Active air-floatation support device

Abstract

The invention discloses an active air-floatation support device which comprises an air-floatation support body, an air-film active adjustment unit, a support body detecting unit and a drive control unit, wherein the support body detecting unit measures the state of air-floatation support, the drive control unit generates a control signal according to a detection signal to drive and control the air-film active adjustment unit to generate an active role so as to dynamically adjust the air film form of an air-floatation support surface, thereby dynamically adjusting the pressure distribution of air film gaps of the air-floatation support device, and improving the dynamic stiffness characteristic of air-floatation support. According to the active air-floatation support device, the dynamic stiffness characteristic of air-floatation support can be significantly increased, and the purpose of stabilizing air-floatation support is achieved. In addition, the active air-floatation support device also has the characteristics of compact structure, convenience in control and high precision, thus being especially suitable for occasions of ultra-precision machining or with high-speed spindles with a high requirement on support dynamic stiffness.

Description

technical field [0001] The invention belongs to the technical field of air-floating support devices, and more specifically relates to an active air-floating support device, which can improve bearing capacity and rigidity while achieving micron or even submicron-level adjustment accuracy. Background technique [0002] The air bearing device is mainly used in ultra-precision processing equipment to support precision moving parts. Compared with the traditional mechanical contact guide rail support, there is no direct contact between the moving parts of the air bearing and the support, which avoids contact friction during the movement, and the movement accuracy can be greatly improved. Therefore, in ultra-precision machining and electronic manufacturing , precision measurement, zero-gravity simulation and other fields, the air flotation support device has been widely used. [0003] The basic form of the air bearing device is that compressed air flows into the gap between the mo...

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Problems solved by technology

[0004] Various methods for improving the bearing capacity and stiffness of air bearings have been proposed in the prior art, such as improving the structural shape and size of the orifice and pressure chamber of the air bearing, but this type of passive air bearing The bearing capacity and rigidity of the device per unit area are limited, thus restricting the application of relatively heavy loads in precision machining or high-speed spindles; Active air bearings with area or orifice length, but this kind of scheme only has a good effect on adjusting the damping characteristics of the air bearing, and the adjustment effect on the support force and stiffness is still limited

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