The invention discloses a process
route for synthesizing 4-[4-(1, 1-dimethylethyl) phenyl]-1, 4-oxothiaonium salt and 1-(5, 5, 6, 6-tetrafluorospiro [1, 3-dioxane naphthene-2, 2 '-tricyclo [3.3. 1.13, 7]
decane]-5'-yl) 2, 2-difluoro-2-sulfoacetate, cation fragments are provided by bis (4-tert-butylphenyl)
iodine trifluoromethanesulfonate, and the cation fragments are provided by bis (4-tert-butylphenyl)
iodine trifluoromethanesulfonate. According to the synthetic
route, thioxane
sulfonate is formed through substitution, then
ion exchange is carried out, and finally the obtained intermediate is subjected to ketal to obtain the target
photoacid generator product. By optimizing
reaction conditions and a process
route, the use amount of resin is reduced, side reactions are effectively controlled in the front stage of the process, the purity, stability and yield of the
photoacid generator are improved, the
metal content and
halogen content of the compounds are reduced, and the yield of the
photoacid generator is improved. The requirements of modern microelectronic manufacturing on a high-performance
photoacid generator are met.