foil are fixed at the same position of the bearing and the other end is free; the invention The advantage is that it can form a dynamic pressure air film at a relatively low speed and small foil deformation, make the contact between the shaft and the bearing even during the start and stop stages, reduce the contact friction time and wear between the shaft and the bearing, and improve System stability and reliability.

The invention discloses a slot aerodynamic journal bearing which comprises a bearing outer race and a bearing inner race. Slot patterns with regular shapes are arranged on the external circumference surface and the two end surfaces of the bearing inner race; the slot patterns on the two end surfaces are in mirror symmetry; and an axial contour line of the slot pattern on the external circumference surface is in one-to-one correspondence and is connected with radial contour lines of the slot patterns on the two end surfaces. The slot aerodynamic journal bearing can achieve 1-3kg loading capacity and 200,000-450,000rpm limit speed and meet the application of the aerodynamic journal bearing in the ultrahigh speed field under a higher load.

The invention relates to the technical field of electromagnetic bearings and particularly discloses a gas dynamic and static pressure mixed thrust protection bearing for electromagnetic bearing system. The protection bearing includes a gas static pressure thrust bearing, a gas dynamic pressure thrust bearing and a gas supply system. The gas static pressure thrust bearing and the gas dynamic pressure thrust bearing both generate axial forces, the direction of the resultant force of the axial forces is opposite to the direction of the force to be born, and the gas supply system provides high pressure gas to the gas static pressure thrust bearing. The inventive gas dynamic and static pressure mixed thrust protection bearing is simple in structure and easy to process and operate, can provide sufficient rigidity to support the rotor during idle rotation after the rotor drops, reduces contact and wear of the main shaft thrust disc and the protection bearing, reduces the negative influences of vibration and impact accompanied by rotor drop, prolongs the service life of the protection bearing, and improves reliability of the electromagnetic bearing system.